• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.27 no.8
• /
• pp.501-504
• /
• 2014

This paper was developed and described core-process to implement low on resistance which was the most important characteristics of SJ (super junction) MOSFET. Firstly, using process-simulation, SJ MOSFET optimal structure was set and developed its process flow chart by repeated simulation. Following process flow, gate level process was performed. And source and drain level process was similar to genral planar MOSFET, so the process was the same as the general planar MOSFET. And then to develop deep trench process which was main process of the whole process, after finishing photo mask process, we developed deep trench process. We expected that developed process was necessary to develop SJ MOSFET for automobile semiconductor.

• Journal of the Korean Institute of Gas
• /
• v.25 no.6
• /
• pp.35-44
• /
• 2021

The PR (Photo Resist) process in the semiconductor process is a process that uses a mixture of flammable substances. Due to the process equipment is installed in a clean room and when flammable substances leak, there is a high risk of suffocation, fire, and explosion. It is necessary to analyze the impact of accidents that may occur during operation and to evaluate whether the safety of workers can be guaranteed. In this study, the value of radiant heat and temperature change at the monitor point set up virtual inside the clean room was confirmed through CFD simulation of 10 leak and fire scenarios using the FLACS CFD - Fire Module. A fire that occurs inside a clean room transfers high radiant heat to the inter-story structure, but its scope is quite limited, and it is unlikely that it will collapse in a single fire accident. There was no scenario in which two stairs leading to the exit were exposed to high radiant heat at the same time due to a fire accident, therefore workers were able to escape in case of a fire. In addition, it was confirmed that the level of radiant heat and temperature rise rapidly decreased as they moved downstairs. According to the API 520 standard, workers exposed to 6.31 kW/m² of radiant heat that workers can withstand for 30 seconds were confirmed that it was possible to sufficiently escape from the inside.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
• /
• v.33 no.2
• /
• pp.95-101
• /
• 2015

The study planned to suggest the efficient methods of system calibration between the range and optical sensors. The simulation was performed by considering i) design of test-bed, ii) mathematical methods of system calibration and iii) locations of the sensors. The test-bed was designed by considering specifications of the range and optical sensors. Also, the error levels of each sensor were considered in the process of simulation with dataset, which was generated under these predetermined conditions. The system calibration was carried out by using the simulated dataset in two different approaches, which are single photo resection and bundle adjustment. The results from the simulation determined that the bundle adjustment method is more efficient than the single photo resection in the system calibration between range and optical sensors. For the better results, we have used the data, obtained in various locations. In a conclusion, the most efficient case was in sequence of i) the bundle adjustment with ii) the simulated dataset, which were obtained between 2m to 4m away from the test-bed.

• Journal of the Korean Institute of Landscape Architecture
• /
• v.35 no.2 s.121
• /
• pp.55-63
• /
• 2007

The purpose of this study is to create a planting design for progressive realization. For this, visual preferences as measured via questionnaire were evaluated by the Scenic Beauty Estimation(SBE) and paired comparison methods. The results can be summarized as follows. Through photo observation, the average visual blockage ratio was 38% and the range of degree of the visual blockage ratio was $30{\sim}50%$. The sketch simulation and filtered pattern received the highest preference score and fumed out to be the most practical pattern out of all the patterns evaluated. Also, in the sketch simulation, the high preference values were observed for a distance of 9 to 12m from the view point to the blockage tree with a D/H ratio of 2. The preference score significantly decreased with the increase of the visual blockage ratio having a turning point at $30{\sim}35%$ of the visual blockage ratio, even though the distance parameters were more important than the visual blockage ratio in the scores. An outstanding view must be handled properly to be preserved or accentuated. Framed, open, enclosed, screened or filtered pattern views should be completely revealed only from their best vantage point, not given away at first glimpse. It this sense, parallax spatial beauty with trees could be improved through the visual aspects of plan arrangements and seems to be an effective design technique for landscape planning and planting design.

• Journal of the Korean Graphic Arts Communication Society
• /
• v.28 no.1
• /
• pp.51-63
• /
• 2010

Ink-jet is part of the non impact printing that shooting the ink drop from the nozzle to paper. It is very silence and express good color. There are two types of printing that continuous and drop on demand. But drop on demand process is becoming the mainstream. these days, LCD, PDP is passed more than semiconductor industry. And we expect organic EL, FED as a next display. But product equipment, main component and technology have a gap between an advanced country and us nevertheless physical development. Expecially, previous process part is depended on imports. Ink-jet printing technology that there isn't complicated photo lithography process is attracted, so ink-jet printing resolution is more embossed. But there were not many of ink-jet resolution thesis but ink-jet head or nozzle. Because, to out of the ink from the nozzle is unseeable and hard to experiment. Therefore this thesis was experimented and simulated how can ink-jet printer improved resolution by flow-3d simulation package program.

