• 공업화학
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• 제22권6호
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• pp.631-635
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• 2011

직접산화법으로 제조한 구형 실리카졸과 비구형 실리카졸의 입자크기와 형상에 따른 산화막의 기계화학적 연마율에 미치는 영향을 연구하였다. 구형 실리카졸은 금속 실리콘 분말로부터 직접산화법에 의해 10~100 nm까지 크기별로 제조하였다. 직접산화법으로 제조한 10 nm 크기의 실리카졸에 산, 알콜, 실란과 같은 응집유도제에 의한 첨가하여 입자간 응집을 유도한 시드 졸을 제조하고, 여기에 실리콘 분말과 알칼리 촉매를 투입하여 직접산화법으로 입자를 성장하여, 두 개 이상의 입자가 응집되어 있는 실리카 시드의 형상이 유지된 상태에서 성장한 응집 비구형 실리카졸을 제조하였다. 이를 산화막 CMP에 적용하여 구형 및 비구형 실리카졸의 입자형상 및 크기에 따른 연마율을 비교하였다. 구형 실리카의 경우, 입자크기가 증가할수록 연마율은 높아졌고, 비구형 실리카졸은 평균입경이 유사한 크기의 구형 실리카 보다 더욱 높은 연마율을 나타내었다.

• 한국환경보건학회지
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• 제25권3호
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• pp.23-28
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• 1999

Phosphate removal through adsorbent, such as activated alumina, powdered aluminum oxide, flyash, blasted furnace slag and other materials, is commonly and widely practiced. The purpose of this study was to improve the removal efficiency of phosphorus in waste sludge earned at seafood processing factories. To investigate the utility and the feasibility of this sludge disposal process, experiment was carried out with a batch process. As a result, phosphate removal appears to increase with increasing adsorbent does, but shows no changes at an adsorbent does over 5g/l. With increasing ratios of initial phosphate concentration to adsorbent does, the amount of removed phosphate is increased while phosphate removal(%) is decreased. Wasted sludge, treated with zinc chloride chemically, represented a better efficiency than the untreated activated sludge and zinc chloride itself, when they reacted with phosphate solution.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2021년도 봄 학술논문 발표대회
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• pp.193-194
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• 2021

Ti-salt agglomerated titanium dioxide photocatalyst from sludge, which has various and excellent functions such as nitrogen oxide removal performance, antifouling performance, and bacteria removal performance, is intended to be applied to UHPC. The UHPC used in this study is supposed to have a high compressive strength of 100~200MPa and a high flowability of 600mm or more with a slump flow. Titanium dioxide is fixed to the UHPC surface by sieving through a test sieve and compaction and painting using a vibration compactor, and this is tested according to ISO 22197-1. The NO removal amount is evaluated by classification the result range.

• Journal of Electrochemical Science and Technology
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• 제3권1호
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• pp.35-43
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• 2012

Highly ordered and perforated anodic aluminum oxide membranes were prepared by anodic oxidation and subsequent removal of the barrier layer. By using these homemade anodic aluminum oxide membranes as templates, metal selenide nanowires and nanotubes were synthesized. The structure and composition of these one-dimensional nanomaterials were studied by field emission scanning electron microscopy as well as transmission electron microscopy and energy dispersive X-ray spectroscopy. The growth process of metal selenide inside anodic aluminum oxide channel was traced by investigating the series of samples using scanning electron microscopy after reacting for different times. Straight and dense copper selenide and silver selenide nanowires with a uniform diameter were successfully prepared. In case of nickel selenide, nanotubes were preferentially formed. Phase and crystallinity of the nanostructured materials were also investigated.

• 한국안전학회지
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• 제1권1호
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• pp.27-32
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• 1986

To remove sulfur dioxide from flue gas by the method of metal oxide, copper powder of average diameter $2.4\mu\textrm{m}$and $51\mu\textrm{m}$ were used in a fixed bed reactor over a, temperature range of $300^{\circ}C-500^{\circ}C$. Copper oxide reacts with sulfur dioxide producing cupric sulfate and it can be regenerated from the latter by using hydrogen or methane. Experimental results showed that the reaction rate was increased by the increase of reaction temperature in the range of $300^{\circ}C-422^{\circ}C$ and the removal efficiency of sulfur dioxide was high in case of small size copper particle. However the removal efficiency was decreased at higher temperature due to decomposition of cupric sulfate. The rate controlling step of this reaction was chemical reaction and deactivating catalysts model can be applied to this reaction. The rate constants for this reaction and deactivation are as follows ： k＝8,367exp(-10,298/RT) Kd＝2.23exp(-8,485/RT)

• Carbon letters
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• 제23권
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• pp.30-37
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• 2017

