• Title/Summary/Keyword: oxide thin film

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Fabrication of Oxide Thin Films Using Nanoporous Substrates (나노기공성 기판을 사용한 산화물박막의 제조)

  • Park, Yong-Il;Prinz, Fritz B.
    • Journal of the Korean Ceramic Society
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    • v.41 no.12 s.271
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    • pp.900-906
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    • 2004
  • Solid oxide fuel cells have a limitation in their low-temperature application due to the low ionic conductivity of electrolyte materials and difficulties in thin film formation on porous gas diffusion layer. These problems can be solved by improvement of ionic conductivity through controlled nanostructure of electrolyte and adopting nanoporous electrodes as substrates which have homogeneous submicron pore size and highly flattened surface. In this study, ultra-thin oxide films having submicron thickness without gas leakage are deposited on nanoporous substrates. By oxidation of metal thin films deposited onto nanoporous anodic alumina substrates with pore size of $20nm{\sim}200nm$ using dc-magnetron sputtering at room temperature, ultra-thin and dense ionic conducting oxide films with submicron thickness are realized. The specific material properties of the thin films including gas permeation, grain/gran boundaries formation, change of crystalline structure/microstructure by phase transition are investigated for optimization of ultra thin film deposition process.

Preparation and Evaluation of the Properties of Al-doped Zinc Oxide (AZO) Films Deposition by Rapid Thermal Annealing (급속 열처리 방법에 의한 Al-doped Zinc Oxide (AZO) Films의 제조 및 특성 평가)

  • Kim, Sung-Jin;Choi, Kyoon;Choi, Se-Young
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.25 no.7
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    • pp.543-551
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    • 2012
  • In this study, transparent conducting Al-doped Zinc Oxide (AZO) films with a thickness of 150 nm were prepared on corning glass substrate by the RF magnetron sputtering with using a Al-doped zinc oxide (AZO), ($Al_2O_3$: 2 wt%) target at room temperature. This study investigated the effect of rapid thermal annealing temperature and oxygen ambient on structural, electrical and optical properties of Al-doped zinc oxide (AZO) thin films. The films were annealed at temperatures ranging from 400 to $700^{\circ}C$ by using Rapid thermal equipment in oxygen ambient. The effect of RTA treatment on the structural properties were studied by x-ray diffraction and atomic force microscopy. It is observed that the Al-doped zinc oxide (AZO) thin film annealed at $500^{\circ}C$ at 5 minute oxygen ambient gas reveals the strongest XRD emission intensity and narrowest full width at half maximum among the temperature studied. The enhanced UV emission from the film annealed at $500^{\circ}C$ at 5 minute oxygen ambient gas is attributed to the improved crystalline quality of Al-doped zinc oxide (AZO) thin film due to the effective relaxation of residual compressive stress and achieving maximum grain size.

Fuel Cells for Intermediate Temperature Operations (저온 작동 박막 고체산화물 연료전지)

  • Shim, Joon-H.;Cha, Suk-Won;Gur, Turgut M.;Prinz Fritz B.
    • Journal of the Korean Ceramic Society
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    • v.43 no.12 s.295
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    • pp.751-757
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    • 2006
  • Recently, a new type of solid oxide fuel cells has been developed employing extremely thin oxide electrolyte. These fuel cells are expected to operate at significantly reduced temperature compared to conventional solid oxide fuel cells. Accordingly, they may resolve the stability and material selection issues of high temperature fuel cells. Furthermore, they may eliminate the limitations of polymer membrane fuel cells whose operation temperature is under $100^{\circ}C$. In this paper, we review the electrolytes for intermediate temperature operation. Then, we discuss the current development of thin film solid oxide fuel cells that possibly operated at low temperatures.

