• 제목/요약/키워드: poly-crystallization

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Recent Advances in Poly-Silicon Crystallization

  • Klene, Brian;Knowles, David S.;Bowen, M. Shane;Turk, Brandon A.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.323-327
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    • 2006
  • We present the most recent experimental results on Thin-beam Directional X'tallization (TDX), a rapid excimer-laser-based crystallization method for creating extremely high-quality large-grained polycrystalline silicon films on glass substrates. We will present experimental data obtained with our prototype Gen 2 tool, and discuss the ability to produce different types of poly-Si material.

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정렬된 다공질 산화알루미늄을 이용한 새로운 다결정 실리콘 결정화 방법 (Novel Method of Poly-silicon Crystallization using Ordered Porous Anodic Alumina)

  • 김종연;김미정;김병용;오병윤;한진우;한정민;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.396-396
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    • 2007
  • Highly ordered pore structures as a template for formation of seeds have been prepared by the self-organization process of aluminum oxidation. The a-Si films were deposited on the anodic alumina films and crystallized by laser irradiation. It was found that un-melted part of fine poly-Si grain formed by explosive crystallization (EX) lead super lateral growth(SLG) and occluded with neighbor grains. The crystallized grains along the distribution of seeds were obtained. This results show a great potential for use in novel crystallization for decently uniform polycrystalline Si thin film transistors (poly-Si TFTs).

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일축 연신에 의한 폴리(트리메틸렌 데레프탈레이트)/ 폴리(에틸렌 데레프탈레이트) 블렌드의 구조 변화 (Structure Development of Uniaxially Drawn Poly(trimethylene terephthalate)/ Poly(ethylene terephthalnte) Blends)

  • 전병환;김환기;강호종
    • 폴리머
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    • 제28권1호
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    • pp.67-76
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    • 2004
  • 폴리(트리메틸렌 테레프탈레이트)/폴리(에틸렌 테레프탈레이트) (PTT/PET) 블렌드의 저온 연신 시, 연신 온도와 연신 비에 의한 PTT/PET 100/0, 90/10 및 80/20 블렌드의 열적 특성, 결정화도 및 배향 특성을 살펴보고 이에 따른 수축률과 기계적 특성 변화를 고찰하였다. 연신에 의한 배향과 응력에 의한 결정화 발현에 의해 PTT/PET 블렌드의 상대 결정화도와 유리 전이 온도가 증가되는 반면 냉결정화 온도 및 냉결정화 엔탈피는 감소하였다. PET 유리 전이 온도 이하 연신의 경우 PET의 첨가에 의해 결정화도는 감소되나 배향도 증가에 의하여 인장강도 및 탄성계수가 증가하였다. 수축률은 주사슬 배향에 따라 증가되나 연신에 의한 결정화도 증가에 의하여 최소화될 수 있음을 알 수 있었다.

Channel Orientation Dependent Electrical Characteristics of Low Temperature Poly-Si Thin-film Transistor Using Sequential Lateral Solidification Laser Crystallization

  • Lai, Benjamin Chih-ming;Yeh, Yung-Hui;Liu, Bo-Lin
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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    • pp.1263-1265
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    • 2007
  • The electrical characteristics of low temperature poly-Si (LTPS) thin-film transistors (TFT) with channel parallel and perpendicular to the direction of lateral growth were studied. The poly-Si film was crystallized using sequential lateral solidification (SLS) laser crystallization technique. The channel orientation dependent turn-on characteristics were investigated by using gated-diodes and capacitance-voltage measurements

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Crystallization and Melting Behavior of Silica Nanoparticles and Poly(ethylene 2,6-naphthalate) Hybrid Nanocomposites

  • Kim Jun-Young;Kim Seong-Hun;Kang Seong-Wook;Chang Jin-Hae;Ahn Seon-Hoon
    • Macromolecular Research
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    • 제14권2호
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    • pp.146-154
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    • 2006
  • Organic and inorganic hybrid nanocomposites based on poly(ethylene 2,6-naphthalate) (PEN) and silica nanoparticles were prepared by a melt blending process. In particular, polymer nanocomposites consisting mostly of cheap conventional polyesters with very small quantities of inorganic nanoparticles are of great interest from an industrial perspective. The crystallization behavior of PEN/silica hybrid nanocomposites depended significantly on silica content and crystallization temperature. The activation energy of crystallization for PEN/silica hybrid nanocomposites was decreased by incorporating a small quantity of silica nanoparticles. Double melting behavior was observed in PEN/silica hybrid nanocomposites, and the equilibrium melting temperature decreased with increasing silica content. The fold surface free energy of PEN/silica hybrid nanocomposites decreased with increasing silica content. The work of chain folding (q) for PEN was estimated as $7.28{\times}10^{-20}J$ per molecular chain fold, while the q values for the PEN/silica 0.9 hybrid nanocomposite was $3.71{\times}10^{-20}J$, implying that the incorporation of silica nanoparticles lowers the work required to fold the polymer chains.

