• Title/Summary/Keyword: oxidation layer

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증착방법을 달리한 $TiO_2$ 박막의 표면처리에 따른 저항변화 특성 연구

  • Seong, Yong-Heon;Kim, Sang-Yeon;Do, Gi-Hun;Seo, Dong-Chan;Jo, Man-Ho;Go, Dae-Hong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.206-206
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    • 2010
  • 정보화 기술이 급속히 발전함에 따라서 보다 많은 양의 data를 전송, 처리, 저장 하게 되면서 이를 처리 할 수 있는 대용량, 고속, 비휘발성의 차세대 메모리의 개발이 요구 되고 있다. 이 중 저항 변화 메모리(ReRAM)는 일반적으로 전이금속산화물을 이용한 MIM 구조로서 적당한 전기 신호를 가하면 저항이 높아서 전도되지 않는 상태(Off state)에서 저항이 낮아져 전도가 가능한 상태(On state)로 바뀌는 메모리 특성을 가진다. ReRAM은 비휘발성 메모리이며 종래의 비휘발성 기억소자인 Flash memory 보다 access time이 $10^5$배 이상 빠르며, 2~5V 이하의 낮은 전압에서 동작이 가능하다. 또한 구조가 간단하여 공정상의 결함을 현저히 줄일 수 있다는 점 등 많은 장점들이 있어서 Flash memory를 대체할 수 있는 유력한 후보로 여겨지고 있다. 저항 변화의 특징을 잘 나타내는 물질에는 $TiO_2$, $Al_2O_3$, $NiO_2$, $HfO_2$, $ZrO_2$등의 많은 전이금속산화물들이 있다. 본 연구에서는 Reactive DC-magnetron Sputtering 방법과 DC-magnetron sputter를 이용하여 Ti를 증착한 후 Oxidation 방법으로 각각 증착한 $TiO_2$박막을 사용하여 저항변화특성을 관찰하였다. $TiO_2$상부에 Atomic Layer Deposition (ALD)를 이용하여 $HfO_2$ 박막을 증착하여 표면처리를 하고, 또한 $TiO_2$에 다른 전이 금속박막 층을 추가 증착하여 저항변화 특성에 접합한 조건을 찾는 연구를 진행하였다. 하부 전극과 상부 전극 물질로는 Si 100 wafer 위에 Pt 또는 TiN을 사용하였다. 저항변화 특성을 평가하기 위해 Agilent E5270B를 이용하여 current-voltage (I-V)를 측정하였다. X-ray Diffraction (XRD)를 이용하여 증착 된 전기금속 박막 물질의 결정성을 관찰했으며, Atomic Force Microscopy (AFM)을 이용하여 증착 된 샘플의 표면을 관찰했다. SEM과 TEM을 통해서는 sample의 미세구조를 확인 하였다.

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RTA Post-treatment of Thermal T${a_2}{O_5}$ Thin Films (열산화 T${a_2}{O_5}$박막에 미치는 RTA후처리의 영향)

  • Mun, Hwan-Seong;Lee, Jae-Seok;Han, Seong-Uk;Park, Sang-Gyun;Yang, Seung-Ji;Lee, Jae-Cheon;Park, Jong-Wan
    • Korean Journal of Materials Research
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    • v.3 no.3
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    • pp.310-315
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    • 1993
  • The effects of RT A treatment on the breakdown strengths were studied for tantalum pentoxide(${Ta_2}{O_5}$) films prepared by thermal oxidation of dc-sputtered Ta(400$\AA$) on p-type (100) Si wafer. While the relative dielectric constants of the RT A -treated specimens were not remarkably affected, the breakdown strengths of the RTA-treated specimens were greatly changed by RTA temperature and time. After the RTA treatment, the breakdown strengths of the specimens RTA-treated at the temperature below the crystallization temperature were increased to 5.4MV /cm, while those of the specimens RTA -treated at the temperature above it were decreased to 0.5MV /cm. RTA time-independence of the flat-bant voltage shift refleted that the RT A post-annealing effects on the breakdown strengths were not due to the interface reaction between the ${Ta_2}{O_5}$ layer and the Si substrate but, through the RBS analysis, to densification of the ${Ta_2}{O_5}$ films.