• Elastomers and Composites
• /
• v.48 no.4
• /
• pp.282-287
• /
• 2013

Slot coating has been widely spread in photo resist coating on glass for flat display monitor. High quality of coating is required as high quality of image in display is needed. Coating quality in the slot coating is divided into nozzle direction quality and machine direction quality. Nozzle direction quality is related to flow uniformity inside the die whereas machine direction quality is related to die lip design and operational conditions. In this study coating uniformity in the machine direction of slot coating has been investigated through computer simulation. Die lip angle and die lip length were considered as outside die geometry and coating speed was considered as operational condition. Coating behavior has been analyzed and coating quality has been evaluated through computer simulation. Coating thickness decreased and coating uniformity increased as coating speed increased. However, the stability of meniscus formation was reduced and subsequently coating stability was reduced as coating speed increased. Coating thickness deviation decreased as die lip angle increased in down stream die. Coating thickness decreased and time to reaching steady state increased as increased die lip length in down stream die.

• Journal of Radiation Industry
• /
• v.6 no.1
• /
• pp.31-40
• /
• 2012

There are two methods to fabricate the readout electronic to a large-area CMOS image sensor (LACIS). One is to design and manufacture the sensor part and signal processing electronics in a single chip and the other is to integrate both parts with bump bonding or wire bonding after manufacturing both parts separately. The latter method has an advantage of the high yield because the optimized and specialized fabrication process can be chosen in designing and manufacturing each part. In this paper, LACIS chip, that is optimized design for the latter method of fabrication, is presented. The LACIS chip consists of a 3-TR pixel photodiode array, row driver (or called as a gate driver) circuit, and bonding pads to the external readout ICs. Among 4 types of the photodiode structure available in a standard CMOS process, $N_{photo}/P_{epi}$ type photodiode showed the highest quantum efficiency in the simulation study, though it requires one additional mask to control the doping concentration of $N_{photo}$ layer. The optimized channel widths and lengths of 3 pixel transistors are also determined by simulation. The select transistor is not significantly affected by channel length and width. But source follower transistor is strongly influenced by length and width. In row driver, to reduce signal time delay by high capacitance at output node, three stage inverter drivers are used. And channel width of the inverter driver increases gradually in each step. The sensor has very long metal wire that is about 170 mm. The repeater consisted of inverters is applied proper amount of pixel rows. It can help to reduce the long metal-line delay.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.23 no.6
• /
• pp.440-443
• /
• 2010

We report a top-down approach based on atomic force microscopy (AFM) local anodic oxidation for the fabrication of the nano-pattern field effect transistors (FETs). AFM anodic oxidation is relatively a simple process in atmosphere at room temperature but it still can result in patterns with a high spatial resolution, and compatibility with conventional silicon CMOS process. In this work, we study nano-pattern FETs for various cross-bar distance value D, from ${\sim}0.5\;{\mu}m$ to $1\;{\mu}m$. We compare the optical characteristics of the patterned FETs and of the reference FETs based on both 2-dimensional simulation and experimental results for the wavelength from 100 nm to 900 nm. The simulated the drain current of the nano-patterned FETs shows significantly higher value incident the reference FETs from ${\sim}1.7\;{\times}\;10^{-6}A$ to ${\sim}2.3\;{\times}\;10^{-6}A$ in the infrared range. The fabricated surface texturing of photo-transistors may be applied for high-efficiency photovoltaic devices.

• Macromolecular Research
• /
• v.14 no.2
• /
• pp.155-165
• /
• 2006

The present article describes the experimental and theoretical observations on the formation of holographic, polymer-dispersed, liquid crystals and electrically switchable, photonic crystals. A phase diagram of the starting mixture of nematic liquid crystal and photo-reactive triacrylate monomer was established by means of differential scanning calorimetry (DSC) and cloud point measurement. Photolithographic patterns were imprinted on the starting mixture of LC/triacrylate via multi-beam interference. A similar study was extended to a dendrimer/photocurative mixture as well as to a single component system (tetra-acrylate). Theoretical modeling and numerical simulation were carried out based on the combination of Flory-Huggins free energy of mixing and Maier-Saupe free energy of nematic ordering. The combined free energy densities were incorporated into the time-dependent Ginzburg-Landau (Model C) equations coupled with the photopolymerization rate equation to elucidate the spatio-temporal structure growth. The 2-D photonic structures thus simulated were consistent with the experimental observations. Furthermore, 3-D simulation was performed to guide the fabrication of assorted photonic crystals under various beam-geometries. Electro-optical performance such as diffraction efficiency was evaluated during the pattern photopolymerization process and also as a function of driving voltage.

• 제어로봇시스템학회:학술대회논문집
• /
• 2005.06a
• /
• pp.57-61
• /
• 2005

This paper presents a new colonoscopy training simulator that includes a specialized haptic device and graphics algorithms to transfer haptic sensation through a long and flexible tube, and manage large number of polygons. The developed haptic device makes the colonoscope tube move along the two guiding rods in the translational direction. The torque of the roll motion is transferred by a timing belt and pulleys. A special guide is developed, which allows the force and torque from the motors to be transmitted to the user without loss. The haptic device is evaluated by physicians. One of the important skills of the colonoscopy, jiggling is incorporated for the first time by the developed sensor mechanism using photo-sensors. A colonoscope handle that shares the look, feel, and functions with the actual colonoscope, is developed with the necessary electronics inside. The number of polygons is reduced by an edge-collapse algorithm for real-time simulation. The algorithms to import CT data, to segment the colon image, to extract centerline of the colon, and to construct the colon surface, are integrated into a Colon Modeling Kit system that performs all these processes in real-time.