A novel approach to bind graphene oxide to polyamide for making high performance Reverse Osmosis membrane

  • Raval, Hiren D.;Das, Ravi Kiran
    • Membrane and Water Treatment
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    • v.8 no.6
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    • pp.613-623
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    • 2017
  • We report the novel thin film composite RO membrane modified by graphene oxide. The thin film composite RO membrane was exposed to 2000 mg/l sodium hypochloride; thereafter it was subjected to different graphene oxide concentration ranging from 50 mg/l to 1000 mg/l in water. The resultant membrane was crosslinked with 5000 mg/l N-hydroxysuccinimide. The performance of different membranes were analysed by solute rejection and water-flux measurement. It was found that 100 mg/l graphene oxide exposure followed by 5000 mg/l N-hydroxysuccinimide treatment resulted in the membrane with the highest solute rejection of 97.78% and water-flux of 4.64 Liter per sqm per hour per bar g. The membranes were characterized by contact angle for hydrophilicity, scanning electron micrographs for surface morphology, energy dispersive X-Ray for chemical composition of the surface, Atomic force microscope for surface roughness, ATR-FTIR for chemical structure identification. It was found that the graphene oxide modified membrane increases the salt rejection performance after exposure to high-fouling water containing albumin. Highly hydrophilic, antifouling surface formation with the nanomaterial led to the improved membrane performance. Moreover, the protocol of incorporating nanomaterial by this post-treatment is simple and can be applied to any RO membrane after it is manufactured.

A study on the electrical switching properties of oxide metal (산화금속의 전기적 스위칭 특성 연구)

  • Choi, Sung-Jai;Lee, Won-Sik
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.9 no.3
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    • pp.173-178
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    • 2009
  • We have investigated the electrical properties of oxide metal thin film device. The device has been fabricated top-top electrode structure and its transport properties are measured in order to study the resistance change. Electrical properties with linear voltage sweep on a electrodes are used to show the variation of resistance of oxide metal thin film device. Fabricated oxide metal thin film device with MIM structure is changed from a low conductive Off-state to a high conductive On-state by the external linear voltage sweep. The $Si/SiO_2/MgO$ device is switched from a high resistance state to a low resistance state by forming. Consequently, we believe oxide metal is a promising material for a next-generation nonvolatile memory and other electrical applications.

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Tensile characteristics of Alumina Thin Film at High Temperature (고온에서 알루미나 박막의 인장특성)

  • 선신규;강기주
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.1344-1347
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    • 2004
  • Recently, Study on measuring property of a micro thin film(nm ~ hundreds of ) under Thermal Mechanical loading. In this work, We perform tensile test at high temperature(1200 ) to investigate mechanical properties of alumina TGO formed under Thermal Barrier Coating. We used Digital Image Correlation method for measuring displacement, and We presented a method of tensile test for thin film at high temperature.

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Electrical and Optical of Properties ITO Thin Film by CMP Process Parameter (CMP 공정변수에 따른 ITO박막의 전기적.광학적 특성)

  • Choi, Gwon-Woo;Kim, Nam-Hoon;Seo, Yong-Jin;Lee, Woo-Sun
    • Proceedings of the KIEE Conference
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    • 2005.11a
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    • pp.151-153
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    • 2005
  • Indium tin oxide (ITO) thin film was polished by chemical mechanical polishing (CMP) by the change of process parameters for the improvement of electrical and optical properties of ITO thin film. Light transparent efficiency of ITO thin film was improved after CMP process at the optimized process parameters compared to that before CMP process.

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Electrical and Optical Properties of ITO Thin Film by CMP Process Parameter (CMP 공정이 ITO 박막의 전기적.광학적 특성에 미치는 영향)

  • Choi, Gwon-Woo;Seo, Yong-Jin;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.354-355
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    • 2005
  • Indium tin oxide (ITO) thin film was polished by chemical mechanical polishing (CMP) by the change of process parameters for the improvement of electrical and optical properties of ITO thin film. Light transparent efficiency of ITO thin film was improved after CMP process at the optimized process parameters compared to that before CMP process.

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Mechanically Flexible and Transparent Zinc Oxide Thin Film Transistor on Plastic Substrates (Plastic 기판 상의 투명성과 유연성을 지닌 Zinc Oxide 박막 트랜지스터)

  • Park, Kyung-Yea;Ahn, Jong-Hyun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.10-10
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    • 2009
  • We have fabricated transparent and flexible thin film transistor(TFT) on polyethylene terephthalate(PET) substrate using Zinc Oxide (ZnO) and Indium Tin Oxide (ITO) film as active layer and electrode. The transfer printing method was used for printing the device layer on target plastic substrate at room temperature. This approach have an advantage to separate the high temperature annealing process to improve the electrical properties of ZnO TFT from the device process on plastic substrate. The resulting devices on plastic substrate presented mechanical and electrical properties similar with those on rigid substrate.

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