Dyes are widely used in various industries including textile, cosmetic, paper, plastics, rubber, and coating, and their discharge into waterways causes serious environmental and health problems. Four different carbon nanostructures, graphene oxide, oxidized multi-walled carbon nanotubes, activated carbon and multi-walled carbon nanotubes, were used as adsorbents for the removal of Nile Blue A (NBA) dye from aqueous solution. The four carbon nanostructures were characterized by scanning electron microscope and X-ray diffractometer. The effects of various parameters were investigated. Kinetic adsorption data were analyzed using the first-order model and the pseudo-second-order model. The regression results showed that the adsorption kinetics were more accurately represented by the pseudo-second-order model. The equilibrium data for the aqueous solutions were fitted to Langmuir and Freundlich isotherms, and the equilibrium adsorption of NBA was best described by the Langmuir isotherm model. This is the first research on the removal of dye using four carbon nanostructures adsorbents.

• 한국정밀공학회지
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• 제13권11호
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• pp.46-56
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• 1996

Planarization technique is rapidly recognized as a critical step in chip fabrication due to the increase in wiring density and the trend towards a three dimensional structure. Global planarity requires the preferential removal of the projecting features. Also, the several materials i.e. Si semiconductor, oxide dielectric and sluminum interconnect on the chip, should be removed simultaneously in order to produce a planar surface. This research has investihgated the development of the chemical mechanical polishing(CMP) machine with uniform pressure and velocity mechanism, and the pad insensitive to pattern topography named hard grooved(HG) pad for global planarization. Finally, a successful result of uniformity less than 5% standard deviation in residual oxide film and planarity less than 15nm in residual step height of 4 inch device wafer, is achieved.

• 생명과학회지
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• 제12권5호
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• pp.584-588
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• 2002

Apergillus niger LK의 epoxide hydrolase 활성을 이용하여 chiral styrene oxide를 제조할 수 있는 hollow-fiber 반응기 기반의 비대칭 분할 시스템을 개발하였다. 라세믹 styrene oxide 기질을 dodecane 유기용매에 용해시켜 hollow-fiber 반응기의 lumen 부위로 공급하였으며, 생촉매인 A. niger LK 미세분말은 shell 부위로 공급함으로써 막 표면에서 비대칭 분할 반응을 수행하였다. 반응 산물로 생성되는 phenyl-1,2-ethandiol에 의한 epoxide hydrolase 활성 저해효과를 감소시키기 위하여 2번째 hollow-fiber 반응기에서 완충용액을 이용하여 diol을 추출하여 제거시켰다. 2성분 용매를 사용한 cascade형 hollow-fiber 반응기 시스템을 이용하여 광학적으로 순수한 (ee > 99%) (5)-styrene oxide를 19.5% (이론 수율 대비 39%)의 수율로 얻을 수 있었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.88-89
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• 2009

In this paper, we investigated about wet cleaning effect as deep trench formation methods for Power chip devices. Deep trench structure was classified by two methods, PSU (Poly Stick Up) and Non-PSU structure. In this paper, we could remove residue defect during wet. cleaning after deep trench etch process for non-PSU structure device as to change wet cleaning process condition. V-SEM result showed void image at the trench bottom site due to residue defect and residue component was oxide by EDS analysis. In order to find the reason of happening residue defect, we experimented about various process conditions. So, defect source was that oxide film was re-deposited at trench bottom by changed to hydrophobic property at substrate during hard mask removal process. Therefore, in order to removal residue defect, we added in-situ SCI during hard mask removal process, and defect was removed perfectly. And WLR (Wafer Level Reliability) test result was no difference between normal and optimized process condition.

• 공업화학
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• 제21권3호
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• pp.243-251
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• 2010

연소배가스에 존재하는 질소산화물의 제거를 위해서는 촉매 환원, 흡수, 흡착 등 화학적 기술이 적용되고 있는데, 장기적으로는 환경친화적이고 에너지 소모가 적은 생물학적 공정의 개발 및 이용이 필요하다. 본 논문에서는 연소 배가스에 존재하는 질소산화물을 제거하기 위한 생물학적 공정의 기술동향을 살펴보고 각각의 장단점을 고찰하였다. 질산화와 탈질 기작을 이용하는 박테리아 시스템과 광합성 미세조류를 이용하는 시스템으로 구분하여 기술의 원리와 현재의 기술 수준을 논하였다. 두 경우 모두 처리속도를 높이기 위해서는 불용성의 일산화질소를 일단 적절한 흡수제에 고농도로 포집시킨 후 미생물에 의하여 분해 또는 고정하는 방향이 바람직하며, 배가스 중 $CO_2$와 NOx를 동시에 고정이 가능하고 별도의 탄소원이 요구되지 않는 미세조류의 활용이 기대된다.