• Journal of Information Display
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• v.7 no.2
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• pp.16-21
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• 2006

The effect of improvement on the surface morphology of screen-printed carbon nanotube (CND) films was studied by using the optically clear poly-dimethylsiloxane (PDMS) elastomer for surface treatment. After the PDMS activation treatment was applied to the diode-type CNT cathode, the entangled carbon nanotube (CNT) bundles were broken up into individual free standing nanotubes to remarkably improve the field-emission characteristics over the as-deposited CNT film. Also, the cathode film morphology of a top gated triode-type structure can be treated by using the proposed surface treatment technique, which is a low-cost process, simple process. The relative uniform emission image showed high brightness with a high anode current. This result shows the possibility of using this technique for surface treatment of large-size field emission displays (FEDs) in the future.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1857-1862
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• 2008

Resonant frequency tuning of micro devices is essential to achieve performance uniformity and high sensitivity. Previously reported frequency tuning methods using electrostatic force or mass deposition are not directly applicable to non-conducting polymer devices and have limitations such as dielectric breakdown or low tunable bandwidth. In this paper, thermally frequency-tunable microactuators with poly-dimethylsiloxane membranes are proposed. Permanent and/or nonpermanent frequency tunings are possible using a simple temperature control of the device. Resonant frequency and Q-factor variations of devices according to temperature change were studied using a micro heater and laser Doppler vibrometer. The initial resonant frequencies determined by polymer curing and hardening temperatures are reversibly tuned by thermal cycles. The measured resonant frequency of 9.7 kHz was tuned up by ${\sim}25%$ and Q-factor was increased from 14.5 to 27 as the micro heater voltage increased from 0 to 70 V.

• Proceedings of the Materials Research Society of Korea Conference
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• 2010.05a
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• pp.30.1-30.1
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• 2010

Hydrogen silsesquioxane (HSQ)는 spin-on glass (SOG)의 일종으로 spin-coating이 가능하며 $400^{\circ}C$ 이상의 고온에서의 어닐링을 통해 silica로 변환되는 물질이다. 이 물질은 가시광선 영역에서 95% 이상의 높은 투과도를 나타내며 산화물로의 변환 공정이 간단하며 표면 개질이 용이하기 때문에 나노 바이오, 반도체, 광전자 소자 등의 다양한 분야로의 적용이 기대되는 물질이다. 최근 나노 기술의 발전에 따라 다양한 나노 구조물을 이용하여 소자들의 효율을 향상시키는 연구가 활발하게 진행되고 있다. 따라서 HSQ를 이용하는 소자의 효율을 높이기 위해서는 쉽고 간단하면서 생산성이 높은 HSQ 나노 구조물 제작 기술에 대한 연구가 필요하다. 현재 개발된 대면적 HSQ 나노 구조물 제작 기술로는 e-beam lithography, x-ray lithography, room temperature nanoimprint lithography 등이 있다. 하지만 이와 같은 나노 패터닝 기술들은 생산성이 낮거나 공정이 복잡한 단점이 있다. 본 연구에서는 poly(dimethylsiloxane) (PDMS) mold를 이용한 직접 printing 기술을 통해 HSQ 나노 구조물을 제작하는 기술을 개발하였다. 이 기술은 대면적에 간단한 기술로 HSQ 나노 패턴을 제작할 수 있으며 master mold의 패턴이 그대로 HSQ layer로 전사되기 때문에 제작이 까다로운 아날로그 패턴도 손쉽게 제작할 수 있는 장점을 가지고 있다. 따라서 이와 같은 HSQ 직접 printing 기술을 이용하여 HSQ 아날로그 나노 패턴을 제작하고 이의 응용기술에 대한 연구를 진행하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.5
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• pp.515-520
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• 2004

