• 제목/요약/키워드: piezoelectric material

검색결과 1,413건 처리시간 0.03초

Two-Facing-Targets (TFT) 스퍼터링장치를 이용하여 증착한 AlN박막의 잔류응력 측정 (Measurement of Residual Stress of AlN Thin Films Deposited by Two-Facing-Targets (TFT) Sputtering System)

  • 한창석;권용준
    • 한국재료학회지
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    • 제31권12호
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    • pp.697-703
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    • 2021
  • Aluminum nitride having a dense hexagonal structure is used as a high-temperature material because of its excellent heat resistance and high mechanical strength; its excellent piezoelectric properties are also attracting attention. The structure and residual stress of AlN thin films formed on glass substrate using TFT sputtering system are examined by XRD. The deposition conditions are nitrogen gas pressures of 1 × 10-2, 6 × 10-3, and 3 × 10-3, substrate temperature of 523 K, and sputtering time of 120 min. The structure of the AlN thin film is columnar, having a c-axis, i.e., a <00·1> orientation, which is the normal direction of the glass substrate. An X-ray stress measurement method for crystalline thin films with orientation properties such as columnar structure is proposed and applied to the residual stress measurement of AlN thin films with orientation <00·1>. Strength of diffraction lines other than 00·2 diffraction is very weak. As a result of stress measurement using AlN powder sample as a comparative standard sample, tensile residual stress is obtained when the nitrogen gas pressure is low, but the gas pressure increases as the residual stress is shifts toward compression. At low gas pressure, the unit cell expands due to the incorporation of excess nitrogen atoms.

초음파 접합 장치의 냉각관 설계 및 접합강도 실험 (Design and Experimental Results for Cooling Tubes of Ultrasonic Bonding Equipment of Ultrasonic Bonding Equipment)

  • 이동욱;전의식
    • 한국산학기술학회논문지
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    • 제15권4호
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    • pp.1879-1884
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    • 2014
  • 최근 미세접합 기술이 다양한 사회에서 주목받고 있다. 미세접합 기술은 레이저 접합 초음파 접합 등이 있다. 그러나 미세 접합의 연구가 많이 부족한 실정이다. 이에 본 논문에서는 초음파 접합장치 구동 시 열평형 상태에서 압전소자에 열영향을 최소화하기 위해 냉각관을 설계하였다. 또한 냉각관이 설계된 초음파 접합 장치를 이용하여 접합 실험을 실시하였다. 다꾸찌 실험계획법을 이용하여 실험을 실시하였으며, 기초실험을 통해 공정변수와 반응 변수를 설정하였다. 접합 실험의 신뢰도를 검증하기 위하여 접합 계면의 미세조직을 관찰하였고, 인장실험을 통해 접합 강도를 확인하였다.

에어로졸 증착법에 의해 제조된 PZT 막의 상변화와 전기적 특성 (Phase Evolution and Electrical Properties of PZT Films by Aerosol-Deposition Method)

  • 박춘길;강동균;이승희;공영민;정대용
    • 한국전기전자재료학회논문지
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    • 제30권9호
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    • pp.541-545
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    • 2017
  • $Pb(Zr_{0.52}Ti_{0.48})O_3$ (PZT) films with a thickness of $5{\sim}10{\mu}m$ at the morphotropic phase boundary were fabricated by aerosol-deposition (AD), and their phase evolution and electrical properties were investigated. The microstructure of the AD PZT films revealed nanosized grains with a low crystallinity and a dense structure at room temperature. The AD PZT films showed a mixture of tetragonal and rhombohedral phases. The post-annealing temperature was varied to study the phase transition behavior. The crystallinity of the AD PZT films was enhanced by annealing at 450, 550, and $650^{\circ}C$ for 2 h. At $650^{\circ}C$, the tetragonal and rhombohedral phases reacted to form a bridge phase between the two phases. The polarization-electric field hysteresis loops of the AD PZT film annealed at $650^{\circ}C$ exhibited a smaller cohesive field and a lower slim hysteresis than the films annealed at 450 and $550^{\circ}C$.

PNN-PMN-PZT계 소결체를 이용한 압전트랜스포머 제작 및 특성평가 (Evaluation of Piezoelectric Transformer Fabricated with PNN-PMN-PZT Ceramics)

