DOI QR코드

DOI QR Code

Design and analysis of ZnO piezoelectric micro power generators with low frequency

저주파수용 ZnO 압전 마이크로 전원의 설계와 분석

  • 정귀상 (울산대학교 전기전자정보시스템공학부) ;
  • 윤규형 (울산대학교 전기전자정보시스템공학부)
  • Published : 2009.09.30

Abstract

This paper describes the characteristics of piezoelectric micro power generators by the ANSYS FEA(finite element analysis). The micro power generator was designed to convert ambient vibration energy to electrical power as a ZnO piezoelectric material. To find optimal model in low vibration ambient, the shape of power generator was changed with different membrane width, thickness, length, and proof mass size. Using the ANSYS modal analysis, bending mode and stress distribution of optimal model were analyzed. Moreover, the displacement with the frequency range was analyzed by harmonic analysis. From the simulation results, the resonance frequency of optimal model is about 373 Hz and investigate the possibility of ZnO micro power generator for ambient vibration applications.

Keywords

References

  1. H. B. Fang, J. Q. Liu, Z. Y. Xu, L. Dong, L. Wang, D. Chen, B. C. Cai, and Y. Liu, 'Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting', Microelectron. J., vol. 37, pp. 1280-1284, 2006 https://doi.org/10.1016/j.mejo.2006.07.023
  2. Y. B. Jeon, R. Sood, J. H. Jeong, and S. G. Kim, 'MEMS power generator with transverse mode thin film PZT', Sens. & Actu. A, vol. 122, pp. 16-22, 2005 https://doi.org/10.1016/j.sna.2004.12.032
  3. J. Q. Liu, H. B. Fang, Z. Y. Xu, X. H. Mao, X. C. Shen, D. Chen, H. Liao, and B. C. Cai, 'A MEMSbased piezoelectric power generator array for vibration energy harvesting', Micro- electron. J., vol. 39, pp. 802-806, 2008 https://doi.org/10.1016/j.mejo.2007.12.017
  4. M. Marzencki, Y. Ammar, and S. Basrour, 'Integrated power harvesting system including a MEMS generator and a power management circuit', Sens. & Actu. A, vol. 145, pp. 363-370, 2008 https://doi.org/10.1016/j.sna.2007.10.073
  5. S. T. Mckinstry and P. Muralt, 'Thin film piezoelectrics for MEMS', J. Electroceram., vol. 12, pp. 7-17, 2004 https://doi.org/10.1023/B:JECR.0000033998.72845.51
  6. G. H. Kim, B. D. Ahn, H. S. Kang, S. H. Lim, and S. Y. Lee, 'Deposition of ZnO films grown by pulsed laser deposition for film bulk acoustic resonators', Superlattic. & Microstruc., vol. 39, pp. 50-59, 2006 https://doi.org/10.1016/j.spmi.2005.08.074
  7. S. Wu, Z. X. Lin, M. S. Lee, and R. Ro, 'Bulk acoustic wave analysis of crystalline plane oriented ZnO films', J. Appl. Phys., vol. 102, pp. 84908(1)-84908(7), 2007
  8. D. Shen, J. H. Park, J. Ajitsaria, S. Y. Choe, H. C. Wikle, and D. J. Kim, 'The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting', J. Micromech. Microeng., vol. 18, pp. 55017(1)-55017(7), 2008
  9. M. R. Guarracino, F. Perla, and P. Zanetti, 'A parallel block Lanczos algorithm and its implementation for the evaluation of some eigenvalues of large sparse symmetric matrices on multicomputers', Int. J. Appl. Math. Comput. Sci., vol. 16, pp. 241-249, 2006

Cited by

  1. Fabrication of a Low Frequency Vibration Driven Electromagnetic Energy Harvester Using FR-4 Planar Spring and Its Characteristics vol.20, pp.4, 2011, https://doi.org/10.5369/JSST.2011.20.4.238