• Title/Summary/Keyword: post-annealing treatment

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Effect of Annealing Atmosphere on the La2O3 Nanocrystallite Based Charge Trap Memory

  • Tang, Zhenjie;Zhao, Dongqiu;Hu, Huiping;Li, Rong;Yin, Jiang
    • Transactions on Electrical and Electronic Materials
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    • v.15 no.2
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    • pp.73-76
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    • 2014
  • $Pt/Al_2O_3/La_2Si_5O_x/SiO_2/Si$ charge trap memory capacitors were prepared, in which the $La_2Si_5O_x$ film was used as the charge trapping layer, and the effects of post annealing atmospheres ($NH_3$ and $N_2$) on their memory characteristics were investigated. $La_2O_3$ nanocrystallites, as the storage nodes, precipitated from the amorphous $La_2Si_5O_x$ film during rapid thermal annealing. The $NH_3$ annealed memory capacitor showed higher charge storage performances than either the capacitor without annealing or the capacitor annealed in $N_2$. The memory characteristics were enhanced because more nitrogen was incorporated at the $La_2Si_5O_x/SiO_2$ interface and interfacial reaction was suppressed after the $NH_3$ annealing treatment.

Formation of the precipitates in the Bi-2223/Ag superconducting tapes by post-heat treatment (Bi-2223 초전도 선재의 후열처리 과정에 의한 석출물의 형성)

  • Lee, Sang-Hee;Kim, Cheol-Jin;Chung, Jun-Ki;Yoo, Jae-Moo;Ko, Jae-Woong
    • 한국초전도학회:학술대회논문집
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    • v.10
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    • pp.262-267
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    • 2000
  • To tap the possibility of exploiting the precipitates as flux-pinning center in the Bi-2223 superconducting system, as-received Bi-2223/Ag tapes with the starting composition of Bi$_{1.8}$Pb$_{0.4}$Sr$_2$Ca$_{2.2}$Cu$_3$O$_8$ were post-annealed at various temperature, oxygen partial pressure, and annealing time. The 2$^{nd}$ phases in the annealed specimen were analysed with XRD, SEM, TEM, and EDS. The size and the distribution of the precipitates such as (Ca,Sr)$_2$(Pb,Bi)O$_4$ and Bi$_{0.5}$Pb$_3$Sr$_2$Ca$_2$CuO$_{12+{\delta}}$ (3221) in the Bi-2223 matrix was controllable by varying heat-treatment condition without breaking the connectivity of the 2223 grains. The nano-size precipitates within the 2223 grains are conjectured as working as flux-pinning sites, resulting in increased J$_c$ value.

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Effects of Growth Ambient, Process Pressure, and Heat Treatments on the Properties of RF Magnetron Sputtered GaMgZnO UV-Range Transparent Conductive Films

  • Patil, Vijay;Lee, Chesin;Lee, Byung-Teak
    • Korean Journal of Materials Research
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    • v.31 no.6
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    • pp.320-324
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    • 2021
  • Effects of growth variables and post-growth annealing on the optical, structural and electrical properties of magnetron-sputtered Ga0.04Mg0.10Zn0.86O films are characterized in detail. It is observed that films grown from pure oxygen plasma showed high resistivity, ~102 Ω·cm, whereas films grown in Ar plasma showed much lower resistivity, 2.0 × 10-2 ~ 1.0 × 10-1 Ω·cm. Post-growth annealing significantly improved the electrical resistivity, to 4.3 ~ 9.0 × 10-3 Ω·cm for the vacuum annealed samples and to 1.3 ~ 3.0 × 10-3 Ω·cm for the films annealed in Zn vapor. It is proposed that these phenomena may be attributed to the improved crystalline quality and to changes in the defect chemistry. It is suggested that growth within oxygen environments leads to suppression of oxygen vacancy (Vo) donors and formation of Zn vacancy (VZn) acceptors, resulting in highly resistive films. After annealing treatment, the activation of Ga donors is enhanced, Vo donors are annihilated, and crystalline quality is improved, increasing the electron mobility and the concentration. After annealing in Zn vapor, Zn interstitial donors are introduced, further increasing the electron concentration.

