• Title/Summary/Keyword: oxide

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Properties of the interfacial oxide and high-k dielectrics in $HfO_2/Si$ system ($HfO_2/Si$시스템의 계면산화막 및 고유전박막의 특성연구)

  • 남서은;남석우;유정호;고대홍
    • Proceedings of the Korea Crystallographic Association Conference
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    • 2002.11a
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    • pp.45-47
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    • 2002
  • 반도체 소자의 고집적화 및 고속화가 요구됨에 따라 MOSFET 구조의 게이트 절연막으로 사용되고 있는 SiO₂ 박막의 두께를 감소시키려는 노력이 이루어지고 있다. 0.1㎛ 이하의 소자를 위해서는 15Å 이하의 두께를 갖는 SiO₂가 요구된다. 하지만 두께감소는 절연체의 두께와 지수적인 관계가 있는 누설전류를 증가시킨다[1-3]. 따라서 같은 게이트 개패시턴스를 유지하면서 누설전류를 감소시키기 위해서는 높은 유전상수를 갖는 두꺼운 박막이 요구되는 것이다. 그러므로 약 25정도의 높은 유전상수를 갖고 5.2~7.8 eV 정도의 비교적 높은 bandgap을 갖으며, 실리콘과 열역학적으로 안정한 물질로 알려진 HfO2[4-5]가 최근 큰 관심을 끌고 있다. 본 연구에서는 HfO₂ 박막을 실제 소자에 적용하기 위하여 전극 및 열처리에 따른 HfO₂ 박막의 미세구조 및 전기적 특성에 관한 연구를 수행하였다. 이를 위해, HfO₂ 박막을 reactive DC magnetron sputtering 방법으로 증착하고, XRD, TEM, XPS를 사용하여 ZrO₂ 박막의 미세구조를 관찰하였으며, MOS 캐패시터 구조의 C-V 및 I-V 특성을 측정하여 HfO₂ 박막의 전기적 특성을 관찰하였다. HfO₂ 타겟을 스퍼터링하면 Ar 스퍼터링에 의해 에너지를 가진 산소가 기판에 스퍼터링되어 Si 기판과 반응하기 때문에 HfO₂ 박막 형성과 더불어 Si 기판이 산화된다[6]. 그래서 HfO₂같은 금속 산화물 타겟 대신에 순수 금속인 Hf 타겟을 사용하고 반응성 기체로 O₂를 유입시켜 타겟이나 시편위에서 high-k 산화물을 만들면 SiO/sub X/ 계면층을 제어할 수 있다. 이때 저유전율을 갖는 계면층은 증착과 열처리 과정에서 형성되고 특히 500℃ 이상에서 high-k/Si를 열처리하면 계면 SiO₂층은 증가하는 데, 이것은 산소가 HfO₂의 high-k 박막층을 뚫고 확산하여 Si 기판을 급속히 산화시키기 때문이다. 본 방법은 증착에 앞서 Si 표면을 희석된 HF를 이용해 자연 산화막과 오염원을 제거한 후 Hf 금속층과 HfO₂ 박막을 직류 스퍼터링으로 증착하였다. 우선 Hf 긍속층이 Ar 가스 만의 분위기에서 증착되고 난 후 공기중에 노출되지 않고 연속으로 Ar/O₂ 가스 혼합 분위기에서 반응 스퍼터링 방법으로 HfO₂를 형성하였다. 일반적으로 Si 기판의 표면 위에 자연적으로 생기는 비정질 자연 산화막의 두께는 10~15Å이다. 그러나 Hf을 증착한 후 단면 TEM으로 HfO₂/Si 계면을 관찰하면 자연 산화막이 Hf 환원으로 제거되기 때문에 비정질 SiO₂ 층은 관찰되지 않았다. 본 실험에서는 HfO2의 두께를 고정하고 Hf층의 두께를 변수로 한 게이트 stack의 물리적 특성을 살펴보았다. 선증착되는 Hf 금속층을 0, 10, 25Å의 두께 (TEM 기준으로 한 실제 물리적 두께) 로 증착시키고 미세구조를 관찰하였다. Fig. 1(a)에서 볼 수 있듯이 Hf 금속층의 두께가 0Å일때 13Å의 HfO₂를 반응성 스퍼터링 방법으로 증착하면 HfO₂와 Si 기판 사이에는 25Å의 계면층이 생기며, 이것은 Ar/O₂의 혼합 분위기에서의 스퍼터링으로 인한 Si-rich 산화막 또는 SiO₂ 박막일 것이다. Hf 금속층의 두께를 증가시키면 계면층의 성장은 억제되는데 25Å의 Hf 금속을 증착시키면 HfO₂ 계면층은 10Å미만으로 관찰된다. 그러므로 Hf 금속층이 충분히 얇으면 플라즈마내 산소 라디칼, 이온, 그리고 분자가 HfO₂ 층을 뚫고 Si 기판으로 확산되어 SiO₂의 계면층을 성장시키고 Hf 금속층이 두꺼우면 SiO/sub X/ 계면층을 환원시키면서 Si 기판으로의 산소의 확산은 막기 때문에 계면층의 성장은 억제된다. 따라서 HfO₂/Hf(Variable)/Si 계에서 HfO₂ 박막이 Si 기판위에 직접 증착되면, 순수 HfO₂ 박막의 두께보다 높은 CET값을 보이고 Hf 금속층의 두께를 증가시키면 CET는 급격하게 감소한다. 그러므로 HfO₂/Hf 박막의 유효 유전율은 단순 반응성 스퍼터링에 의해 형성된 HfO₂ 박막의 유전율보다 크다. Fig. 2에서 볼 수 있듯이 Hf 금속층이 너무 얇으면 계면층의 두께가 두꺼워 지고 Hf 금속층이 두꺼우면 HfO₂층의 물리적 두께가 두꺼워지므로 CET나 EOT 곡선은 U자 형태를 그린다. Fig. 3에서 Hf 10초 (THf=25Å) 에서 정전 용량이 최대가 되고 CET가 20Å 이상일 때는 high-k 두께를 제어해야 하지만 20Å 미만의 두께를 유지하려면 계면층의 두께를 제어해야 한다.

