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DLC Structure Layer for Piezoelectric MEMS Switch  

Hwang, Hyun-Suk (서일대학교 전기과)
Lee, Kyong-Gun (성균관대학교 전기전자 및 컴퓨터공학과)
Yu, Young-Sik (여주대학 전기과)
Lim, Yun-Sik (여주대학 방송제작 연예과)
Song, Woo-Chang (강원대학교 삼척캠퍼스 전기공학과)
Publication Information
Journal of Satellite, Information and Communications / v.6, no.1, 2011 , pp. 28-31 More about this Journal
Abstract
In this paper, a new set of structural and sacrificial material that is diamond like carbon (DLC)/photoresist for high performance piezoelectric RF-MEMS switches which are actuated in d33 mode is suggested. To avoid curing problem of photoresist sacrificial layer, DLC structure layer is deposited at room temperature by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. And lead zirconate titanate (PZT) piezoelectric layer is deposited on structure layer directly at room temperature by rf magnetron sputtering system and crystallized by rapid thermal annealing (RTA) equipment. Particular attention is paid to the annealing of PZT film in order to crystallize into perovskite and the variation of mechanical properties of DLC layer as a function of annealing temperature. The DLC layer shows good performance for structure layer in aspect to Young's modulus and hardness. The fabrication becomes much simpler and cheaper with use of a photoresist.
Keywords
diamond like carbon (DLC); structure layer; piezoelectric; MEMS; switch;
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