• Journal of Welding and Joining
• /
• 제17권6호
• /
• pp.62-69
• /
• 1999

The advantages of Thermal sprayed coatings as a replacement for cast iron liners are reduced weight, better heat transfer and reduced cost. One of the most important performance attributes of a cylinder bore coating is its wear resistance, since it must survive the abrasive sliding of both the piston rings and the piston skirt. In this study, composite powders were prepared by ball milling of Al-13Si-3Mg(wt%) alloy with SiC particles. The concentrations of SiC were 40 and 60wt%. The composite powders were sprayed using Metco-9MB plasma torch. Plasma sprayed coatings were heat-treated at 500℃ for 3 hours. The wear resistances of the plasma sprayed coatings were found to improve with heat treatment and superior to the commercially available G.C.I.(gray cast iron). AlSiMg-40SiC heat-treated coatings showed the best wear resistance in this study.

• Transactions on Electrical and Electronic Materials
• /
• 제3권4호
• /
• pp.1-4
• /
• 2002

As the application of semiconductor chips into electronics increases, it requires more complete integration, which results in higher performance. And it needs minimization in device design for cost saving of manufacture. Therefore oxide gap fill has become one of the major issues in sub-micron devices. Currently HDP (High-Density Plasma) CVD system is widely used in IMD (Inter Metal Dielectric) to fill narrower space between metal lines. However, HDP-CVD system has some potential problems such as plasma charging damage, metal damage and etc. Therefore, we will introduce about one of via resistance failure by metal damage and a preventive method in this paper.

• 한국표면공학회지
• /
• 제50권6호
• /
• pp.432-438
• /
• 2017

AZ91D casting alloy requires an advanced plasma anodizing processing because large amount of defects are liable to generate during anodization. In this study, plasma electrolytic oxidation (PEO) of AZ91D Mg alloy was conducted by the application of either constant voltage or current using a pulse mode and its effects on pore formation, surface roughness and corrosion resistance were investigated. The PEO films showed a three-layer structure. The PEO film thickness was found to increase linearly with voltage. The surface roughness, Ra, ranged between $0.2{\mu}m$ and $0.3{\mu}m$. The corrosion resistance increased from RN 3.5 to 9.5 by the PEO treatment when evaluated according to the 72 hour salt spray test. The PEO-treated surface exhibited higher pitting potential than the raw material.

• 열처리공학회지
• /
• 제19권2호
• /
• pp.90-95
• /
• 2006

Nitriding or carburizing of carbon steels results in good mechanical properties such as high surface hardness and wear resistance but it has no affection on the corrosion resistance. Corrosion properties of nitriding and carburizing steels could be deteriorated. So, recently, there have been great demand for oxi-nitriding to enhance both mechanical properties and corrosion resistance. In this study, the corrosion resistance of carbon steel, S35C, and free cutting steel, SUM222, are prepared by vacuum nitriding and vacuum post-oxidation were compared with those treated by nitriding. After vacuum post-oxidation, $5{\mu}m$ oxide layer was formed on the nitride layer with $20{\sim}30{\mu}m$ depth. Potentio-dynamic polarization curve in corrosion test showed that the corrosion potential after post oxidation was increased from 200 mV to 800 mV in S35C and from 600 mV to 1200 mV in SUM222. SEM analyses showed that pores was increased and surface roughness became rougher with post oxidation. However, the formation of $Fe_3O_4$ resulted in the enhanced corrosion resistance of steels.

• 반도체디스플레이기술학회지
• /
• 제21권1호
• /
• pp.119-126
• /
• 2022

MAS-based glass, which has been studied to replace the ceramic material used in the plasma etching chamber, has problems such as forming and processing due to its high melting temperature. To solve this problem, in this study, fluoride was added to the existing MAS-based glass to increase the workability in the glass manufacturing and to improve the chemical resistance to CF₄/Ar/O₂ plasma gas. Through RAMAN analysis, the structural change of the glass according to the addition of fluoride was observed. In addition, it was confirmed that high-temperature viscosity and thermal properties decreased as the fluoride content increased and plasma resistance was maintained, it showed an excellent etching rate of up to 11 times compared to quartz glass.

