Roles of Phosphoric Acid in Slurry for Cu and TaN CMP |
Kim, Sang-Yong
(MIT CMP Team, ANAM Semiconductor, Inc.)
Lim, Jong-Heun (Electronic Materials 2/sup nd/ division, DongJin Semichem Co., Ltd.) Yu, Chong-Hee (Electronics and Telecommunications Research Institute) Kim, Nam-Hoon (School of Electrical and Electronics Engineering, Chung-Ang University) Chang, Eui-Goo (School of Electrical and Electronics Engineering, Chung-Ang University) |
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