  • 안상기;이명우;김성진;류성림;권순용
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.158-158
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    • 2009
  • 기계적 에너지를 전기적 에너지로 변환하는 에너지 변환소자인 압전 세라믹스는 액추에이터, 변압기, 초음파모터 및 각종 센서로 응용되고 있으며, 그 응용분야는 크게 증가하고 있다. 최근에는 이러한 압전 소자를 앞으로 도래하는 ubiquitous, 무선 모바일 시대의 휴대용 전자제품, robotics 등의 분야에 적용하기 위하여 소형화 및 경량화를 구현하고자 다양한 연구가 진행되고 있다. 본 연구에서는 압전 특성이 우수한 PNN-PMN-PZT 삼원계 세라믹을 이용하여 압전 트랜스포머를 제작하고 전기적 특성을 평가하였다. 압전트랜스포머는 전왜-압전효과를 이용한 소전력용 고전압발생소자로서 종래의 권선형 트랜스포머에 비교해서 소형, 경량이면서 승압비가 높고 구조가 간단하므로 직류 고전압전원에 응용되고 있다. 압전트랜스의 이론적인 고찰은 Rosen 이후로 많은 연구자들에 의해서 보고되었다. 그런데 압전세라믹트랜스는 공진 시 강력한 에너지변환을 하기 때문에 재료의 물리적 특성이 매우 중요함에도 불구하고, 이러한 물리적 특성에 관한 연구는 거의 없었다. 따라서 본 연구에서는 물리적 특성과 전기적 특성의 상호 연관성을 고찰하고자 하였다. 압전트랜스용 재료는 전기기계결합계수($k_p$)와 기계적품질계수(Qm)가 높아야 한다. 전기기계결합계수를 높이기 위해서는 상경계 조성의 Pb(Zr,Ti)$O_3$[PZT]계 세라믹스가 가장 우수하다. 본 연구에서는 기계적 품질계수를 향상시키기 위해서 $Pb(Nn_{1/3}Nb_{2/3})_{0.06+x}(Mn_{1/3}Nb_{2/3})_{0.065-x}(Zr_{0.48}Ti_{0.52})_{0.875}0_3$계의 조성을 설계하여 압전특성을 평가하고 미세구조를 분석하였다. 또한 압전트랜스를 제작하여 입출력의 승압비 및 주파수 특성 등도 평가하였다.

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다양한 온도에서 열처리한 씨앗 층 위에 열수화법을 이용한 ZnO 나노 막대의 성장

  • 배영숙;김영이;김동찬;공보현;안철현;최미경;우창호;한원석;조형균
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.433-433
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    • 2009
  • ZnO-based materials have been extensively studied for optoelectronic applications due to their superiors physical properties such as wide direct bandgap (~3.37 eV), large exciton binding energy (~60 meV), high transparency in the visible region, and low cost. Especially, one-dimensional (1D) ZnO nanostructures have attracted considerable attention owing to quantum confinement effect and high crystalline quality. Additionally, various nanostructures of ZnO such as nanorods, nanowires, nanoflower, and nanotubes have stimulated the interests because of their semiconducting. and piezoelectric properties. Among them, vertically aligned ZnO nanorods can bring the improved performance in various promising photoelectric fields including piezo-nanogenerators, UV lasers, dye sensitized solar cells, and photo-catalysis. In this work, we studied the effect of the annealing temperature of homo seed layers on the formation of ZnO nanorods grown by hydrothermal method. The effect of annealing temperature of seed layer on the length and orientation of the nanorods was investigated scanning electron microscopy investigation. Transmission electron microscopy and X-ray diffraction measurement were performed to understand the effect of annealing temperatures of seed layers on the formation of nanorods. Moreover, the optical properties of the seed layers and the nanorods were studied by room temperature photoluminescence.

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(1-x) [0.5PZT-0.25PNN-0.25PZN]- x [Ni0.9Zn0.1Fe2O4] 세라믹스의 압전/자성 성질 및 자기전기적 효과 (Piezoelectric/magnetic Properties and Magnetoelectric Effects in (1-x) [0.5PZT-0.25PNN-0.25PZN] - x [Ni0.9Zn0.1Fe2O4] Particulate Ceramic Composites)

  • 박영권;손세모;류지구;정수태
    • 한국전기전자재료학회논문지
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    • 제23권11호
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    • pp.869-874
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    • 2010
  • Magnetoelectric composites with compositions (1-x)[0.5PZT-0.25PNN-0.25PZN](ferroelectric) - x[$(Ni_{0.9}Zn_{0.1})Fe_2O_4$](ferrite) in which x varies as 0, 0.1, 0.2, 0.4, 0.6, 0.8, 1.0 were prepared by conventional ceramic process. The presence of two phases (ferroelectric phase with large grain and ferrite phase with small grain) in the particulate ceramic composites was confirmed by XRD, SEM and EDX. The ferroelectric and magnetic properties of the composites were studied by measuring the P-E and M-H hysterisis loop on the composite composition (x=0, 0.1, 0.2, 1), they were strongly affects of the phase content in composite. The magnetoelectric votage was measured as a function of DC magnetic field and the maximum magnetoelectric voltage coefficient of 14 mV/cm Oe was observed in x=0.2(80 mol% ferroelectric and 20 mol% ferrite phase).

