• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.378-379
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• 2006

CMP(chemical mechanical polishing) process has been attracted as an essential technology of multi-level interconnection. However, the COO(cost of ownership) is very high, because of high consumable cost. Especially, among the consumables, slurry dominates more than 40 %. So, we focused how to reduce the consumption of raw slurry. In this paper, $ZrO_2$, $CeO_2$, and $MnO_2$ abrasives were added de-ionized water (DIW) and pH control as a function of KOH contents. We have investigate the possibility of new abrasive for the oxide CMP application.

• 생명과학회지
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• 제17권12호
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• pp.1616-1621
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• 2007

발효된 오이의 산패는 원하지 않는 미생물의 2차적 생장에 의한 결과이며 장기보관을 원하는 발효오이 식품은 일반적으로 고농도의 염을 사용한다. 염의 농도를 최소한으로 하면서 산패를 방지할 수 있는 pH의 범위를 모색하기 위하여 다양한 조합의 pH와 NaCl 농도를 갖는 발효오이즙(FCS) 배양액에 3가지 종류의 산패액을 각각 접종하여 발효오이의 산패여부를 조사하였다. pH3에서는 NaCl의 첨가가 없더라도 산패는 일어나지 않는데 비하여 pH 5.0에서는 4%의 NaCl에서도 모두 산패가 진행되었다. pH 3.5, pH 4, pH 4.5 에서는 0%와 2% NaCl의 범위 내에서 다양한 결과를 보였다. 이 결과를 바탕으로 발효오이의 산패를 예견할 수 있는 조견표를 작성하였다. 조견표의 사용은 발효오이의 장기보관을 위한 적절한 산도와 염의 농도의 선택을 가능하게 할 것이다.

• Animal Bioscience
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• 제35권2호
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• pp.308-316
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• 2022

Objective: This study was conducted to determine reduction of various odorous materials from a swine farm equipped with a continuous pit recirculation system (CPRS) with aerobically treated liquid manure. Methods: The CPRS is used in swine farms in South Korea, primarily to improve air quality in pig houses. In this study, CPRS consists of a manure aerobic treatment system and a fit recirculation system; the solid fraction is separated and composted, whereas the aerobically treated liquid fraction (290.0%±21.0% per day of total stored swine slurry) is continuously returned to the pit. Four confinement pig barns in three piggery farms were used; two were equipped with CPRS and the other two operated a slurry pit under the slatted floor. Results: All chemical contents of slurry pit manure in the control were greater than those of slurry pit manure in the CRPS treatment (p<0.05). Electrical conductivity and pH contents did not differ among treatments. The biological oxygen demand of the slurry pit treatment was greater than that of the other treatments (p<0.05). Total nitrogen, total phosphorus, and ammonia nitrogen contents of the slurry pit treatment were greater than those of other treatments (p<0.05). Odor intensity of the CPRS treatment was lower than that of the control at indoor, exhaust, and outside sampling points (p<0.05). The temperature and carbon dioxide of the CPRS treatment in the pig barn was significantly lower than those of control (p<0.05). All measured odorous material contents of the CPRS group were significantly lower than those of the control group (p<0.05). Conclusion: The CPRS application in pig farms is considered a good option as it continuously reduces the organic load of animal manure and lowers the average odorant concentration below the threshold of detecting odorous materials.

• 한국초지조사료학회지
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• 제18권3호
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• pp.235-242
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• 1998

