• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.277-277
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• 2009

In this paper, PMPG (Piezoelectric Micro Power Generator) was investigated by ANSYS FEA (Finite Element Analysis) to decrease operating frequency and improve out power. The micro power generator was designed to convert ambient vibration energy to electrical power as a ZnO piezoelectric material. To find optimal model in low vibration ambient, the shape of power generator was changed with different membrane width, thickness, length, and proof mass size. Used the ANSYS modal analysis, bending mode and stress distribution of optimal model were analyzed. Also, the displacement with the frequency range was analyzed by harmonic analysis. From the simulation results, the resonance frequency of optimal model is about 373 Hz and confirmed the possibility of ZnO micro power generator for wireless sensor node applications.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.439-439
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• 2009

Nowadays, source of MEMS, USN, Hybrid parts pay attention to energy harvesting. On this paper, energy harvesting was studied using piezoelectric effect. And, piezoelectric generator was designed and fabricated. Generators were designed by FEM simulation program and generators were made by attaching cymbal type metal plates on upper and bottom sides of a disc type piezoelectric ceramic. Output AC power was rectified to DC power by full bridge circuit and converted to regular voltage power by DC-DC converter. The final output power was charged to Ni-Cd battery. Using fabricated generators, output voltages dependant on thickness of ceramic, displacement of vibration, frequency of vibration were measured.

• Journal of Sensor Science and Technology
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• v.18 no.5
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• pp.372-376
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• 2009

This paper describes the characteristics of piezoelectric micro power generators by the ANSYS FEA(finite element analysis). The micro power generator was designed to convert ambient vibration energy to electrical power as a ZnO piezoelectric material. To find optimal model in low vibration ambient, the shape of power generator was changed with different membrane width, thickness, length, and proof mass size. Using the ANSYS modal analysis, bending mode and stress distribution of optimal model were analyzed. Moreover, the displacement with the frequency range was analyzed by harmonic analysis. From the simulation results, the resonance frequency of optimal model is about 373 Hz and investigate the possibility of ZnO micro power generator for ambient vibration applications.

• Journal of Sensor Science and Technology
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• v.19 no.3
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• pp.209-213
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• 2010

This paper describes the fabrication and characteristics of AlN piezoelectric MPG(micro power generator). The micro energy harvester was fabricated to convert ambient vibration energy to electrical power as a AlN piezoelectric cantilever with Si proof-mass. To be compatible with CMOS process, AlN thin film was grown at low temperature by RF magnetron sputtering and micro power generators were fabricated by MEMS technologies. X-ray diffraction pattern proved that the grown AlN film had highly(002) orientation with low value of FWHM(full width at the half maximum, $\theta=0.276^{\circ}$) in the rocking curve around(002) reflections. The implemented harvester showed the $198.5\;{\mu}m$ highest membrane displacement and generated 6.4 nW of electrical power to $80\;k{\Omega}$ resistive load with $22.6\;mV_{rms}$ voltage from 1.0 G acceleration at its resonant frequency of 389 Hz. From these results, the AlN piezoelectric MPG will be possible to suitable with the batch process and confirm the possibility for power supply in portable, mobile and wearable microsystems.

• Journal of The Institute of Information and Telecommunication Facilities Engineering
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• v.8 no.1
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• pp.40-46
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• 2009

This paper presents a self-sustaining system, and an effective method in enhancing overall energy efficiency. The proposed system consists of the two major nodes: a slave node, which contains the environment information (e.g., temperature, humidity, etc.); and a master node, which communicates with the slave nodes, and transmit the slave node's information to users. All slave nodes are under control of the master node. Each slave node uses two power sources: the piezoelectric power generator (PPG); and the continuous wave from the master node. The paper highlights the basic operational principle, each node's specifications, and experimental data for performance verification. The two nodes successfully communicate each other in a range of 3.3m (maximal range), where the user's computer is wired the master node.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.239-239
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• 2010

This paper describes the design and analysis of AlN piezoelectric micro generator. The generator was designed to convert ambient vibration energy to electrical power as a AlN piezoelectric material compatible with integataion process. From the simulation results, the resonance frequency of designed model is about 360 Hz and analyzed the bending mode, displacement and expectation output.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.31 no.5D
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• pp.689-695
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• 2011