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Sargassum sp. Attenuates Oxidative Stress and Suppresses Lipid Accumulation in vitro (모자반추출물의 항산화활성 및 지방세포 생성억제 효과)

  • Kim, Jung-Ae;Karadeniz, Fatih;Ahn, Byul-Nim;Kwon, Myeong Sook;Mun, Ok-Ju;Kim, Mihyang;Lee, Sang-Hyeon;Yu, Ki Hwan;Kim, Yuck Yong;Kong, Chang-Suk
    • Journal of Life Science
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    • v.24 no.3
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    • pp.274-283
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    • 2014
  • Oxidative stress causes tissue damage and facilitates the progression of metabolic diseases, including diabetes, cardiovascular heart diseases, and obesity. Lipid accumulation and obesity-related complications have been observed in the presence of extensive oxidative stress. As part of an ongoing study to develop therapeutic supplements, Sargassum sp. were tested for their ability to scavenge free radicals and intracellular reactive oxygen species (ROS), as well as to suppress lipid accumulation. Three species, S. hemiphyllum, S. thunbergii, and Sargassum horneri, were shown to scavenge free radicals in a di(phenyl)-(2,4,6-trinitrophenyl)iminoazanium (DPPH) assay. In addition, Sargassum sp. was shown to scavenge intracellular ROS and to decrease nitric oxide (NO) production in $H_2O_2$ and lipopolysaccharide (LPS)-induced in RAW264.7 mouse macrophages, respectively. Taken together, the results suggest that Sargassum sp. possess huge potential to relieve oxidative stress and related complications, as well as lipid-induced oxidation. They indicate that S. hemiphyllum, S. thunbergii, and S. horneri are potent functional supplements that can produce beneficial health effects through antioxidant and antiobesity activities, with S. hemiphyllum being the most potent among the Sargassum sp. tested. A potential mechanism for the effect of Sargassum sp. on the suppression of lipid accumulation in differentiating 3T3-L1 mouse preadipocytes through deactivation of the peroxisome proliferator-activated receptor ${\gamma}$ (PPAR ${\gamma}$) is presented.