We report on the development of a Piezoelectric valvc that is designed to have a high reliability for fluid control systems, such as mass flow control, transportation and chemical analysis. The valve was fabricated using a MCA(multilayer ceramic actuator), which has a low consumption power, high resolution and accurate control. The fabricated valve is composed of MCA, a valve actuator die and an seat die. The design of the actuator dic was done by FEM(finite element method) modeling, respectively. And, the valve seat die with 6 trenches was made. and the actuator die, which possible to optimize control to MCA, was fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the scat/actuator die structure. PDMS(poly dimethylsiloxane) sealing pad was fabricated to minimize a leak-rate. It was also bonded to scat die and stainless steel package. The flow rate was 9.13 sccm at a supplied voltage of 100 V with a 50 % duty ratio and non-linearity was 2.24 % FS. From these results, the fabricated MCA valve is suitable for a variety of flow control equipments, a medical bio-system, semiconductor fabrication process, automobile and air transportation industry with low cost, batch recess and mass production.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.51-51
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• 2012

There is a growing interest in innovative chemical synthesis in microreactors owing to high efficiency, selectivity, and yield. In microfluidic systems, the low-volume spatial and temporal control of reactants and products offers a novel method for chemical manipulation and product generation. Glass, silicon, poly(dimethylsiloxane) (PDMS), and plastics have been used for the fabrication of miniaturized devices. However, these materials are not the best due to either of low chemical durability or expensive fabrication costs. In our group, we have recently addressed the demand for economical resistant materials that can be used for easy fabrication of microfluidic systems with reliable durability. We have suggested the use of various specialty polymers such as silicon-based inorganic polymers and fluoropolymer, flexible polyimide (PI) films that have not been used for microfluidic devices, although they have been used for other areas. And inexpensive lithography techniques were used to fabricate Lab-on-a-Chip type of microreactors with differently devised microchannel design. These microreactors were demonstrated for various synthetic reactions: liquid, liquid-gas organic chemical reactions in heterogeneous catalytic processes, syntheses of polymer and non-trivial inorganic materials. The microreactors were inert, and withstand even harsh conditions, including hydrothermal reaction. In addition, various built-in microstructures inside the microchannels, for example Pd decorated peptide nanowires, definitely enhance the uniqueness and performance of microreactors. These user-friendly Lab-on-a-Chip devices are useful alternatives for chemist and chemical engineer to conventional chemical tools such as glass.

• 한국정보디스플레이학회:학술대회논문집
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• 2007.08a
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• pp.155-158
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• 2007

Printed organic thin-film transistor(OTFT) to use as a switching device for an organic light emitting diode(OLED) were fabricated in the microcontact printing and direct printing processes at room temperature. The gate electrodes($5{\mu}m$, $10{\mu}m$, and $20{\mu}m$) of OTFT was fabricated using microcontact printing process, and source/drain electrodes ($W/L=500{\mu}m/5{\mu}m$, $500{\mu}m/10{\mu}m$, and $500{\mu}m/20{\mu}m$) was fabricated using direct printing process with hard poly(dimethylsiloxane)(h-PDMS) stamp. Printed OTFT with dielectric layer was formed using special coating system and organic semiconductor layer was ink-jet printing process. Microcontact printing and direct printing processes using h-PDMS stamp made it possible to fabricate printed OTFT with channel lengths down to $5{\mu}m$, and reduced the process by 20 steps compared with photolithography. As results of measuring he transfer characteristics and output characteristics of OTFT fabricated with the printing process, the field effect characteristic was verified.

• Macromolecular Research
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• v.17 no.3
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• pp.192-196
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• 2009

Recently, the multi-screening of target materials has been made possible by the development of the surface plasmon resonance (SPR) imaging method. To adapt this method to biochemical analysis, the multi-patterning technology of protein microarrays is required. Among the different methods of fabricating protein microarrays, the microfluidic platform was selected due to its various advantages over other techniques. Microfluidic devices were designed and fabricated with polydimethylsiloxane (PDMS) by the replica molding method. These devices were designed to operate using only capillary force, without the need for additional flow control equipment. With these devices, multiple protein-patterned sensor surfaces were made, to support the two-dimensional detection of various protein-protein interactions with SPR. The fabrication technique of protein microarrays can be applied not only to SPR imaging, but also to other biochemical analyses.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.38 no.8
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• pp.709-714
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• 2014