This experiment was carried out to determine agronomic characteristics, nutritive value and yield (DM, CP) of Winter Rye as affected by different slurry application on the basis of N contents respectively and was arranged as a randomized complete block design with seven treatments (chemical fertilizer 160kg Nha, cattle sluny 160 . 320 480kg Nha, swine slurry 160 . 320 480kg Nha) and conducted at National Livestock Research Institute, RDA, in Suweon 6om Sep. 1996. to Apr. 1997. The results obtained are summarized as follows : Plant height and leaf length was influenced by slurry application, was orderly ranked cattle sluny 480kg N1 ha > chemical fertilizer 160kg Nha > swine slurry 480kg Nha. Tiller number was increased with cattle slurry application, especilly, the effect of cattle slurry 480kg Nha was obvious but plot of swine slurry tended not to be regular. Crude protein content of rye increased as slurry application level was increased (p< 0.05), but not significant difference was found ADF and NDF content of rye. RFV(Re1ative Feed Value) of rye as affected by slurry application was classified as Grade 2 in all treatments at harvest, according to the forage quality standard assigned by AFGC. Dry matter yield was shown fiom 4,006 kgha to 8,037 kgha as affected by cattle slurry application, in the case of swine slurry application was shown ffom 4,594 kgha to 6,230 kgha (p< 0.05).

• Journal of Microbiology and Biotechnology
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• 제19권10호
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• pp.1161-1168
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• 2009

Ethanol production by the simultaneous saccharification and fermentation (SSF) of low-value rice wine cake (RWC) without cooking was investigated. RWC is the filtered solid waste of fermented rice wine mash and contains 53% raw starch. For the SSF, the RWC slurry was mixed with the raw-starch-digesting enzyme of Rhizopus sp. and yeast, where the yeast strain was selected from 300 strains and identified as Saccharomyces cerevisiae KV25. The highest efficiency (94%) of ethanol production was achieved when the uncooked RWC slurry contained 23.03% starch. The optimal SSF conditions were determined as 1.125 units of the raw-starch-digesting enzyme per gram of RWC, a fermentation temperature of $30^{\circ}C$, slurry pH of 4.5, 36-h-old seeding culture, initial yeast cell number of $2{\times}10^7$ per ml of slurry, 17 mM of urea as the nitrogen additive, 0.25 mM of $Cu^{2+}$ as the metal ion additive, and a fermentation time of 90 h. Under these optimal conditions, the ethanol production resulting from the SSF of the uncooked RWC slurry was improved to 16.8% (v/v) from 15.1% (v/v) of pre-optimization.

• 한국초지조사료학회지
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• 제33권4호
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• pp.252-256
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• 2013

본 연구는 양돈 슬러리의 악취물질 감소에 효과가 있는 것으로 확인된 물질의 효능을 비교분석하기 위하여 수행되었다. 페놀류 농도는 고추냉이와 아몬드피 구에서 낮았고, 인돌류 농도는 아몬드피 구에서 가장 낮았다(p<0.05). 따라서 슬러리에 아몬드피를 첨가하면 VOC 농도가 감소되었다. SCFA 농도는 팽이버섯폐배지와 아몬드피 구에서 높았고, BCFA 농도는 대조구에 비해 다른 모든 처리구에서 낮았다(p<0.05). 또한 슬러리의 pH는 팽이버섯폐배지와 아몬드피 구에서 낮았다(p<0.05). 따라서 팽이버섯폐배지 또는 아몬드피를 슬러리에 첨가하면 SCFA 농도는 증가되고 BCFA 농도는 감소되는 것으로 나타났다.

• Transactions on Electrical and Electronic Materials
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• 제4권2호
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• pp.1-4
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• 2003

The purpose of this study was to investigate the characteristics of slurry including phosphoric acid for chemical-mechanical planarization of copper and tantalum nitride. In general, the slurry for copper CMP consists of alumina or colloidal silica as an abrasive, organic acid as a complexing agent, an oxidizing agent, a film forming agent, a pH control agent and additives. Hydrogen peroxide (H$_2$O$_2$) is the material that is used as an oxidizing agent in copper CMP. But, the hydrogen peroxide needs some stabilizers to prevent decomposition. We evaluated phosphoric acid (H$_3$PO$_4$) as a stabilizer of the hydrogen peroxide as well as an accelerator of the tantalum nitride CMP process. We also estimated dispersion stability and zeta potential of the abrasive with the contents of phosphoric acid. An acceleration of the tantalum nitride CMP was verified through the electrochemical test. This approach may be useful for the development of the 2$\^$nd/ step copper CMP slurry and hydrogen peroxide stability.