Antioxidant and Anti-inflammatory Activities of Functional Plant Materials (항산화 및 면역 활성 증강을 위한 생약재의 탐색)

  • Lee, Soo-Jung;Shin, Jung-Hye;Lee, Hye-Jin;Tak, Hyun-Min;Kang, Min-Jung;Sung, Nak-Ju
    • Journal of Life Science
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    • v.23 no.7
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    • pp.869-878
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    • 2013
  • Eleven functional plant materials were identified via a literature search, and their antioxidant capacity and inhibitory effects on lipopolysaccharide (LPS)-induced nitric oxide (NO) production in RAW264.7 cells were tested. Yields from hot water extracts of the materials were the highest (52.10%) in Lycii fructus, and the yields from Phellinus linteus were the lowest (5.7%). The yields of another were 14.50-42.47%. Total phenol and flavonoids contents were the highest in P. linteus. The $EC_{50}$ values for DPPH and ABTS radical scavenging activities were lower than $100{\mu}g/ml$ for Salvia miltiorrhiza, whereas the values for P. linteus, Scutellaria baicalensis, and Paeonia lactiflora were $100-200{\mu}g/ml$. The $EC_{50}$ value for the superoxide anion radical scavenging activity of all the extracts was higher than $300{\mu}g/ml$. P. linteus for the reducing power was shown the highest activity. $Fe^{2+}$ chelating activity was the highest in the Morus alba extract. In an MTT assay, the cell viability of the RAW264.7 LPS-exposed cells was above 80% in extracts of $50{\mu}g/ml$ and above 77% in extracts of $100{\mu}g/ml$ in all the plant materials except Acanthopanax sessiliflorum. NO production in the RAW264.7 LPS-exposed cells showed a 12-fold increase compared to the control. The NO production level of all the extracts was $6.86-26.18{\mu}M$. Notably, $100{\mu}g/ml$ of S. baicalensis extract showed a remarkable decrease in NO production (72%) compared with the control. The potent antioxidant and anti-inflammatory activities of S.baicalensis, P. linteus, S. miltiorrhiza, M. alba, and P. lactiflora suggest that they are potential candidates as functional materials.

Growth-promoting Effect of New Iron-chelating Fertilizer on Lettuce (산세수와 게껍질을 이용한 신기능성 철분 비료의 상추 생육 촉진 효과)

  • Hwang, Ji Young;Jun, Sang Eun;Park, Nam-Jo;Oh, Ju Sung;Lee, Yong Jik;Sohn, Eun Ju;Kim, Gyung-Tae
    • Journal of Life Science
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    • v.27 no.4
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    • pp.390-397
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    • 2017
  • Iron (Fe) is an important micronutrient for the health and growth of plants. Iron is usually provided by fertilizers, and iron-chelate fertilizers are well absorbed by plants. This study presents the plant growth-promoting effects of a new functional iron fertilizer, Fe-chelating crab shell powder (FCSP), which is generated from the chelation of Fe ions with crab shell powder. Iron chelate was derived from spent pickling liquor, which is rich in reductive iron, iron(II) oxide. To analyze the effects of FCSP on plant growth, we treated lettuce with several concentrations of FCSP in both lab- and field-scale experiments. In the lab-scale test, the treatment of 50 ppm of FCSP highly promoted growth and resulted in increases in the size, weight, number and chlorophylls content of leaves of plants compared to the treatment of crab shell powder. Fifty ppm of FCSP also increased the size and weight of leaves up to 2 times compared to the application of chemical fertilizer and/or compost in field conditions. In addition, the FCSP treatment resulted in the highest ion uptake of Fe in lettuce leaves. Moreover, FCSP led to increases in the amounts of Fe, Ca, available phosphorus and organic matter in treated soil, indicating that soil quality was improved. Taken together, our results demonstrate that FCSP promotes lettuce growth via enhancement of Fe availability and improves soil quality. Therefore, FCSP can be utilized as a new functional iron fertilizer.