Reverse-offset printing is one of the technologies that can be used for patterning fine features of the order of a few micrometers for printed electronics. In reverse-offset printing, a coated ink film is transferred to a blanket made of elastomer-like poly-dimethylsiloxane. Then, the blanket is impressed onto a clich$\acute{e}$ that has intaglio patterns. The blanket is deformed by penetrating the intaglio of the clich$\acute{e}$ according to the printing pressure. Excessive deformation of the blanket can cause printing defects upon touching the bottom of the intaglio pattern, especially in large patterns. In this paper, we modelled the deformation of the blanket using the finite element method. Considering the actual printing parameters, a condition for fabricating a clich$\acute{e}$ is proposed to prevent defects by the deformation of the blanket.

• Proceedings of the Membrane Society of Korea Conference
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• 1997.10a
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• pp.69-70
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• 1997

Polyimides and related polymers, when synthesized from aromatic monomers, have generally rigid chain structures resulting in a low gas permeability. The rigidity of polymer chains reduces the segmental motion of chains and works as a good barrier against gas transport. To overcome the limit of use as materials of gas separation membranes due to low gas permeability, block copolymers with the incorporation of flexible segments like siloxane linkage and ether linkage have been studied. These block copolymers have microphase-separated structures composed of microdomains of flexible poly(dimethylsiloxane) or polyether segments and of rigid polyimides segments. In case of rigid-flexible block copolymers, the characteristics of both phases for gas permeation are of great difference. The permeation of gas molecules occurs favorably through microdomains of flexible segments, whereas those of rigid segments hinder the permeation of gas molecules. Accordingly the increase of content of flexible segments in a rigid polymer matrix will increase the gas permeability of the membrane linearly. However, this prediction does not satisfy enough many experimental results and in particular the drastic increase of the permeability is observed in a certain volume fraction. It was proposed that the gas transport mechanism is dominated by diffusion rather than gas solubility in a certain content of flexible phase if solution-diffusion mechanism is adopted. However, the transition from solubility-dependent to diffusion-dependent cannot be explained by the understanding of mechanism itself. Therefore, we consider an effective chemical path which permeable phase can form in a microheterogenous medium, and percolation concept is introduced to describe the permeability transition at near threshold where for the first time a percolation path occurs. The volume fraction of both phases is defined as V$_{\alpha}$ and V$_{\beta}$ in block copolymers, and the volume of $\beta$ phase in the threshold forming geometrically a traversing channel is defined as V$_{\betac}$. The formation mechanism of shortest chemical channel is schematically depicted in Fig. 1.

• Journal of Magnetics
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• v.17 no.4
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• pp.302-307
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• 2012

We have designed, fabricated and tested an integrated microfluidic chip with a Planar Hall Effect (PHE) sensor. The sensor was constructed by sequentially sputtering Ta/NiFe/Cu/NiFe/IrMn/Ta onto glass. The microfluidic channel was fabricated with poly(dimethylsiloxane) (PDMS) using soft lithography. Magnetic nanoparticles suspended in hexadecane were used as ferrofluid, of which the saturation magnetisation was 3.4 emu/cc. Droplets of ferrofluid were generated in a T-junction of a microfluidic channel after hydrophilic modification of the PDMS. The size and interval of the droplets were regulated by pressure on the ferrofluid channel inlet. The PHE sensor detected the flowing droplets of ferrofluid, as expected from simulation results. The shape of the signal was dependent on both the distance of the magnetic droplet from the sensor and the droplet length. The sensor was able to detect a magnetic moment of $2{\times}10^{-10}$ emu at a distance of 10 ${\mu}m$. This study provides an enhanced understanding of the magnetic parameters of ferrofluid in a microfluidic channel using a PHE sensor and will be used for a sample inlet module inside of integrated magnetic lab-on-a-chip systems for the analysis of biomolecules.