An Algorithm Study to Detect Mass Flow Controller Error in Plasma Deposition Equipment Using Artificial Immune System
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You, Young Min
(Department of Electronics Engineering, Myongji University)
Jeong, Ji Yoon (Department of Electronics Engineering, Myongji University) Ch, Na Hyeon (Department of Electronics Engineering, Myongji University) Park, So Eun (Department of Industrial and Management Engineering, Myongji University) Hong, Sang Jeen (Department of Electronics Engineering, Myongji University) |
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