Study on Adsorption Characteristics of Arsenic on Magnetite (자철석의 비소에 대한 흡착특성 연구)

  • Jeong, Hyeon-Su;Lee, Woo-Chun;Cho, Hyen-Goo;Kim, Soon-Oh
    • Journal of the Mineralogical Society of Korea
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    • v.21 no.4
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    • pp.425-434
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    • 2008
  • Arsenic contamination in soil and groundwater has recently been one of the most serious environmental concerns. This arsenic contamination can be originated from natural or anthropogenic sources. It has been well known that arsenic behavior in geo-environmental is controlled by various oxides or hydroxides, such as those of iron, manganese, and aluminum, and clay minerals. Among those, particularly, iron (oxy)hydroxides are the most effective scavengers for arsenic. For this reason, this study characterized arsenic adsorption of magnetite which is a kind of iron oxide in nature. The physicochemcial features of the magnetite were investigated to evaluate adsorption of arsenite [As(III)] and arsenate [As(V)] onto magnetite. In addition to experiments on adsorption equilibria, kinetic experiments were also conducted. The point of zero charge (PZC) and specific surface area of the laboratory-synthesized magnetite used as an arsenic adsorbent were measured 6.56 and $16.6\;g/m^2$, which values seem to be relatively smaller than those of the other iron (oxy)hydroxides. From the results of equilibria experiments, arsenite was much more adsorbed onto magnetite than arsenate, indicating the affinity of arsenite on magnetite is larger than arsenate. Arsenite and arsenate showed adsorption maxima at pHs 7 and 2, respectively. In particular, adsorption of arsenate decreased with increase in pH as a result of electrical repulsion caused by anionic arsenate and negatively-charged surface of magnetite. These results indicate that the surface charge of magnetite and the chemical speciation of arsenic should be considered as the most crucial factors in controlling arsenic. The results of kinetic experiments show that arsenate was adsorbed more quickly than arsenite and adsorption of arsenic was investigated to be mostly completed within the duration of 4 hours, regardless of chemical speciation of arsenic. When the results of kinetic experiments were fitted to a variety of kinetic models proposed so far, power function and elovich model were evaluated to be the most suitable ones which can simulate adsorption kinetics of two kinds of arsenic species onto magnetite.

Investigation on Characteristics of High PM2.5 Pollution Occurred during October 2015 in Gwangju (광주 지역에서 2015년 10월에 발생한 PM2.5 고농도 사례 특성 분석)

  • Yu, Geun-Hye;Park, Seung-Shik;Jung, Sun A;Jo, Mi Ra;Lim, Yong Jae;Shin, Hye Jung;Lee, Sang Bo;Ghim, Young Sung
    • Journal of Korean Society for Atmospheric Environment
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    • v.34 no.4
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    • pp.567-587
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    • 2018
  • A severe haze event occurred in October 2015 in Gwangju, Korea. In this study, the driving chemical species and the formation mechanisms of $PM_{2.5}$ pollution were investigated to better understand the haze event. Hourly concentrations of $PM_{2.5}$, organic and elemental carbon, water-soluble ions, and elemental constituents were measured at the air quality intensive monitoring station in Gwangju. The haze event occurred was attributed to a significant contribution (72.3%) of secondary inorganic species concentration to the $PM_{2.5}$, along with the contribution of organic aerosols that were strongly attributed to traffic emissions over the study site. MODIS images, weather charts, and air mass backward trajectories supported the significant impact of long-range transportation (LTP) of aerosol particles from northeastern China on haze formation over Gwangju in October 2015. The driving factor for the haze formation was stagnant atmospheric flows around the Korean peninsula, and high relative humidity (RH) promoted the haze formation at the site. Under the high RH conditions, $SO{_4}^{2-}$ and $NO_3{^-}$ were mainly produced through the heterogenous aqueous-phase reactions of $SO_2$ and $NO_2$, respectively. Moreover, hourly $O_3$ concentration during the study period was highly elevated, with hourly peaks ranging from 79 to 95ppb, suggesting that photochemical reaction was a possible formation process of secondary aerosols. Over the $PM_{2.5}$ pollution, behavior and formation of secondary ionic species varied with the difference in the impact of LTP. Prior to October 19 when the influence of LTP was low, increasing rate in $NO_3{^-}$ was greater than that in $NO_2$, but both $SO_2$ and $SO{_4}^{2-}$ had similar increasing rates. While, after October 20 when the impact of haze by LTP was significant, $SO{_4}^{2-}$ and $NO_3{^-}$ concentrations increased significantly more than their gaseous precursors, but with greater increasing rate of $NO_3{^-}$. These results suggest the enhanced secondary transformation of $SO_2$ and $NO_2$ during the haze event. Overall, the result from the study suggests that control of anthropogenic combustion sources including vehicle emissions is needed to reduce the high levels of nitrogen oxide and $NO_3{^-}$ and the high $PM_{2.5}$ pollution occurred over fall season in Gwangju.