Influence of Amorphous Polymer Nanoparticles on the Crystallization Behavior of Poly(vinyl alcohol) Nanocomposites

  • Lee, Kyung-Jin;Lee, Ji-Hye;Hong, Jin-Yong;Jang, Jyong-Sik
    • Macromolecular Research
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    • 제17권7호
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    • pp.476-482
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    • 2009
  • The crystallization behavior of poly(vinyl alcohol) (PVA) in the presence and absence of polypyrrole nanoparticles (PPy NPs) was investigated in terms of the heterogeneous nucleation effect of PPy NPs using FTIR, X-ray diffraction, differential scanning calorimeter and polarized optical microscope analysis. PPy NPs were prepared by dispersion polymerization method stabilized by PVA in aqueous solution. A polymer nanocomposite with uniform dispersity could be readily obtained due to the enhanced compatibility between the filler and matrix. Compared with the PPy NP-absent PVA, the PPy NP/PVA nanocomposite exhibited an enhanced degree of crystallinity. The degree of crystallinity increased up to 17% at the PPy NP concentration of 1 wt%, compared to the pristine PVA. The PPy NP acted as an effective nucleating agent during the crystallization process, thereby enhancing the degree and rate of crystallization. The kinetics study of the crystallization also revealed the decreased value of the Avrami coefficient in the case of the PPy NP/PVA nanocomposite.

다공질 양극산화 피막을 이용한 고균일 다결정 살리콘의 성장 (Growth of High Uniform Polycrystalline Grain on the Highly Ordered Porous Anodic Alumina)

  • 김종연;한진우;김영환;김병용;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.375-375
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    • 2007
  • In the conventional crystallization method, thepoly-Si TFTs show poor device-to-device uniformity because of the random location of the grain boundaries. However, our new crystallization method introduced in this paper employed substrate-embedded seeds on the highly ordered anodic alumina template to control both the location of seeds and the number of grain boundaries intentionally. In the process of excimer laser crystallization (ELC), a-Si film deposited on the anodic alumina by low pressure chemical vapor deposition (LPCVD) is transformed into fine poly-Si grains by explosive crystallization (XC) prior to primary melting. At the higher energy density, the film is nearly completely melted and laterally grown by super lateral growth (SLG) from remained small part of the fine poly-Si grains as seeds at the Si/anodic alumina interface. Resultant grain boundaries have almost linear functions of the number of seeds in concavities of anodic alumina which have a constant spacing. It reveals the uniformity of. device can be enhanced prominently by controlling location and size of pores which contains fine poly~Si seeds under artificial anodizing condition.

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고상 결정화에 의해 제작된 다결정 실리콘 박막의 특성 연구 (A Study on the characteristics of polycrystalline silicon thin films prepared by solid phase cyrstallization)

  • 김용상
    • E2M - 전기 전자와 첨단 소재
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    • 제10권8호
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    • pp.794-799
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    • 1997
  • Poly-Si films have been prepared by solid phase crystallization of LPCVD(low-pressure CVD) amorphous silicon. The crystallinity of poly-Si films has been derived from UV reflectance spectrum and lies in the range between 70% and 80% . From XRD measurement the peak at 28.2$^{\circ}$from (111) plane is dominantly detected in the SPC poly-Si films, The average grain size of poly-Si film is determined by the image of SEM and varies from 4000 $\AA$ to 8000$\AA$. The electrical conductivity of as-deposited amorphous silicon film is about 2.5$\times$10$^{-7}$ ($\Omega$.cm)$^{-1}$ , and 3~4$\times$10$^{-6}$ ($\Omega$.cm)$^{-1}$ of room temperature conductivity is the SPC poly-Si films. The conductivity activation energies are 0.5~0.6 eV or the 500$\AA$-thick poly-Si films.

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Crystallization and Molecular Relaxation of Poly(Ethylene Terephthalate) Annealed in Supercritical Carbon Dioxide

  • Jung, Yong-Chae;Cho, Jae-Whan
    • Fibers and Polymers
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    • 제6권4호
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    • pp.284-288
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    • 2005
  • Poly(ethylene terephthalate) was annealed at different temperature and pressure of supercritical carbon dioxide $(CO_2)$ using samples quenched from the melt. Crystallization and molecular relaxation behavior due to $CO_2-annealing$ of samples were investigated using differential scanning calorimetric and dynamic mechanical measurements. The glass transition and crystallization temperatures significantly decreased with increasing temperature and pressure of $CO_2$. The dynamic mechanical measurement of samples annealed at $150^{\circ}C$ in supercritical $CO_2$ showed three relaxation peaks, corresponding to existence of different amorphous regimes such as rigid, intermediate, and mobile domains. As a result, the mobile chains were likely to facilitate crystallization in supercritical state. It also led to the decreased modulus of $CO_2-annealed$ samples with increasing pressure.