• 한국전기전자재료학회논문지
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• 제30권8호
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• pp.501-507
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• 2017

A unimorph piezoelectric cantilever generator with an interdigitated electrode (IDE) was developed for vibration energy harvester applications driven in the longitudinal mode. Hard lead zirconate titanate (PZT) ceramic with a high $Q_m$ of 1,280 was used as the piezoelectric active material. Ten PZT sheets produced by tape casting were laminated and co-fired with an Ag/Pd IDE at $1,050^{\circ}C$ for 2 h. The approximately $280{\mu}m$-thick co-fired PZT laminate with the IDE was attached to a stainless steel substrate with an adhesive epoxy for the fabrication of an IDE unimorph cantilever. Its energy harvesting characteristics were evaluated: an output power of $1.1{\mu}W$ at 120 Hz across the resistive load of $700k{\Omega}$ was obtained, corresponding to a normalized power factor of $4.1{\mu}W/(G^2{\cdot}cm^3)$.

• 한국위성정보통신학회논문지
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• 제6권1호
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• pp.28-31
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• 2011

본 논문에서는 d33 모드로 구동하여 우수한 성능을 가지는 RF-MEMS 스위치의 구현을 위한 희생층과 구조층의 조합으로서 DLC와 포토레지스트를 제안하였다. 포토레지스트의 경화현상을 방지하기 위하여 DLC 구조층은 상온에서 RF-PECVD 방법을 이용하여 증착하였다. 그리고 PZT 압전층은 RF 마그네트론 스퍼터링 방법을 이용하여 상온에서 구조층 위에 증착하였으며, 희생층의 제거 후 결정화를 위하여 급속 열처리 (RTA) 장비를 이용하여 후 열처리하였다. PZT의 결정화 과정과 DLC의 기계적 성질의 변화를 다양한 온도조건에 따라 분석한 결과 DLC는 PZT의 결정화 온도까지 영률과 강도면에서 우수한 특성을 나타냄을 확인하였다. 또한 포토레지스트를 사용함으로서 공정을 단순화하고 낮은 비용으로 제작이 가능하였다.

• 한국전기전자재료학회논문지
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• 제31권7호
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• pp.462-468
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• 2018

The piezoelectric energy harvesting characteristics of a trapezoidal cantilever generator with lead zirconate titanate (PZT) laminate were investigated with various Ag inner electrodes. The piezoelectric mode of operation was a transverse mode by using a planar electrode pattern. The piezoelectric cantilever generator was fabricated using trapezoidal cofired-PZT/Ag laminates by five specimens of 2, 3, 4, 7, and 13 layers of Ag. As the number of Ag electrodes increased, impedance and output voltage at resonant frequency significantly decreased, and capacitance and output current showed an increasing tendency. A maximum output power density of $7.60mW/cm^3$ was realized for the specimen with seven Ag layers in the optimal condition of acceleration (1.2 g) and resistive load ($600{\Omega}$), which corresponds to a normalized power factor of $5.28mW/g^2{\cdot}cm^3$.

• Journal of Electrical Engineering and Technology
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• 제13권6호
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• pp.2434-2440
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• 2018

A new type of piezoelectric micromachined ultrasonic transducer (pMUT) with high resonant frequency was developed by using a thin lead zirconate titanate (PZT) as an insulation layer on a floating $10{\mu}m$ silicon membrane. The PZT insulation layer facilitated acoustic impedance matching at active pMUT, leading to a high performance in the acoustic conversion property compared with the transducer using $SiO_2$ insulation layer. The fabricated ultrasonic devices were wirelessly measured by connecting two identical acoustic transducers to two separate ports in a single network analyzer simultaneously. The acoustic wave emitted from a transducer induced a $3.16{\mu}W$ on the other side of the transducer at a distance of 2 cm. The transducer performances in terms of device diameters, PZT thickness, annealings, and different DC polings, etc. were investigated. COMSOL simulation was also performed to predict the device performances prior to fabrication. Based on the COMSOL simulation, the device was fabricated and the results were compared.

• 비파괴검사학회지
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• 제27권6호
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• pp.501-508
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• 2007

This paper presents the feasibility of using electromechanical impedance based active sensing technique for nondestructive strength gain monitoring of early-age concrete by employing piezoelectric lead-zirconate-titanate (PZT) patches on concrete surface. The strength development of early age concrete is actively monitored by performing a series of experiments on concrete specimens under moist curing condition. The electrical admittance signatures are acquired for five different curing ages and compared with each other. The resonant frequency shifts of PZT patches with increasing days is observed which is on account of additional stiffening due to strength gain of concrete during curing and level of stiffening being related to strength obtained from compression tests on companion cylinder specimens. The proposed approach is found to be suitable for monitoring the development of compressive strength in early-age concrete. It is also observed in this study that root mean square deviation (RMSD) in admittance signatures of the PZT patches can also be used as an indicator of concrete strength development.

