• 제목/요약/키워드: oxide removal

검색결과 552건 처리시간 0.024초

콜로이달 실리카 입자 형상에 따른 CMP 특성에 관한 연구 (A Study on CMP Characteristics According to Shape of Colloidal Silica Particles)

  • 김문성;정해도
    • 대한기계학회논문집A
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    • 제38권9호
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    • pp.1037-1041
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    • 2014
  • 반도체 연마용 슬러리를 이온교환법, 가압방법 및 다단계 주입방법으로 제조하여 입자 크기와 형상에 따른 화학적 기계적 연마에 미치는 영향을 연구하였다. 이온교환법을 이용하여 구형의 콜로이달실리카를 크기별로 입자로 제조하였다. 이렇게 제조한 구형의 실리카를 다시 가압방법을 이용해 입자간의 결합을 유도해 비구형의 형상을 가진 콜로이달 실리카를 제조하였고, 이온교환법과 가압방법의 특징을 살려 실리식산을 다단계로 주입하여 입자 표면과 실리식산의 반응으로, 2~3 개의 입자가 결합한 형상의 콜로이달 실리카를 제조하였다. 이렇게 제조한 입자를 CMP 에 적용하여 콜로이달 실리카의 입자 형상에 따른 연마율을 기존의 상용 슬러리와 비교하였다. pH 가 높을수록 연마율은 높아졌고, 입자가 결합한 비구형의 콜로이달 실리카는 가장 높은 연마율과 양호한 비균일도를 나타내었다.

Arsenic Removal from Water Using Various Adsorbents: Magnetic Ion Exchange Resins, Hydrous Ion Oxide Particles, Granular Ferric Hydroxide, Activated Alumina, Sulfur Modified Iron, and Iron Oxide-Coated Microsand

  • Sinha, Shahnawaz;Amy, Gary;Yoon, Yeo-Min;Her, Nam-Guk
    • Environmental Engineering Research
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    • 제16권3호
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    • pp.165-173
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    • 2011
  • The equilibrium and kinetic adsorption of arsenic on six different adsorbents were investigated with one synthetic and four natural types (two surface and two ground) of water. The adsorbents tested included magnetic ion exchange resins (MIEX), hydrous ion oxide particles (HIOPs), granular ferric hydroxide (GFH), activated alumina (AA), sulfur modified iron (SMI), and iron oxide-coated microsand (IOC-M), which have different physicochemical properties (shape, charge, surface area, size, and metal content). The results showed that adsorption equilibriums were achieved within a contact period of 20 min. The optimal doses of adsorbents determined for a given equilibrium concentration of $C_{eq}=10\;{\mu}g/L$ were 500 mg/L for AA and GFH, 520-1,300 mg/L for MIEX, 1,200 mg/L for HIOPs, 2,500 mg/L for SMI, and 7,500 mg/L for IOC-M at a contact time of 60 min. At these optimal doses, the rate constants of the adsorbents were 3.9, 2.6, 2.5, 1.9, 1.8, and 1.6 1/hr for HIOPs, AA, GFH, MIEX, SMI, and IOC-M, respectively. The presence of silicate significantly reduced the arsenic removal efficiency of HIOPs, AA, and GFH, presumably due to the decrease in chemical binding affinity of arsenic in the presence of silicate. Additional experiments with natural types of water showed that, with the exception of IOC-M, the adsorbents had lower adsorption capacities in ground water than with surface and deionized water, in which the adsorption capacities decreased by approximately 60-95%.

