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http://dx.doi.org/10.4313/JKEM.2017.30.9.541

Phase Evolution and Electrical Properties of PZT Films by Aerosol-Deposition Method  

Park, Chun-Kil (Department of Materials Science and Engineering, Inha University)
Kang, Dong-Kyun (Department of Materials Science and Engineering, Inha University)
Lee, Seung-Hee (Department of Materials Science and Engineering, Inha University)
Kong, Young-Min (School of Materials Science and Engineering, University of Ulsan)
Jeong, Dae-Yong (Department of Materials Science and Engineering, Inha University)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.30, no.9, 2017 , pp. 541-545 More about this Journal
Abstract
$Pb(Zr_{0.52}Ti_{0.48})O_3$ (PZT) films with a thickness of $5{\sim}10{\mu}m$ at the morphotropic phase boundary were fabricated by aerosol-deposition (AD), and their phase evolution and electrical properties were investigated. The microstructure of the AD PZT films revealed nanosized grains with a low crystallinity and a dense structure at room temperature. The AD PZT films showed a mixture of tetragonal and rhombohedral phases. The post-annealing temperature was varied to study the phase transition behavior. The crystallinity of the AD PZT films was enhanced by annealing at 450, 550, and $650^{\circ}C$ for 2 h. At $650^{\circ}C$, the tetragonal and rhombohedral phases reacted to form a bridge phase between the two phases. The polarization-electric field hysteresis loops of the AD PZT film annealed at $650^{\circ}C$ exhibited a smaller cohesive field and a lower slim hysteresis than the films annealed at 450 and $550^{\circ}C$.
Keywords
Piezoelectric; Aerosol-deposition; PZT;
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