• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.86-89
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• 2003

Chemical Mechanical Planarization(CMP) has been accepted as the most effective processes for ultra large scale integrated (ULSI) chip manufacturing. However, as the polishing process continues, pad pores get to be glazed by polishing residues, which hinder the supply of new slurry. And pad surface is ununiformly deformed as real contact distance. These defects make material removal rate(MRR) decrease with a number of polishied wafer. Also the desired within-chip planarity, within wafer non-uniformity(WIWNU) and wafer to wafer non-uniformity(WTWNU) arc unable to be achieved. So, pad conditioning in CMP Process is essential to overcome these defects. The eletroplated or brazed diamond conditioner is used as the conventional conditioning. And. allumina long fiber, the jet power of high pressure deionized water, vacuum compression. ultrasonic conditioner aided by cavitation effect and ceramic plate conditioner are once used or under investigation. But. these methods arc not sufficient for ununiformly deformed pad surface and the limits of conditioning effect. So this paper focuses on the characteristics of diamond conditioner which reopens glazed pores and removes ununiformly deformed pad away.

• 한국기계가공학회지
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• 제2권4호
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• pp.17-24
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• 2003

Chemical mechanical polishing(CMP) has been applied for planarization of topography after patterning process in semiconductor fabrication process. Tungsten CMP is necessary to build up interconnects of semiconductor device. But the tungsten dishing and the oxide erosion defects appear at end-point during tungsten CMP. It has been known that the generation of dishing and erosion is based on the over-polishing time, which is determined by pattern selectivity. Fixed abrasive pad takes advantage of decreasing the defects resulting flam reducing pattern selectivity because of the lower abrasive concentration. The manufacturing technique of fixed abrasive pad using hydrophilic polymers is introduced in this paper. For application to tungsten CMP, chemicals composed of oxidizer, catalyst, and acid were developed. In comparison of the general pad and slurry for tungsten CMP, the fixed abrasive pad and the chemicals resulted in appropriate performance in point of removal rate, uniformity, material selectivity and roughness.

• 대한기계학회논문집A
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• 제33권8호
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• pp.739-744
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• 2009

Rail-pad is an important and readily replaceable component of a railway track, as it is the elastic layer between the rail and the sleeper. Characteristics and useful lifetime prediction of rail-pad was very important in design procedure to assure the safety and reliability. In this paper, the degradation of rail pad properties as a function of their in-service life is studied with a view of developing a technique for predicting the optimum period of track maintenance with regard to pad replacement. In order to investigate the useful lifetime, the accelerate test were carried out. Accelerated test results changes as the threshold are used for assessment of the useful life and time to threshold value were plotted against reciprocal of absolute temperature to give the Arrhenius plot. By using the acceleration test, several useful lifetime prediction for rail-pads were proposed.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2011년도 추계학술대회 논문집
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• pp.279-284
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• 2011

The calculation of Zwicker's loudness which is needed for multiple frequency response with a fine frequency resolution using the finite element (FE) procedure usually requires significant computation time since a numerical solution must be obtained for each considered frequency. Furthermore, if the analysis is the basis for an iterative optimization procedure this approach imposes high computational cost. In this work, we present an efficient approach for obtaining Zwicker's loudness via the Pad$\acute{e}$ approximants and applying in an acoustical topology optimization procedure. The paper is focused on an efficient and accurate calculation of Zwicker's loudness, design sensitivity analysis, and the acoustical topology optimization method by using Pad$\acute{e}$ approximants. The paper compares the efficient algorithm to results obtained by a standard FEM. Comparison are made both in terms of accuracy and in terms of CPU-times needed for the calculation.

• 한국정밀공학회지
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• 제18권11호
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• pp.168-173
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• 2001

The chemical mechanical polishing (CMP) is generally consisted of pad, slurry including abrasives and so on. However, there are some problems in a general CMP: defects, a high Cost of Consumable (CoC), an environmental problem. The slurry including abrasives especially gives rise to not only increase a CoC, but also prohibition from achieving an eco-process. This paper introduces an abrasive capsulation pad to achieve an eco-process decreasing abrasives used is CMP. The binder wth a water a water swelling and a water soluble characteristic is used for an auto-conditioning, and the $CeO_2$abrasive is selected for an abrasive capsulation pad. Comparing with a conventional CMP, an abrasive capsulation pad appears good characteristics in ILD CMP and is able to achieve an eco-process decreasing wasted slurry.