4급화 폴리페닐렌 옥시드 코팅을 통한 축전식 탈이온 성능 향상 (Improvement of Capacitive Deionization Performance by Coating Quaternized Poly(phenylene oxide))

  • 김도형;강문성
    • 멤브레인
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    • 제24권4호
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    • pp.332-339
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    • 2014
  • 본 연구에서는 축전식 탈이온 공정(capacitive deionization, CDI)의 성능을 개선하기 위해 poly(2,6-dimethyl-1,4-phenylene oxide) (PPO)를 기저물질로 이용하여 코팅이 가능한 음이온교환 이오노머(quaternized PPO, QPPO) 용액을 제조하였다. 제조된 QPPO는 상용 음이온교환막(AMX, Astom Corp., Japan) 대비 우수한 이온전도도 특성을 나타내었으며 전기화학적 특성 또한 동등 수준임을 확인할 수 있었다. 다공성 탄소 전극에 이오노머 용액을 코팅하여 CDI 성능평가를 수행하였으며 그 결과 약 94.9%의 높은 염 제거 효율을 나타내었다. 기존의 CDI와 상용 음이온교환막을 결합한 membrane CDI (MCDI), QPPO가 코팅된 전극을 사용한 coated CDI (CCDI)의 탈염 성능을 비교한 결과 QPPO의 높은 이온선택성 및 낮은 이온 전달저항으로 CCDI가 기존의 CDI에 비해 52.1%, MCDI에 비해 18.3% 향상된 높은 염 제거 성능을 나타냄을 확인하였다.

유전체 방전 플라즈마 공정에 의한 일산화질소 제거 공정 모델링 (Modeling of Dielectric Barrier Discharge Plasma Process for the Removal of Nitric Oxide)

  • 목영선
    • 한국산업융합학회 논문집
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    • 제6권4호
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    • pp.277-289
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    • 2003
  • This study proposes a mathematical model to characterize the removal of nitrogen oxides in a dielectric barrier discharge plasma process. As well as the reactions between nitrogen oxides, water vapor, oxygen and nitrogen, the model takes into account the effect of ethylene often used as a chemical additive to reduce the power consumption of the process on the removal of nitrogen oxides. Since the concentrations of the radicals concerned in the main reactions including O, OH, H and N should be calculated to predict the removal efficiency of nitrogen oxides, they were theoretically derived. The parameters affecting the removal of nitrogen oxides, such as initial concentration, discharge power, humidity, and ethylene concentration were experimentally evaluated, which were compared with the calculated results to verify the validity of the model proposed. The predicted concentrations of several byproducts formed in this process were also presented and discussed. The effects of several parameters mentioned above on the removal of nitrogen oxides were reasonable described by the proposed model.

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The Effect of Mechanical Properties of Polishing Pads on Oxide CMP(Chemical Mechanical Planarization)

  • Hong, Yi-Koan;Eom, Dae-Hong;Kang, Young-Jae;Park, Jin-Goo;Kim, Jae-Seok;Kim, Geon;Lee, Ju-Yeol;Park, In-Ha
    • KSTLE International Journal
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    • 제5권1호
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    • pp.32-35
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    • 2004
  • The purpose of this study is to investigate the effects of the structure and mechanical properties of laser-processed pads on their polishing behavior such as their removal rate and WIWNU (within wafer non-uniformity) during the chemical mechanical planarization (CMP) process. The holes on the pad acted as the reservoir of slurry particles and enhanced the removal rate. Without grooves, no effective removal of wafers was possible. When the length of the circular-type grooves was increased, higher removal rates and lower wafer non-uniformity were measured. The removal rate and non-uniformity linearly increased as the elastic modulus of the top pad increased. Higher removal rates and lower non-uniformity were measured as the hardness of the pad increased.

Dissolution Characteristics of Copper Oxide in Gas-liquid Hybrid Atmospheric Pressure Plasma Reactor Using Organic Acid Solution

  • Kwon, Heoung Su;Lee, Won Gyu
    • 공업화학
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    • 제33권2호
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    • pp.229-233
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    • 2022
  • In this study, a gas-liquid hybrid atmospheric pressure plasma reactor of the dielectric barrier discharge method was fabricated and characterized. The solubility of copper oxide in the organic acid solution was increased when argon having a larger atomic weight than helium was used during plasma discharge. There was no significant effect of mixing organic acid solutions under plasma discharge treatment on the variation of copper oxide's solubility. As the applied voltage for plasma discharge and the concentration of the organic acid solution increased, the dissolution and removal power of the copper oxide layer increased. Solubility of copper oxide was more affected by the concentration in organic acid solution rather than the variation of plasma applied voltage. The usefulness of hybrid plasma reactor for the surface cleaning process was confirmed.