Effect of Phenolic Mediators and Humic Acid on the Removal of 1-Indanone Using Manganese Oxide (망간산화물(Birnessite)을 이용한 1- Indanone 제거 시 페놀계 반응매개체와 휴믹산(HA) 영향 평가)

  • Choi, Chan-Kyu;Eom, Won-Suk;Shin, Hyun-Sang
    • Journal of Korean Society of Environmental Engineers
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    • v.34 no.7
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    • pp.445-453
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    • 2012
  • An investigation for removal of 1-indanone (1-ID), which were commonly produced from the biological and/or chemical treatment and natural weathering of the PAHs-contaminated soils, via oxidative transformation mediated by birnessite in the presence of various phenolic mediators is described. This study also examines the potential effect of the natural occurring substance humic acid (HA) on the oxidative transformation. The experiment was carried out in aqueous phase as a batch test (10 mg/L 1-ID, 0.3 mM phenolic mediators, $1.0g/L\;{\delta}-MnO_2$, at pH 5). All of the 11 tested phenoilic mediators belong to the group of natural occurring phenols and are widely used as model constituents of humic substances. From the results of HPLC analysis, it is demonstrated that 1-ID was not reactive to birnessite itself, but it can be effectively removed in birnessite-mediated cross coupling reactions in the presence of the phenolic mediators. The percent removals of 1-ID after 2 day incubation were ranged from 9.2 to 71.2% depending on the phenolic mediators applied. The initial rate constant ($K_{int}$, $hr^{-1}$) values for the 1-ID removals obtained from the pseudo-first-order kinetic plots also widely ranged from 0.18 to 15.0. Results of the correlative analysis between the removal efficiencies and structural characteristics of phenolic mediators indicate that the transformation of the 1-ID was considerably enhanced by the addition of electron-donating substituents (e.g., -OH, $-OCH_3$) at the benzne ring, and much less enhanced by the addition of electron-withdrawing substituents (e.g., -COOH, -CHO). The presence of HA showed that removal efficiencies of 1-ID in the birnessite-phenolic mediator systems decreased with increasing HA concentrations. However at low concentration of HA (< 2 mg/L), it caused some enhancement in the removals of 1-ID as compared to the control.

Calcination Condition for Recovery of Calcium from Cuttle Bone and Characteristics of Calcined Cuttle Bone Powder (갑오징어갑으로부터 칼슘의 회수조건 및 소성 칼슘의 특성)

  • CHO Moon-Lae;HEU Min-Soo;KIM Jin-Soo
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.34 no.6
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    • pp.600-604
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    • 2001
  • For the effective utilization of cuttle bone as a calcium powder, we examined calcination condition ($700^{\circ}C: 0\sim10\;hrs,\;800^{\circ}C:\;0\sim3\;hrs,\;900^{\circ}C:\;0\sim1\;hr\;and\;1,000^{\circ}C:\;0\sim30\;mins$) for recovery of calcium from raw cuttle bone powder (RCB) and characteristics of calcined cuttle bone powder (CCB) treated by optimal condition. During calcination of RCB, the yields was decreased, while total and soluble calcium contents and white index were increased up to constant calcination time ($8\;hrs\;at\;700^{\circ}C,\;2\;hrs\;at\;800^{\circ}C,\;45\;min\;at\;900^{\circ}C\;and\;20\;min\;at\;1,000^{\circ}C$). But, these after that almost unchanged. From these results, the optimal calcination conditions for recovery of calcium from RCB were revealed $8\;hrs\;at\;700^{\circ}C,\;2\;hrs\;at\;800^{\circ}C,\;45\;min\;at\;900^{\circ}C\;and\;20\;min\;at\;1,000^{\circ}C$. In the case of CCB treated for 2 hrs at $800^{\circ}C$, total calcium was about $70\%$, the major component was calcium oxide, and the structure consisted of porosity. The calcium solubility of CCB increased by 22 times compared to RCB. But, the pH of RCB was about 12.9. Therefore, for the effective utilization of RCB as a calcium powder, it requires a suitable modification operation for adjustment of pH ($pH\;2.0\~9.0$).