• Journal of Communications and Networks
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• 제13권2호
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• pp.113-124
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• 2011

Electrocardiography (ECG) is a widely accepted approach for monitoring of cardiac activity and clinical diagnosis of heart diseases. Since cardiologists have been well-trained to accept 12-lead ECG information, a huge number of ECG systems are using such number of electrodes and placement configuration to facilitate fast interpretation. Our goal is to design a wireless ECG system which renders conventional 12-lead ECG information.We propose the three-pad ECG system (W3ECG). W3ECG furthers the pad design idea of the single-pad approach. Signals obtained from these three pads, plus their placement information, make it possible to synthesize conventional 12-lead ECG signals.We provide one example of pad placement and evaluate its performance by examining ECG data of four patients available from online database. Feasibility test of our selected pad placement positions show comparable results with respect to the EASI lead system. Experimental results also exhibit high correlations between synthesized and directly observed 12-lead signals (9 out of 12 cross-correlation coefficients higher than 0.75).

• Korean Chemical Engineering Research
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• 제59권1호
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• pp.100-105
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• 2021

본 연구는 적은 비용으로 분석 장치 없이 질병 진단 및 경과를 모니터링할 수 있는 종이-기반 분석 장치(paper-based analytical device, PAD)를 제작하기 위해 polydimethylsiloxane (PDMS) 블레이드 코팅 방법을 제안하였다. PAD 디자인은 레이저 커팅 기술로 쉽게 몰드에 적용할 수 있으며, 제작된 몰드로 블레이드 코팅을 수행하여 완전한 소수성 장벽 형성에 필요한 조건을 확립하였다. 코팅 조건인 잉크의 두께와 종이와의 접촉시간에 따라 PDMS 소수성 장벽의 구조와 친수성 채널의 크기 변화를 분석하여 안정적으로 소수성 장벽을 형성할 수 있는 조건을 최적화하였다. 최적화된 방법을 바탕으로 PAD를 제작하여 특별한 분석기기 없이 단백질, 당, 메탈이온을 검출하여 바이오센서에 응용가능함을 증명하였다.

• Nuclear Engineering and Technology
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• 제16권2호
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• pp.70-79
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• 1984

대형 고속증식로용 핵계산 체제(KAERI-26군 단면적 library/1DX/2DB)를 이용하여 SUPER-PHE-NIX I 평형 노심의 초기상태에서의 diagrid 및 Pad팽창에 대한 반응도 계수를 계산, 검토하였다. 노심은 R-Z등가 model로 묘사하고, 2차원 다군 확산 이론 전산코드인 2DB를 사용하여 임계도를 계산하였다. 기초계산으로서 반경방향 및 축방향 균일 괭창에 대한 반응도 계산과 노심구성물질의 원자수 밀도 변화와 노심체적 변화에 대한 반응도 변화량계산을 수행하였다. 균일 팽창으로 고려한 diagrid팽창에 대한 반응도 계수는 -0.553pcm/mil로 계산되었다. 한편 반응도의 온도계수는 -1.0766pcm/$^{\circ}C$로 환산되어 프랑스 발표치 -1.09pcm/$^{\circ}C$와 1.2%오차내로 일치하였다. Diagrid 팽창효과 졔산방법을 활용하여 노심의 불균일 팽창을 유발하는 pad팽창에 대한 반응도 계수 계산을 수행한 바 매우 유용함을 알았다. Pad팽창에 대한 반응도 계수는 평균팽창 model의 경우 -0.2743pcm/mi1, pancake집적 model의 경우 -0.2786pcm/mi1로 각각 계산되었다. 또한 자유팽창 노심에서의 온도변화에 따른 pad 팽창에 대한 반응도 계수는 각 model에 대하여 -0.5766pcm/$^{\circ}C$, -0.5858pcm/$^{\circ}C$로 계산되어 프랑스 발표치 -0.574pcm/$^{\circ}C$와 2% 오차내로 일치하였다.