Removal of arsenic from aqueous phase using magnetized activated carbon and magnetic separation

  • Kwon, H.W.;Shin, T.C.;Kim, J.J.;Ha, D.W.;Kim, Min Gyu;Kim, Young-Hun
    • 한국초전도ㆍ저온공학회논문지
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    • 제20권2호
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    • pp.1-5
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    • 2018
  • Arsenic (As) is one of the elements having most harmful impact on the human health. Arsenic is a known carcinogen and arsenic contamination of drinking water is affecting on humans in many regions of the world. Adsorption has been proved most preferable technique for the removal of arsenic. Many researchers have studied various types of solid materials as arsenic adsorbent, and iron oxide and its modified forms are considered as the most effective adsorbent in terms of adsorption capacity, recovery, and economics. However, most of all iron oxides have small surface area in comparing with common adsorbents in environmental application such as activated carbon but the activated carbon has weak sorption affinity for arsenic. We have used an activated carbon as base adsorbent and iron oxide coating on the activated carbon as high affinity sorption sites and giving magnetic attraction ability. In this study, adsorption properties of arsenic and magnetic separation efficiency of the magnetized activated carbon (MAC) were evaluated with variable iron oxide content. As the iron oxide content of the MAC increased, adsorption capacity has also gradually increased up to a point where clogging by iron oxide in the pore of activated carbon compensate the increased sorption capacity. The increase of iron oxide content of the MAC also affected magnetic properties, which resulted in greater magnetic separation efficiency. Current results show that magnetically modified common adsorbent can be an efficiency improved adsorbent and a feasible environmental process if it is combined with the magnetic separation.

철 환원 박테리아에 의한 산화철의 환원과 환원된 철을 이용한 TCE 제거에 관한 연구 (Microbial Reduction of Iron Oxides and Removal of TCE using the Iron Reduced by Iron Reducing Bacteria)

  • 신화영;박재우
    • 대한환경공학회지
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    • 제27권2호
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    • pp.123-129
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    • 2005
  • 철을 이용한 반응벽체 (permeable reactive barrier, PRBs) 기술은 유기 화합물로 오염된 지하수를 환원적 반응에 의해 정화시키는 공법이다. 벽체의 매질로 주로 사용되는 영가 철은 반응이 진행됨에 따라 점차 2가 및 3가 철로 산화되어 제거능이 점차 저감된다. 자연계에 존재하거나 동정된 철 환원 박테리아는 산화된 Fe(III)를 Fe(II)로 환원시키는 능력을 가지고 있으며 이와 같이 환원된 Fe(II)는 반응 표면적을 넓히고 다시 할로겐 유기 화합물을 환원적으로 제거할 수 있도록 한다. 본 연구는 철 환원 박테리아로 순수균인 Shewanella algae BrY에 의한 산화철의 환원 경향을 aqueous phase와 solid phase로 나누어 관찰하고 환원된 철이 TCE 제거에 미치는 영향을 iron(II,III) oxide와 iron(III) oxide를 대상으로 하여 파악하는 것을 목표로 하였다. 박테리아는 배지 내에 존재하는 Fe(III)를 우선적으로 사용하여 Fe(II)로 환원시켰으며 선택성은 떨어지지만 입자상의 산화철 표면에 존재하는 Fe(III)도 환원시켰다. 또한 동량의 산화철이 존재할 때 iron(II,III) oxide에 비해 박테리아가 전자수용체로 사용할 수 있는 Fe(III)가 풍부한 iron(III) oxide의 환원이 더 잘 일어남을 알 수 있었고, 환원된 Fe(II)는 박테리아 또는 다른 철 산화물과 침전을 형성하였으며 TCE와의 반응속도 및 제거 능력을 향상시키는 것으로 판단된다.