• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.8
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• pp.501-507
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• 2017

A unimorph piezoelectric cantilever generator with an interdigitated electrode (IDE) was developed for vibration energy harvester applications driven in the longitudinal mode. Hard lead zirconate titanate (PZT) ceramic with a high $Q_m$ of 1,280 was used as the piezoelectric active material. Ten PZT sheets produced by tape casting were laminated and co-fired with an Ag/Pd IDE at $1,050^{\circ}C$ for 2 h. The approximately $280{\mu}m$-thick co-fired PZT laminate with the IDE was attached to a stainless steel substrate with an adhesive epoxy for the fabrication of an IDE unimorph cantilever. Its energy harvesting characteristics were evaluated: an output power of $1.1{\mu}W$ at 120 Hz across the resistive load of $700k{\Omega}$ was obtained, corresponding to a normalized power factor of $4.1{\mu}W/(G^2{\cdot}cm^3)$.

• Journal of Satellite, Information and Communications
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• v.6 no.1
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• pp.28-31
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• 2011

In this paper, a new set of structural and sacrificial material that is diamond like carbon (DLC)/photoresist for high performance piezoelectric RF-MEMS switches which are actuated in d33 mode is suggested. To avoid curing problem of photoresist sacrificial layer, DLC structure layer is deposited at room temperature by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. And lead zirconate titanate (PZT) piezoelectric layer is deposited on structure layer directly at room temperature by rf magnetron sputtering system and crystallized by rapid thermal annealing (RTA) equipment. Particular attention is paid to the annealing of PZT film in order to crystallize into perovskite and the variation of mechanical properties of DLC layer as a function of annealing temperature. The DLC layer shows good performance for structure layer in aspect to Young's modulus and hardness. The fabrication becomes much simpler and cheaper with use of a photoresist.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.31 no.7
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• pp.462-468
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• 2018

The piezoelectric energy harvesting characteristics of a trapezoidal cantilever generator with lead zirconate titanate (PZT) laminate were investigated with various Ag inner electrodes. The piezoelectric mode of operation was a transverse mode by using a planar electrode pattern. The piezoelectric cantilever generator was fabricated using trapezoidal cofired-PZT/Ag laminates by five specimens of 2, 3, 4, 7, and 13 layers of Ag. As the number of Ag electrodes increased, impedance and output voltage at resonant frequency significantly decreased, and capacitance and output current showed an increasing tendency. A maximum output power density of $7.60mW/cm^3$ was realized for the specimen with seven Ag layers in the optimal condition of acceleration (1.2 g) and resistive load ($600{\Omega}$), which corresponds to a normalized power factor of $5.28mW/g^2{\cdot}cm^3$.

• Journal of Electrical Engineering and Technology
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• v.13 no.6
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• pp.2434-2440
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• 2018

A new type of piezoelectric micromachined ultrasonic transducer (pMUT) with high resonant frequency was developed by using a thin lead zirconate titanate (PZT) as an insulation layer on a floating $10{\mu}m$ silicon membrane. The PZT insulation layer facilitated acoustic impedance matching at active pMUT, leading to a high performance in the acoustic conversion property compared with the transducer using $SiO_2$ insulation layer. The fabricated ultrasonic devices were wirelessly measured by connecting two identical acoustic transducers to two separate ports in a single network analyzer simultaneously. The acoustic wave emitted from a transducer induced a $3.16{\mu}W$ on the other side of the transducer at a distance of 2 cm. The transducer performances in terms of device diameters, PZT thickness, annealings, and different DC polings, etc. were investigated. COMSOL simulation was also performed to predict the device performances prior to fabrication. Based on the COMSOL simulation, the device was fabricated and the results were compared.

• Journal of the Korean Society for Nondestructive Testing
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• v.27 no.6
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• pp.501-508
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• 2007

This paper presents the feasibility of using electromechanical impedance based active sensing technique for nondestructive strength gain monitoring of early-age concrete by employing piezoelectric lead-zirconate-titanate (PZT) patches on concrete surface. The strength development of early age concrete is actively monitored by performing a series of experiments on concrete specimens under moist curing condition. The electrical admittance signatures are acquired for five different curing ages and compared with each other. The resonant frequency shifts of PZT patches with increasing days is observed which is on account of additional stiffening due to strength gain of concrete during curing and level of stiffening being related to strength obtained from compression tests on companion cylinder specimens. The proposed approach is found to be suitable for monitoring the development of compressive strength in early-age concrete. It is also observed in this study that root mean square deviation (RMSD) in admittance signatures of the PZT patches can also be used as an indicator of concrete strength development.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.25 no.6
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• pp.239-244
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• 2015

Lead zirconate titanate (PZT) thick films with thickness of $10{\sim}20{\mu}m$ were fabricated on silicon substrate by aerosol deposition method. As-deposited films on silicon were annealed at the temperatures of $700^{\circ}C$. The electrical properties of films deposited by PZT powders were characterized using impedance analyzer and Sawyer-Tower circuit. The PZT powder was prepared by both conventional solid reaction process and sol-gel process. The remanent polarization, coercive field, and dielectric constant of the $10{\mu}m$ thick film with solid reaction process were $20{\mu}C/cm^2$, 30 kV/cm and 1320, respectively. On the other hand, the PZT films by sol-gel process showed a poor dielectric constant of 635. The reason was probably due to the presence of pores produced from organic residue during annealing.

