DLC Structure Layer for Piezoelectric MEMS Switch
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Hwang, Hyun-Suk
(서일대학교 전기과)
Lee, Kyong-Gun (성균관대학교 전기전자 및 컴퓨터공학과) Yu, Young-Sik (여주대학 전기과) Lim, Yun-Sik (여주대학 방송제작 연예과) Song, Woo-Chang (강원대학교 삼척캠퍼스 전기공학과) |
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