• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1296-1301
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• 2003

The chemical mechanical polishing(CMP) is necessarily applied to manufacturing the dielectric layer and metal line in the semiconductor device. The conditioning of polishing pad in CMP process additionally operates for maintaining the removal rate, within wafer non-uniformity, and wafer to wafer non-uniformity. But the fixed abrasive pad(FAP) using the hydrophilic polymer with abrasive that has the swelling characteristic by water owns the self-conditioning advantage as compared with the general CMP. FAP also takes advantage of planarity, resulting from decreasing pattern selectivity and defects such as dishing due to the reduction of abrasive concentration. This paper introduces the manufacturing technique of FAP. And the tungsten CMP using FAP achieved the good conclusion in point of the removal rate, non-uniformity, surface roughness, material selectivity, micro-scratch free contemporary with the pad life-time.

• Proceedings of the KSME Conference
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• 2000.11a
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• pp.665-670
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• 2000

The paper presents the dynamic instability of a disc brake pad subjected to distributed friction forces. A brake pad can be modeled as a beam with two translational springs. The study of this prototypical model is intended to provide a fundamental understanding of disc brake pad instabilities. Governing equations of motion are derived form energy expressions and their corresponding solutions are obtained by employing the finite element method. The critical distributed friction force and the instability regions are demonstrated by changing two translational spring constants. Finally, the changes of eigen-frequencies of a beam determining instability types are investigated for various combinations of two spring constants.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.352-353
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• 2005

Indium tin oxide (ITO) thin film was polished by chemical mechanical polishing (CMP) immediately after pad conditioning with the various conditioning temperatures by control of do-ionized water (DIW). Light transparent efficiency of ITO thin film was improved after CMP process after pad conditioning at the high temperature because the surface morphology was smoother by soften polishing pad and decreased particle size.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.2
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• pp.8-10
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• 2008

Chemical mechanical polishing (CMP) is a very precise planarization technique where a wafer is polished by a slurry-coated pad. A slurry is dropped on the rotating pad surface and is supplied between the wafer and the pad. This research aims at reducing the slurry consumption and removing waste particles quickly from the wafer. To study the roles of grooves, slurry flows were simulated using the volume of fluid method (two-phase model for air and slurry) for pads with no grooves, and for pads with circular grooves.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2003.11a
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• pp.261-266
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• 2003

The present paper theoretically investigates characteristics of moment balance of a tilting-pad thrust bearing. Pressure of lubricant film of the bearing was computed using tile finite element method, and average film temperature was estimated from the heat balance over a pad. From the investigation, it has been found that different two sets of tilt angles satisfy moment equilibrium of the pad about tile pivot for a given pivot location. The tilt angles converged depend upon initial tilt angles assumed. Quite different bearing performance, including load capacity, film thickness, and temperature, is shown to be obtained based on choice of the initial tilt angles.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.94-99
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• 2003

As the rotating speed of rotors is increased, the instability and power loss become serious problems. Gas bearings are introduced as a good solution to those problems. But in the development of gas bearings, high load capacity and high damping force to vibrations are required. In this study a new air bearing using leaf spring pad is introduced to improve load capacity and damping force. The experimental results of the leaf spring pad air bearings show high load capacity and high damping forces. And the results show that leaf spring pad air bearings can be simultaneously acted as radial and thrust bearings

• ETRI Journal
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• v.33 no.4
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• pp.637-640
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• 2011

A novel bumping material, which is composed of a resin and Sn3Ag0.5Cu (SAC305) solder power, has been developed for the maskless solder-on-pad technology of the fine-pitch flip-chip bonding. The functions of the resin are carrying solder powder and deoxidizing the oxide layer on the solder power for the bumping on the pad on the substrate. At the same time, it was designed to have minimal chemical reactions within the resin so that the cleaning process after the bumping on the pad can be achieved. With this material, the solder bump array was successfully formed with pitch of 150 ${\mu}m$ in one direction.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.10 no.2
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• pp.26-31
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• 2011

This article provides the systematic design methodology for a tilting pad journal bearing. First the dynamic factors for the bearing are selected with the critical speed analysis. The pad bearing is then designed to have its best mechanical efficiency by simulations with changing of the number of pad and the lubricant flow rate with meeting the design specifications such as metal temperature, clearance and so on. And the simulation results are reviewed to compare with an experimental test. Finally the stability of rotor with the designed bearing is investigated. This methodology is successfully applied to the rotor for 1.2MW turbo-blower.

• Carbon letters
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• v.5 no.1
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• pp.6-11
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• 2004

In spite of unparalleled combination of essential material properties for brake linings and clutch facings, replacement for asbestos is seriously called for since it is a health hazard. Once asbestos is replaced with other material then composition and properties of brake pad changes. In certain cases hardness of the material may be high enough to affect the rotor material. In this study, hardness of the brake pad has been controlled using suitable reinforcement materials like glass, carbon and Kevlar pulp. Brake pad formulations were made using CNSL (cashew net shell liquid) modified phenolic resin as a binder, graphite or cashew dust as a friction modifier and barium sulphate, talc and wollastonite as fillers. Influence of each component on the hardness value has been studied and a proper formulation has been arrived at to obtain hardness values around 35 on Scleroscopic scale. Friction and wear properties of the respective brake pad materials have been measured on a dynamometer and their performance was evaluated.

• Tribology and Lubricants
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• v.20 no.3
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• pp.152-156
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• 2004

The present paper theoretically investigates characteristics of moment balance of a tilting-pad thrust bearing. Pressure of lubricant film of the bearing was computed using the finite element method, and average film temperature was estimated from the heat balance over a pad. From the investigation, it has been found that different two sets of tilt angles satisfy moment equilibrium of the pad about the pivot for a given pivot location. The tilt angles converged depend upon initial tilt angles assumed. Quite different bearing performance, including load capacity, film thickness, and temperature, is shown to be obtained based on choice of the initial tilt angles.