• Smart Structures and Systems
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• v.28 no.6
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• pp.761-777
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• 2021

This study presents a numerical investigation on the sensitivity of electromechanical (EM) impedance responses to inner damaged concrete of a prestressed anchorage zone. Firstly, the Ottosen yield criterion is selected to simulate the plasticity behavior of the concrete anchorage zone under the compressive loading. Secondly, several overloading cases are selected to analyze inner damage formations in the concrete of the anchorage zone. Using a finite element (FE) model of the anchorage zone, the relationship between applied forces and stresses is analyzed to illustrate inner plasticity regions in concrete induced by the overloading. Thirdly, EM impedance responses of surface-mounted PZT (lead-zirconate-titanate) sensors are numerically acquired before and after concrete damage occurrence in the anchorage zone. The variation of impedance responses is estimated using the RMSD (root-mean-square-deviation) damage metric to quantify the sensitivity of the signals to inner damaged concrete. Lastly, a novel PZT skin, which can measure impedance signatures in predetermined frequency ranges, is designed for the anchorage zone to sensitively monitor the EM impedance signals of the inner damaged concrete. The feasibility of the proposed method is numerically evaluated for a series of damage cases of the anchorage zone. The results reveal that the proposed impedance-based method is promising for monitoring inner damaged concrete in anchorage zones.

• Composites Research
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• v.17 no.4
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• pp.61-67
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• 2004

Nondestructive damage sensitivity on single-basalt fiber/epoxy composites was evaluated by micromechanical technique and acoustic emission (AE). Piezoelectric lead-zirconate-titanate (PZT), polyvinylidene fluoride (PVDF) and poly(vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE)) copolymer were used as AE sensor, respectively. In single-fiber composite, the damage sensing with different sensor types were compared to each other. Piezoelectric PVDF polymer sensor was embedded in and attached on the composite, whereas PZT sensor was only attached on the surface of specimen. In case of embedded polymer sensors, responding sensitivity was higher than that of the attached case. It can be due to full constraint inside specimen to transfer elastic wave coming from micro-deformation. For both the attached and the embedded cases, the sensitivity of P(VDF-TrFE) sensor was almost same as that of conventional PVDF sensor.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.6 no.6
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• pp.457-460
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• 2005

Nano-sized titanium oxide and zirconium oxide powders were synthesized by hydrolysis of titanium isopropoxide $[Ti(OC_3H7)_4]$ and zirconium tetrachloride ($ZrC1_4$) via a sol-gel technique. Lead titanate powders were prepared by mixing $TiO_2$ precursors with PbO slurry made with dilute $NH_4OH$. Lead zirconate titanate powders were, then, synthesized by mixing $PbTiO_3$ with $ZrO_2$ powders. The goal of this research was to obtain the $PbZrTiO_3(PZT)$ powders and sintering these powders at low temperature. The $PbTiO_3$ and PZT powders after firing were analyzed by X-ray diffraction(XRD) and transmission electron microscopy(TEM) was utilized to observe the shape and size of the synthesized nano-particles. In the XRD pattern, the well-crystallized PZT phase could be obtained in consequence of firing at $900^{\circ}C$. SEM micrographs also showed that grains of PZT were relatively well grown with the size of the range of $2{\~}4{\mu}m$. The densified perovskite structure of $PbZrTiO_3$ could be obtained by sintering at temperature as low as $900^{\circ}C$. Characterization of the samples showed improved piezoelectric properties.

• Proceedings of the KIEE Conference
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• 2000.11c
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• pp.413-415
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• 2000

Piezoelectric ceramics of PZT have been developed to apply for transformers in notebook. Use of piezoelectric ceramics in applications like piezoelectric transformers was made possible by the development of new materials with high electromechanical coupling coefficients and high mechanical quality factor. "Hard" ferroelectiric ceramics of complex composition based on lead zirconate titanate with Mn additive have been prepared. The perovskitic phase reaction of the oxides. The crucial role played by the intermediate mixing and grinding procedures in the assessment of the final properties of the material was investigated. Densification up to approximately the theoretical density value was achieved. The polarization was obtained by subjecting the samples at $30kVcm^{-1}$ poling electric field, in a silicon oil bath heated at $110^{\circ}C$. Their microstructural and morphological properties were checked by X-ray diffraction analysis and scanning electron microscopy. The optimized samples presented very high qualify and electromechanical coupling factors, together with small dielectric loss.