• 신재생에너지
• /
• 제9권2호
• /
• pp.23-29
• /
• 2013

Furnace and laser is currently the most important doping process. However furnace is typically difficult appling for selective emitters. Laser requires an expensive equipment and induces a structural damage due to high temperature using laser. This study has developed a new atmospheric pressure plasma source and research atmospheric pressure plasma doping. Atmospheric pressure plasma source injected Ar gas is applied a low frequency (a few 10 kHz) and discharged the plasma. We used P type silicon wafers of solar cell. We set the doping parameter that plasma treatment time was 6s and 30s, and the current of making the plasma is 70 mA and 120 mA. As result of experiment, prolonged plasma process time and highly plasma current occur deeper doping depth and improve sheet resistance. We investigated doping profile of phosphorus paste by SIMS (Secondary Ion Mass Spectroscopy) and obtained the sheet resistance using generally formula. Additionally, grasped the wafer surface image with SEM (Scanning Electron Microscopy) to investigate surface damage of doped wafer. Therefore we confirm the possibility making the selective emitter of solar cell applied atmospheric pressure plasma doping with phosphorus paste.

• 한국표면공학회:학술대회논문집
• /
• 한국표면공학회 2012년도 춘계학술발표회 논문집
• /
• pp.179-180
• /
• 2012

Back ferrule is a circular ring shaped metallic object which is used for fastening, joining or reinforcement during the tube fitting as well as to prevent leakage. Therefore, during tube fitting the leading edge of the back ferrule should be sufficiently hard enough to prevent leakage. In our research, we concentrated the improvement of two major factors. Firstly, to improve the surface hardness of the back ferrule made by AISI 316 Stainless Steel. Secondly, the enhancement of corrosion resistance of back ferrule after plasma treatment. Initially, the corrosion resistance and hardness of the back ferrule (both commercial and without treated) was not good enough for tube fitting but after applying plasma treatment with suitable conditions on ferrule, we improved the corrosion resistance and hardness of the back ferrule dramatically.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
• /
• pp.160-160
• /
• 1999

To reduce the fouling of heat exchangers, the plasma polymerized films was coated on the heat exchangers, and an effect of plasma polymerized film on fouling of heat exchangers was investigated. Monomer and reactive gases were used as the precursors of plasma polymerization. Plasma polymerized films were deposited with process parameters of pressure, power, and ratio of gases. Plasma polymerized films could be served as functional layers of good wettability and high resistance to corrosion. Wettability of plasma polymerized film could be controlled by the ratio change gas mixture. Hydrophilicity of plasma polymerized films on heat exchanger in air conditioner can provide improvement in performance of heat exchanger which results from good water drainage, decrease of pressure drop. DC-plasma polymerized films improve resistance to corrosion whcih is related to deposit formation in heat exchangers. The difference in the build up of fouling deposits between bare substrate and plasma polymerized substrate was investigated by scanning electron microscopy (SEM). An effect of plasma polymerized film on fouling of heat exchangers was discussed in terms of surface properties such as wettability, surface chemical state.

• 마이크로전자및패키징학회지
• /
• 제26권3호
• /
• pp.37-41
• /
• 2019

Ag나노와이어 도전성 잉크를 플렉서블한 투명 기판 위에 코팅 후 이러한 여분의 유기물을 $O_2$ 플라즈마를 이용하여 제거함으로써 Ag 나노와이어를 이용한 투명전극의 면저항과 광학적 특성을 최적화하였다. Ag 나노와이어 도전성 잉크를 코팅한 후 30초간 $O_2$ 플라즈마 처리를 하였을 때 면저항은 최대 27 % 정도 감소하였으며, 잔류 유기물의 제거를 통하여 그 광학적 특성도 향상됨을 알 수 있었다. 또한 $O_2$ 플라즈마 처리 시간이 30초 이상 증가할 경우 그 면저항이 오히려 감소함을 확인하였는데, 이는 과도한 $O_2$ 플라즈마로 인하여 Ag나노와이어의 degradation이 일어나는데 그 원인이 있음을 확인하였다.

• 한국표면공학회지
• /
• 제31권6호
• /
• pp.325-333
• /
• 1998

A duplex surface treatment process of simultaneous aluminizing-chromizing process followed by plasma nitriding was performed on AISI HI3 steel and STS 403 steel. The properties of these duplex-treated steels were investigated and were compared with those of steels treated by single process of either simultaneous aluminizing-chromizing or plasma nilriding, in terms of microstructure, microhardness and high temperature wear resistance. Sim~dtaneous alumizing-chromizing process was done using a 2-step coating cycle and plasma nitriding process was done at $530^{\circ}C$ for 1.5 hour. AISI HI3 steel and STS 403 steel showed a FeA1 compound layer of approximately 350$\mu\textrm{m}$ thickness on the surface after simultaneous diffusion coating and nitrided layer of approximately 70-80$\mu\textrm{m}$ formed after the subsequent plasma nitriding process. The microhardness was improved much more by the duplex surface heatment than only by plasma nitriding. In addition the duplex treated specimens showed an improved high temperature wear resistance.