• 한국결정성장학회지
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• 제25권6호
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• pp.239-244
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• 2015

에어로졸 증착법에 의해 실리콘 기판위에 $10{\sim}20{\mu}m$의 두께를 가진 PZT 후막을 제조한 후 $700^{\circ}C$에서 어닐링처리하였다. PZT 분말에 의해 제조된 막은 임피던스 분석기(impedance analyzer)와 쇼여-타워 서킷(Sawyer-Tower circuit)으로 분석하였다. PZT 분말은 통상적인 고상반응법 및 솔-젤 법으로 준비되었다. 고상반응법으로 만들어진 분말을 사용한 $10{\mu}m$ 두께 PZT 막의 잔류분극, 항전계 및 유전상수는 각각 $20{\mu}C/cm^2$, 30 kV/cm 그리고 1320이었다. 한편 솔-젤 법으로 제조된 분말을 사용한 경우의 유전상수는 635로 비교적 낮은 값을 나타낸다. 이는 어닐링시 생기는 발생하는 유기물에 의한 기공의 존재 때문이다.

• Smart Structures and Systems
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• 제28권6호
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• pp.761-777
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• 2021

This study presents a numerical investigation on the sensitivity of electromechanical (EM) impedance responses to inner damaged concrete of a prestressed anchorage zone. Firstly, the Ottosen yield criterion is selected to simulate the plasticity behavior of the concrete anchorage zone under the compressive loading. Secondly, several overloading cases are selected to analyze inner damage formations in the concrete of the anchorage zone. Using a finite element (FE) model of the anchorage zone, the relationship between applied forces and stresses is analyzed to illustrate inner plasticity regions in concrete induced by the overloading. Thirdly, EM impedance responses of surface-mounted PZT (lead-zirconate-titanate) sensors are numerically acquired before and after concrete damage occurrence in the anchorage zone. The variation of impedance responses is estimated using the RMSD (root-mean-square-deviation) damage metric to quantify the sensitivity of the signals to inner damaged concrete. Lastly, a novel PZT skin, which can measure impedance signatures in predetermined frequency ranges, is designed for the anchorage zone to sensitively monitor the EM impedance signals of the inner damaged concrete. The feasibility of the proposed method is numerically evaluated for a series of damage cases of the anchorage zone. The results reveal that the proposed impedance-based method is promising for monitoring inner damaged concrete in anchorage zones.

• Composites Research
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• 제17권4호
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• pp.61-67
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• 2004

Micromechanical 시험법과 음향방출을 이용하여 단일 basalt 섬유 강화 에폭시 복합재료의 비파괴 손상감지능을 평가하였다. 음향방출 센서로는 PZT 및 고분자 PVDF와 P(VDF-TrFE)를 사용하였고 단섬유 강화 시험법에서 각 센서 종류에 따른 손상감지능을 상호 비교하였다. 고분자 센서는 시편 표면에 부착시키거나 내부에 함침시켜 사용하였지만 PZT 센서는 표면에 부착하여 사용하였다. 고분자 센서를 시편 표면에 부착시킨 경우와 함침시킨 경우 감지능은 비슷하였지만 부착의 경우 debonding 신호가 많아 함침 시키는 방법이 손상감지에 더 효과적이었다. 손상 감지능은 PZT센서가 가장 높았고, 함침 및 부착 모두에서 PVDF와 P(VDF-TrFE) 센서의 손상감지능은 거의 비슷하였다.

• 한국산학기술학회논문지
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• 제6권6호
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• pp.457-460
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• 2005

금속 알콕사이드의 가수분해법인 졸-겔 공정을 이용하여 일차로 $TiO_2$와 $ZrO_2$ 나노 입자를 합성하고 난 후 $TiO_2$ 나노입자와 PbO를 혼합하여 $PbTiO_3$의 나노 입자를 얻었다. 2차 공정으로 나노입자 크기의 $ZrO_2$와 혼합하여 최종적으로 $PbZrTiO_3(PZT)$ 분말을 합성하였다. 소결된 압전체의 결정상을 분석하기 위하여 X-선 회절분석을 시행하였으며, 소결전 합성분말의 모양과 크기를 투과전자현미경을 이용하여 관찰하였으며 $900^{\circ}C$의 저온에서 소결한 $PbZrTiO_3$시편의 미세조직을 관찰하기 위하여 주사전자현미경을 이용하였다. 합성된 입자들의 크기는 각각 $TiO_2$는 약 20 ${\~}$ 30nm, $ZrO_2$는 15${\~}$30nm이였으며, $900^{\circ}C$ 저온에서 소결한 PZT 시편의 SEM 관찰결과 평균 입경은 $2{\~}4{\mu}m$의 페로 브스카이트 결정으로 치밀한 조직을 나타내었으며, 우수한 압전 특성도 나타내었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 추계학술대회 논문집 학회본부 C
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• pp.413-415
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• 2000

Piezoelectric ceramics of PZT have been developed to apply for transformers in notebook. Use of piezoelectric ceramics in applications like piezoelectric transformers was made possible by the development of new materials with high electromechanical coupling coefficients and high mechanical quality factor. "Hard" ferroelectiric ceramics of complex composition based on lead zirconate titanate with Mn additive have been prepared. The perovskitic phase reaction of the oxides. The crucial role played by the intermediate mixing and grinding procedures in the assessment of the final properties of the material was investigated. Densification up to approximately the theoretical density value was achieved. The polarization was obtained by subjecting the samples at $30kVcm^{-1}$ poling electric field, in a silicon oil bath heated at $110^{\circ}C$. Their microstructural and morphological properties were checked by X-ray diffraction analysis and scanning electron microscopy. The optimized samples presented very high qualify and electromechanical coupling factors, together with small dielectric loss.