• 한국콘텐츠학회논문지
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• 제17권7호
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• pp.144-157
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• 2017

현재 학생 수 감소로 인해 대학별로 경쟁력을 높이기 위한 다양한 노력들을 기울이고 있는데, 특히 대학의 핵심서비스인 수업만족도 향상은 경쟁력에서 중요한 부분이다. 이런 중요성으로 인해 수업만족도에 대한 연구가 진행되고 있으나, 수업의 감정적 부분에 관한 연구는 거의 없다. 만족도의 중요한 요인이 감정임을 볼 때, 수업도 마찬가지로 이러한 감정의 영향을 살펴볼 필요가 있을 것이다. 따라서 본 연구에서는 많은 연구에서 만족의 선행요인으로 확인된 PAD(Pleasure, arousal, dominance)를 대학수업에 적용하여 대학 수업의 감정적 측면을 부각시키고자 한다. 또한 이러한 감정을 자극하는 변수로서 교수실재감과 교수-학습자 상호작용, 학습자간 상호작용을 제시하고 PAD와 수업만족도와의 관계를 설정하고 검증하였다. 219명의 대학생 표본을 구조방정식 모형을 이용해 분석한 결과, 교수실재감은 교수-학습자 상호작용에 영향을 주고, 즐거움, 각성, 지배감과 같은 감정에 긍정적 영향을 주는 것으로 나타났다. 그리고 교수-학습자 상호작용은 즐거움과 각성에 영향을 주고, 학습자간 상호작용은 즐거움, 각성, 지배감에 긍정적 영향을 주는 것으로 나타났다. 마지막으로 즐거움, 각성, 지배감은 모두 수업만족도를 유의하게 증가시키는 것으로 나타났다. 이러한 연구결과는 주로 수업의 인지적 부분에 집중하던 기존 연구에 다른 시각을 제공해주며, 수업만족도를 높이기 위한 방법에 있어 감정을 자극하는 다양한 프로그램이나 수업방식을 개발해야 한다는 시사점을 제공한다.

• 대한전기학회논문지:시스템및제어부문D
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• 제55권8호
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• pp.386-396
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• 2006

We implemented the Drug-Pad Moxibustion Method in order to improve the conventional moxibustion therapy. This method is aimed to eliminate burning wounds and smoke, which are the defects of conventional moxibustion therapy. And we performed to verify the efficiency by comparing the Drug-Pad Moxibustion Method with the conventional Indirect Moxibustion Therapy. We measured the body heat and the lasting time of blood circulation improvement using thermography. The moxibustion therapy has two kinds of effects: The formers are pharmacological effects of the Moxa's vasodilators and antioxidants. The latters are thermal effects which cause improvement of the blood circulation. To remove the demerits without omission of above therapeutic effects, we extracted the vasodilators and antioxidant compounds from the Moxa-$CH_2Cl_2$ fraction Moxa-EtOAc and composed the moxibustion kit with $(Ba_{0.8}\;Sr_{0.2})_{0.996}\;Y_{0.004}\;TiO_2+0.5_{WT}\;SiO_2%$ Positive Temperature Coefficients Thermistor. The experimental demonstrations have been made by the stimulating the spot which is CV4(Kwan-Won), CV8(Shin-Guel), CV12(Jung-Wan) acupuncture points of the conception vessel meridian(CV). And stimulating time was one hour. We divided the subjects into 5 groups such as no stimulation group, conventional Indirect Moxibustion group, only Drug-Pad stimulation group, only heat stimulation group, and Drug-Pad Moxibustion group. In the different cases, we have measured the body heat in pre-stimulation, just after stimulation, 2 hours after, and 4 hours after. The body heats of the group who were stimulated by the Drug-Pad Moxibustion Method were increased by over the $2^{\circ}C$. And the body heats of the group who were stimulated by the Indirect Moxibustion Method were increased by average the $1^{\circ}C$. We have evaluated that the Drug-Pad Moxibustion Method is improvement on the conventional Indirect Moxibustion Method by the heat-increasing rate is 200% and the lasting time is 150% with the body heat of the abdominal region. In the conclusions, We have implemented the Drug-Pad Moxibustion Method and evaluated the efficiency of the Drug-Pad Moxibustion Method comparing with the conventional Indirect Moxibustion Method.