A Study on the Enhancement of Electrical Conductivity of Copper Thin Films Prepared by CVD Technology (화학적기상증착법에 의한 구리박막의 전기전도도 개선에 관한 연구)

  • 조남인;김용석;김창교
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.6
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    • pp.459-466
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    • 2000
  • For the applications in the ultra-large-scale-integration (ULSI) metallization processing copper thin films have been prepared by metal organic chemical vapor deposition (MOCVD) technology on TiN/Si substrates. The films have been deposited with varying the experimental conditions of substrate temperatures and copper source vapor pressures. The films were then annealed in a vacuum condition after the deposition and the annealing effect to the electrical conductivity of the films was measured. The grain size and the crystallinity of the films were observed to be increased by the post annealing and the electrical conductivity was also increased. The best electrical property of the copper film was obtained by in-situ annealing treatment at above 40$0^{\circ}C$ for the sample prepared at 18$0^{\circ}C$ of the substrate temperature.

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Effect of Thermal Annealing on the Electrical Properties of In-Si-O/Ag/In-Si-O Multilayer

  • Yu, Jiao Long;Lee, Sang Yeol
    • Transactions on Electrical and Electronic Materials
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    • v.17 no.4
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    • pp.201-203
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    • 2016
  • Transparent conductive multilayers have been fabricated using transparent amorphous Si doped indium oxide (ISO) semiconductors and metallic Ag of ISO/Ag/ISO. The resistivity of a multilayer is dependent on the middle layer thickness of silver. The thickness of the Ag layer is fixed at 11 nm and takes into account cost and optical transmittance. As-deposited ISO/Ag (11 nm)/ISO multilayer shows a measured resistivity of 7.585×10−5 Ω cm. After a post annealing treatment of 400℃, the resistivity is reduced to 4.332×10−5 Ω cm. The reduction of resistivity should be explained that the mobility of the multilayer increased due to the optimized crystalline, meanwhile, the Hall concentration of the multilayer showed an obscure change because the carriers mainly come from the insert of the Ag layer.

δ-Ferrite Behavior of Butt Weld Zone in Clad Steel Plates Depended on Holding Time of PWHT (클래드강 맞대기 용접부의 후열처리 유지시간에 따른 델타 페라이트 거동)

  • Park, Jae-Won;Lee, Chul-Ku
    • Journal of Welding and Joining
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    • v.32 no.2
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    • pp.29-36
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    • 2014
  • Recently, in order to enhance the function and usefulness of products, cladding of dissimilar materials that maximizes the performance of the material is being widely used in all areas of industry as an important process. Clad steel plate, produced by cladding stainless steel plate, an anticorrosive material, on carbon steel plate, is being used to produce pressure vessels. Stainless steel plate has good corrosion resistance, and carbon steel plate has good rigidity and strength; clad steel can satisfy all of these qualities at once. This study aims to find the ${\delta}$-ferrite behavior, mechanical properties, structure change, integrity and reliability of clad steel weld on hot rolled steel plates. For this purpose, multi-layer welding, repair welding and post weld heat treatment were implemented according to welding procedure specifications (WPS). In order to observe the mechanical properties and toughness of clad steel weld zone, post weld heat treatment was carried out according to ASME Sec. VIII Div.1 UW-40 procedure for post weld heat treatment. With heat treatment at $625^{\circ}C$, the hold time was used as the process variable, increased by intervals that were doubled each time, from 80 to 1,280 min. The structure of weld part was typical cast structure; localized primary austenite areas appeared near central vermicular ferrite and fusion line. The heat affected zone showed rough austenite structure created by the weld heat input. Due to annealing effects of heat treatment, the mechanical properties (tensile strength, hardness, impact value) of the heat affected area tended to decrease. From the results of this study, it is possible to conclude the integrity of clad steel welds is not affected much in field welding, repair welding, multi-layer welding, post weld heat treatment, etc.

Effects of Post Annealing on the Properties of ZnO:Al Films Deposited by RF-Sputtering (RF-Sputtering 법을 이용한 ZnO:Al 박막의 후 열처리에 따른 특성 변화)

  • Lee, Jae-Hyeong;Lee, Dong-Jin
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.9
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    • pp.789-794
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    • 2008
  • Zinc oxide (ZnO) has been widely studied for its practical applications such as transparent conduction electrodes for flat panel displays and solar cells. Especially, ZnO films show good chemical stability against hydrogen plasma, absence of toxicity, abundance in nature, and then suitable for photovoltaic applications. However, the fabrication process of thin film solar cells require a high substrate temperature and/or post heat treatment. Therefore, the layers have to withstand high temperatures, requiring an excellent stability without degrading their electronic and optical properties. In this paper, we investigated the stability of zinc oxide (ZnO) films doped with aluminum and hydrogen. Doped ZnO films were prepared by r.f. magnetron sputter and followed by heat treatment at different temperatures and for various times.

