Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.11a
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- Pages.352-353
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- 2005
Electrical and Optical Properties of ITO Thin Film with a Control of Temperature in Pad Conditioning Process
패드 컨디셔닝 온도 변화가 ITO 박막의 전기적.광학적 특성에 미치는 영향
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Choi, Gwon-Woo
(Chosun University)
;
- Seo, Yong-Jin (Daebul University) ;
- Lee, Woo-Sun (Chosun University)
- Published : 2005.11.10
Abstract
Indium tin oxide (ITO) thin film was polished by chemical mechanical polishing (CMP) immediately after pad conditioning with the various conditioning temperatures by control of do-ionized water (DIW). Light transparent efficiency of ITO thin film was improved after CMP process after pad conditioning at the high temperature because the surface morphology was smoother by soften polishing pad and decreased particle size.