In this paper, available power generation on the road from renewable energy technologies on how to use the piezoelectric effect has been studied. A lot of vehicles on road that can generate electricity using renewable energy technology as part of the external shock to convert the load into electrical energy using piezoelectric effect piezoelectric generator can be applied to road space. Piezoelectric power harvesting using piezoelectric ceramics for the development of impact load characteristics were tested as function of various experimental design such as generator design and array of piezo-ceramic. To design the piezoelectric generator, the characteristics of piezoelectric ceremic were compared depending on the type of impact load as function of impact load, shock-absorbing.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.219-219
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• 2008

Energy harvesting from the environment has been of great interest as a standalone power source of wireless sensor nodes for ubiquitous sensor networks (USN). There are several power generating methods such as thermal gradients, solar cell, energy produced by human action, mechanical vibration energy, and so on. Most of all, mechanical vibration is easily accessible and has no limitation of weather and environment of outdoor or indoor. In particular, the piezoelectric energy harvesting from ambient vibration sources has attracted attention because it has a relative high power density comparing with other energy scavenging methods. Through recent advances in low power consumption RF transmitters and sensors, it is possible to adopt a micro-power energy harvesting system realized by MEMS technology for the system-on-chip. However, the MEMS energy harvesting system hassome drawbacks such as a high natural frequency over 300 Hz and a small power generation due to a small dimension. To overcome these limitations, we devised a novel power generator with a spiral spring structure. In this case, the energy harvester has a lower natural frequency under 200 Hz than a normal cantilever structure. Moreover, it has higher an energy conversion efficient because shear mode ($d_{15}$) is much larger than 33 mode ($d_{33}$) and the energy conversion efficiency is proportional to the piezoelectric constant (d). We expect the spiral type MEMS power generator would be a good candidate as a standalone power generator for USN.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.12
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• pp.769-775
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• 2016

Characteristics of a wireless sensor powered by the IDE (interdigitated electrode) embedded piezoelectric cantilever generator were analyzed in order to evaluate its potential for use in wireless sensor applications. The IDE embedded piezoelectric cantilever was designed and fabricated to have a self-resonance frequency of 126 Hz and acceleration of 1.57 G, respectively, for the mechanical resonance with a practical conveyor system in a thermal-power plant. It produced maximum output power of 2.81 mW under the resistive load of $160{\Omega}$ at 126 Hz. The wireless sensor module is electrically connected to a rectifier capacitor with capacity of 0.68 farad and 3.8 V for power supply by the piezoelectric cantilever generator. The unloaded capacitor could be charged as a rate of approximately $365{\mu}V/s$ while the capacitor exhibited that of 0.997 mV/min. during communication under low duty cycle of 0.2%. Therefore, it is considered that the fabricated IDE embedded piezoelectric cantilever generator can be used for wireless sensor applications.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.34 no.6
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• pp.487-494
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• 2021

Piezoelectric generators use direct piezoelectric effects that convert mechanical energy into electrical energy. Many studies were attempted to fabricate piezoelectric generators using piezoelectrics such as ZnO, PZT, PVDF. However, these various inorganic/organic piezoelectric materials are not suitable for bio-implantable devices due to problems such as brittleness, toxicity, bio-incompatibility, bio-degradation. Thus, in this paper, piezoelectric generators were prepared using a silk fibroin film which is bio-compatible by dip-coating method. The silk fibroin films are a mixed state of silk I and silk II having stable β-sheet type structures and shows the d₃₃ value of 8~10 pC/N. There was a difference in output voltages according to the thickness. The silk fibroin generators, coated 10 times and 20 times, revealed the power density of 16.07 μW/cm² and 35.31 μW/cm² using pushing tester, respectively. The silk fibroin generators are sensitive to various pressure levels, which may arise from body motions such as finger tapping, foot pressing, wrist shaking, etc. The silk fibroin piezoelectric generators with bio-compatibility shows the applicability as a low-power implantable piezoelectric generator, healthcare monitoring service, and biotherapy devices.