Structural Variation of Diamond-like Carbon Thin Film According to the Annealing Temperature (열처리온도에 따른 다이아몬드상 카본박막의 구조적 특성변화)

  • Choi Won-Seok;Park Mun-Gi;Hong Byung-You
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.8
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    • pp.701-706
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    • 2006
  • In addition to its similarity to genuine diamond film, diamond-like carbon (DLC) film has many advantages, including its wide band gap and variable refractive index. In this study, DLC films were prepared by the RF PECVD (Plasma Enhanced Chemical Vapor Deposition) method on silicon substrates using methane $(CH_4)$ and hydrogen $(H_2)$ gas. We examined the effects of the post annealing temperature on the structural variation of the DLC films. The films were annealed at temperatures ranging from 300 to $900^{\circ}C$ in steps of $200^{\circ}C$ using RTA equipment in nitrogen ambient. The thickness of the film and interface between film and substrate were observed by surface profiler, field emission scanning electron microscopy (FESEM), high resolution transmission electron microscopy (HRTEM), respectively. Raman and X-ray photoelectron spectroscopy (XPS) analysis showed that DLC films were graphitized ($I_D/I_G$, G-peak position and $sp^2/sp^3$ increased) ratio at higher annealing temperature. The variation of surface as a function of annealing treatment was verified by a AFM and contact angle method.

Effect of $N_2+H_2$ Forming Gas Annealing on the Interfacial Bonding Strength of Cu-Cu thermo-compression Bonded Interfaces (Cu-Cu 열압착 웨이퍼 접합부의 계면접합강도에 미치는 $N_2+H_2$ 분위기 열처리의 영향)

  • Jang, Eun-Jung;Kim, Jae-Won;Kim, Bioh;Matthias, Thorsten;Hyun, Seung-Min;Lee, Hak-Joo;Park, Young-Bae
    • Journal of the Microelectronics and Packaging Society
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    • v.16 no.3
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    • pp.31-37
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    • 2009
  • Cu-Cu thermo-compression bonding process was successfully developed as functions of the $N_2+H_2$ forming gas annealing conditions before and after bonding step in order to find the low temperature bonding conditions of 3-D integrated technology where the quantitative interfacial adhesion energy was measured by 4-point bending test. While the pre-annealing with $N_2+H_2$ gas below $200^{\circ}C$ is not effective to improve the interfacial adhesion energy at bonding temperature of $300^{\circ}C$, the interfacial adhesion energy increased over 3 times due to post-annealing over $250^{\circ}C$ after bonding at $300^{\circ}C$, which is ascribed to the effective removal of native surface oxide after post-annealing treatment.

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An Electrochemical Evaluation on the Corrosion Resistance of Welding Zone due to Kinds of Repair Welding Filler Metals and Post Weld Heat Treatment (보수용접봉의 종류와 용접후 열처리가 용접금속부의 내식성에 미치는 영향에 관한 전기화학적 평가)

  • Shin, Jae-Hyun;Moon, Kyung-Man
    • Corrosion Science and Technology
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    • v.9 no.6
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    • pp.310-316
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    • 2010
  • Recently a fuel oil of the diesel engine of the marine ship is being changed with heavy oil of low quality as the oil price is higher more and more. Therefore the wear and corrosion in all parts of the engine such as cylinder liner, piston crown, spindle and seat ring of exhaust valves are predominantly increased. In particular the degree of wear and corrosion of piston crown is more seriously compared to the other parts of the engine due to operating in severe environment such as the high temperature of exhaust gas and repeating impact. Thus the repair weldment of the piston crown is a unique method to prolong the its life in a economical point of view. In this case, filler metals having a high corrosion and wear resistance such as stellite 6, Inconel 625 and Inconel 718 are mainly being used for repair welding. However it has been often happened that piston crown on the ship,s job site is being actually inevitably welded with mild filler metals. Therefore in this study, filler metals such as E4301, E4313 and E4316 were welded at SS401 steel as the base metal, and corrosion property of their weld metals in the case of post weld heat treatment or not was investigated with some electrochemical methods such as measurement of corrosion potential, cathodic and anodic polarization curves, cyclic voltammogram and polarization resistance etc. in 0.1% $H_2SO_4$ solution. Corrosion resistance of the weld metal of E4301 was better than the other weld metals in the case of no heat treatment, however, its resistance was considerably decreased with post weld heat treatment(annealing:$625^{\circ}C$, 2 hr) compared to other weld metals. The weld metals of E4313 and E4316 showed a relatively good corrosion resistance by post weld heat treatment.