• 한국세라믹학회지
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• 제40권2호
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• pp.167-171
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• 2003

기계적 방법으로 합성된 CeO$_2$분말을 연마입자로 하여 STI용 CMP 슬러리를 제조하였다. 연마입자는 정전기적 방법과 입체적 방법으로 수계에서 안정화시킬 수 있었으며, 장기 안정성을 위해서는 입체적 방법에 의한 안정화가 유효하였다. 50$0^{\circ}C$와 $700^{\circ}C$에서 합성된 CeO$_2$를 이용하여 CMP 슬러리를 제조하고, SiO$_2$와 Si$_3$N$_4$가 블랭킷 형태로 증착된 웨이퍼를 연마한 결과 연마능률과 선택비는 연마입자의 합성조건과 분산 안정성, 슬러리의 pH 등에 의해 영향을 받았다.

• 한국대기환경학회지
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• 제14권4호
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• pp.273-280
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• 1998

The investigation on the removal of 502 gas fro.In flue gas which causes serious air pollution was made by using a semi dry flue gas desulfurization method. Experiments were carried out as a function of process variables which would affect SO2 removal efficiency. Process variables inclilded SO2 inlet concentration, inlet temperature of simulated flue gas, sorbent weight fraction, and volume flow rate of sorbent slurry. In this study, used sorbent was Ca(OH), and simulated flue gas was prepared by mixing pure SO2 gas with air. Experimental conditions were varied at 140~18$0^{\circ}C$ of inlet temperature of the simulated flue gas, 500~2000ppm of inlet SO2 concentration, 0.4~1.0% of sorbent concentration, and 10~25 mL/min of flow rate of sorbent slurry. Among process variables, inlet concentration of SO2 was found to be the most significant factor to affect SO2 removal efficiency. The concentration of Ca(OH2) had a lower effect on SO2 removal than SO2 inlet concentration removal amount was 0.108, 0.141, 0.153 g SO2/g Ca(OH)2 respectively- As 200 mmol of HNO3 was added into slurry to improve removal efficiency, initial pH was maintained and solubility of slurry increased, so that removal efficiency elevated. Adding over 200 mmol of HNO3 into slurry caused removal efficiency lower. Therefore it could be concluded the optimum was 200 mmol of HNO3 input.

• 한국축산시설환경학회지
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• 제15권3호
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• pp.217-224
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• 2009

1. 여재순환장치는 사각프레임 형태로 설계 제작하였으며, 고액분리장치, 여재순환구 동축 및 날개, 압축공기 분사장치와 여재 및 액비배출장치로 구성되었다. 2. 고액분리한 돈슬러리를 장치에 투입하여 가동을 한 결과, 톱밥을 여재로 이용했을 때 $BOD_5$는 52.8, $COD_{Mn}$ 57.3, SS 26.9, T-N 71.0, T-P 30.9% 수준으로 감소하는 것으로 나타났으며, 왕겨를 이용한 경우에도 톱밥과 비슷한 경향을 나타내었다. 3. 5회까지 순환시켜 침출된 액비의 비료 성분은 질소의 경우, 원슬러리에 비해 2/3 수준, 인산은 1/3 수준으로 줄어드는 경향을 나타냈으나, 칼리는 거의 변하지 않는 것으로 나타났다. 4. 침출액비의 악취 (암모니아, 황화수소)는 초기에 비해 상당한 수준으로 저감되었으며, 톱밥이 왕겨에 비해 비교적 효과가 높은 것으로 나타났다. 5. 여재순환장치 가동 전후의 돈슬러리내 미생물을 조사한 결과, 총세균과 부숙에 관여하는 것으로 추정되는 바실러스균은 증가하는 경향이었으며, 살모네라균은 급격하게 감소하는 경향을 보였다. 6. 이상과 같은 결과로 볼 때, 악취저감 균질액비 생산장치를 이용하여 액비를 생산할 경우, 오염물질, 악취물질, 병원성세균 등이 감소하고, 부숙관여 유용미생물이 증가한 악취저감 균질액비 생산이 가능한 것으로 판단된다.