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Changes in Pood Components of Top Shell, Omphalius pfeifferi capenteri by Thermal Processing at High Temperature (고온가열처리에 의한 바다방석고둥 (Omphalius pfeifferi capenteri)의 식품성분 변화)

  • Ha Jin Hwan;Song Dae Jin;Kim Poong Ho;Heu Min Soo;Cho Moon Lae;Sim Hyo Do;Kim Hey Suk;Kim Jin Soo
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.35 no.2
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    • pp.166-172
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    • 2002
  • The top shell, Omphalius pfeifferi capenteri meat vacuum-packed in can (diameter$\times$height, 74.1mm$\times$50.7mm) were heated at 115$^{\circ}C$ up to $F_0$ values of 5 min, 10 min, 15 min and 20 min, and the changes in food components were studied. After 14 days storage at 37$^{\circ}C$ and 55$^{\circ}C$, no growth of microorganism and panelling were recognized from the canned meats which were sterlized at 115$^{\circ}C$ with $F_0$ value of S min and over. In the case of proximate composition of the canned meats, the moisture content decreased with the increase of $F_0$ value, while crude protein increased. The increase of volatile basic nitrogen content, pH and degree of browning and the decrease of mineral, total amino acid, free amino acid, trimethylamine oxide, total creatinine contents and yields were observed during thermal processing, In sensory evaluation on color, texture and taste in the canned meats, no significant difference was observed among a boiled sample and the canned meats heated at re value of 10 min and below. But, in the canned meats heated at $F_0$ value of over 15 min, its sensory scores decreased with the increase of $F_0$ value. From these results, the reasonable $F_0$ value for preparation of the heat-treated top shell meats was in the range of 5$\~$10 min.

Cytotoxicity and Genotoxicity of Newly Developed Calcium Phosphate-based Root Canal Sealers (신개발 인산칼슘계 근관 봉함재의 세포독성 및 유전독성에 관한 연구)

  • Kim, Hee-Jung;Baek, Seung-Ho;Bae, Kwang-Shik
    • Restorative Dentistry and Endodontics
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    • v.31 no.1
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    • pp.36-49
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    • 2006
  • The purpose of this study was to compare the cytotoxicity by MTT test and genotoxicity by Ames test of new calcium phosphate-based root canal sealers (CAPSEAL I, CAPSEAL II) with commercially available resin-based sealers (AH 26, AH Plus) , zinc oxide eugenol-based sealers (Tubliseal EWT, Pulp Canal Sealer EWT), calcium hydroxide-based sealer (Sealapex), and tricalcium phosphate based sealers (Sankin Apatite Root Canal Sealer I, II, III). According to this study, the results were as follows : 1. The extracts of freshly mixed group showed higher toxicity than those of 24 h set group in MTT assay (p<0.001). 2. CAPSEAL I and CAPSEAL II were less cytotoxic than AH 26, AH Plus, Tubliseal EWT, Pulp Canal Sealer EWT Sealapex and SARCS II in freshly mixed group (p<0.01). 3. AH 26 in freshly mixed group showed mutagenicity to TA98 and TA100 with and without S9 mix and AH Plus extracts also were mutagenic to TA100 with and without S9 mix. 4. Tubliseal EWT, Pulp Canal Sealer EWT and Sealapex in freshly mixed group were mutagenic to TA100 with S9 mix. 5. Among those of 24 h set groups the extracts of SARCS II were mutagenic to TA98 with and without S9 mix and AH 26 showed mutagenic effects to TA98 with S9 mix. 6. No mutagenic effect of CAPSEAL I and CAPSEAL II was detected. 7. There is no statistically significant difference between CAPSEAL I and CAPSEAL II at MTT assay and Ames test in both freshly mixed group and 24 h set group.