혼성동력계에서 주요 설계변수가 제동성능에 미치는 효과분석 (Effect of the Design Parameters Change on the Hybrid Dynamometer Braking Performance)

  • 이종훈;황재혁;정민지;권준용
    • 한국항공우주학회지
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    • 제44권11호
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    • pp.981-988
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    • 2016
  • 브레이크 동력계는 브레이크의 성능을 시험하는 장치로 시험구역, 기계적 관성구역, 전기모터 및 제어구역으로 구성된다. 혼성동력계는 기계적 관성 구역의 크기를 줄이고 전기모터를 이용하여 브레이크 작동에 따른 기계적 관성의 손실을 보상하는 방식으로 상대적으로 작은 기계적 관성 크기와 적은 비용으로 시험이 가능한 장점이 있다. 본 논문에서는 공간적 제약이 있는 실험실에 적절한 혼성동력계를 설계하였고, 설계된 혼성동력계에서 마찰계수 변화 등 주요 설계변수가 혼성동력계 제동성능에 미치는 영향을 분석하였다. 본 연구를 통해 축소된 기계적 관성에 의한 에너지 손실을 보상하기 위한 전기 모터의 토크를 측정하면 마찰재의 불량여부를 판단 할 수 있는 결과를 얻었다.

선형 운동하는 $L_1-B_8$ 모드 초음파 전동기의 효율과 토크 특성 (The Characteristics of Efficiency and Torque in $L_1-B_8$ mode USM Having Linear Movement)

  • 우상호;신순인;김진수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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    • pp.585-588
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    • 2002
  • The USM uses friction between a mobile part (rotor) and a vibration part(stator), which is different from the principle of the conventional motor based on the interaction of electric and magnetic fields. In this thesis, a flat-type $L_1-B_8$ mode USM was designed and fabricated the characteristics of an ultrasonic vibration. The results of fabricated USM are as follows: (1) In case of ultrasonic motor with elastic-body of stainless, when applied voltage, frequency, pressing force of rotor were 50 [V], 27.9 [kHz], 1.5 [N], 5.0[mN m] respectively, the speed of revolution could be presented up to 0 [cm/s]. (2) In case of ultrasonic motor with elastic-body of brass, when applied voltage, frequency, pressing force of rotor were 50 [V], 21.4 [kHz], 1.5 [N], 1.4[mN m]respectively, the speed of rotor revolution was presented up to 0 [cm/s]. (3) The USM of elastic-body of stainless showing 1.17[%], somewhat low, in the maximum efficiency according to torque was superior to the USM of elastic-body of brass showing 0.34 [%]. The Flat-type $L_1-B_8$ mode USM had characteristics of typical drooping torque-speed, large torque and high speed, and operating in both directions by phase reversal.

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Applicability of nonlinear ultrasonic technique to evaluation of thermally aged CF8M cast stainless steel

  • Kim, Jongbeom;Kim, Jin-Gyum;Kong, Byeongseo;Kim, Kyung-Mo;Jang, Changheui;Kang, Sung-Sik;Jhang, Kyung-Young
    • Nuclear Engineering and Technology
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    • 제52권3호
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    • pp.621-625
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    • 2020
  • Cast austenitic stainless steel (CASS) is used for fabricating different components of the primary reactor coolant system of pressurized water reactors. However, the thermal embrittlement of CASS resulting from long-term operation causes structural safety problems. Ultrasonic testing for flaw detection has been used to assess the thermal embrittlement of CASS; however, the high scattering and attenuation of the ultrasonic wave propagating through CASS make it difficult to accurately quantify the flaw size. In this paper, we present a different approach for evaluating the thermal embrittlement of CASS by assessing changes in the material properties of CASS using a nonlinear ultrasonic technique, which is a potential nondestructive method. For the evaluation, we prepared CF8M specimens that were thermally aged under four different heating conditions. Nonlinear ultrasonic measurements were performed using a contact piezoelectric method to obtain the relative ultrasonic nonlinearity parameter, and a mini-sized tensile test was performed to investigate the correlation of the parameter with material properties. Experimental results showed that the ultrasonic nonlinearity parameter had a correlation with tensile properties such as the tensile strength and elongation. Consequently, we could confirm the applicability of the nonlinear ultrasonic technique to the evaluation of the thermal embrittlement of CASS.

적층형 세라믹 액츄에이터의 유전 및 압전특성 (Dielectric and Piezoelectric Properties in Multilayer Ceramic Actuator)

  • 최형봉;정순종;하문수;고중혁;이대수;송재성
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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    • pp.615-618
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    • 2004
  • The piezoelectricity and polarization of multilayer ceramic actuators, being designed to stack ceramic layer and electrode layer alternately, were investigated under a consideration of geometry, the thickness ratio of the ceramic layer to electrode layer The actuators were fabricated by tape-casting of $0.42PbTiO_3-0.38PbZrO_3-0.2Pb(Mn_{1/3}Nb_{2/3})O_3$ followed by laminating, burn-out and co-firing process. The actuators of $5\times5mm^2$ in area were formed in a way that $60{\sim}200{\mu}m$ thick ceramics were stacked 10 times alternately with $5{\mu}m$ thick electrode. Increase in polarization and electric field-displacement with increasing thickness ratio of the ceramic/electrode layer and thickness/cross section ratio were attributed to the change of $non-180^{\circ}/180^{\circ}$ domain ratio which was affected by the interlayer internal stress and Poisson ratio of ceramic layer. The piezoelectricity and actuation behaviors were found to be dependent upon the volume ratio (or thickness ratio) of ceramic layer relative to ceramic layer. Concerning with the existence of internal stress, the field-induced polarization and deformation were described in the multilayer actuator.

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