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Influence of Anodic Oxidation Film Formed on Titanium onto Cell Attachment and Proliferation (양극 산화에 의해 티타늄 표면에 형성된 산화 피막이 세포 부착 및 성장에 미치는 영향)

  • Noh, Se-Ra;Lee, Yong-Ryeol;Song, Ho-Jun;Park, Yeong-Joon
    • Korean Journal of Materials Research
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    • v.16 no.10
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    • pp.606-613
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    • 2006
  • This study was purposed to evaluate the influence of anodically oxidized film on titanium (Ti) onto MG-63 osteoblast-like cell attachment and activity. Only scratch lines created by polishing were seen in ASR and ANO-1 groups. About $1.5{\mu}m$-thick homogeneous oxide film which has pores of about $0.5{\mu}m$ diameter were formed in ANO-12. The crystalline structure of the oxide films formed by anodization in phosphoric acid electrolyte was $TiP_2O_7$. The total protein amounts of ANO-1 and ANO-12 groups showed higher values of maximum protein amount than that of AS-R group. At 3 days of incubation, total protein amount showed higher value in ANO-2 when comparing to that of AS-R (p<0.05). Based on the results of ALPase activity test, the degree of MG-63 cell differentiation for initial mineralization matrix formation was similar. For all the test groups after 1 day of incubation, MG-63 cells grew healthily in mono-layer with dendritic extensions. After incubation for 3 days, the specimen surfaces were covered more densely by cells, and numerous micro filaments were extruding to the extracellular matrix.

Microstructural Investigation of Alloy 617 Creep-Ruptured in Pure Helium Environment at 950℃ (950℃ 순수헬륨 분위기에서 크리프 파단된 Alloy 617의 미세구조적 고찰)

  • Lee, Gyeong-Geun;Jung, Su-Jin;Kim, Dae-Jong;Kim, Woo-Gon;Park, Ji-Yeon;Kim, Dong-Jin
    • Korean Journal of Materials Research
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    • v.21 no.11
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    • pp.596-603
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    • 2011
  • The very high temperature gas reactor (VHTR) is one of the next generation nuclear reactors for its safety, long-term stability, and proliferation-resistance. The high operating temperature of over 800$^{\circ}C$ enables various applications with high energy efficiency. Heat is transferred from the primary helium loop to the secondary helium loop through the intermediate heat exchanger (IHX). The IHX material requires creep resistance, oxidation resistance, and corrosion resistance in a helium environment at high operating temperatures. A Ni-based superalloy such as Alloy 617 is considered as a primary candidate material for the intermediate heat exchanger. In this study, the microstructures of Alloy 617 crept in pure helium and air environments at 950$^{\circ}C$ were observed. The rupture time in helium was shorter than that in air under small applied stresses. As the exposure time increased, the thickness of outer oxide layer of the specimens clearly increased but delaminated after a long creep time. The depth of the carbide-depleted zone was rather high in the specimens under high applied stress. The reason was elucidated by the comparison between the ruptured region and grip region of the samples. It is considered that decarburization caused by minor gas impurities in a helium environment caused the reduction in creep rupture time.

Complete genome sequence of Betaproteobacteria strain GR16-43 isolated form a freshwater pond in South Korea (담수에서 분리한 Betaproteobacteria GR16-43의 유전체 염기서열 분석)

  • Choi, Ahyoung;Baek, Kiwoon;Chung, Eu Jin;Kim, Jee-Hwan;Choi, Gang-Guk
    • Korean Journal of Microbiology
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    • v.53 no.4
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    • pp.320-322
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    • 2017
  • A betaproteobacterium strain GR16-43 was isolated from a surface layer of the Geomnyong Pond in Republic of Korea by a dilution-to-extinction culturing method. We report the whole genome sequence of the strain GR16-43, which contains 4,806,848 bp with a G + C content 67.12%, and to include 4,424 protein-coding genes and 47 transfer RNA genes. The genome was determined to contain the genes encoding carbon monoxide dehydrogenase, nitrate reductase, nitrite reductase, nitric oxide reductase, and the sulfur oxidation (sox) gene cluster, highlighting the potential importance of the bacterial group represented by the strain in the cycling of inorganic elements. These results indicate that strain GR16-43 genome showed several traits indicating adaptation of the bacteria to living in freshwater environments.

The effect and stability of plant extract ingredient as uv absorber (자외선 흡수제로서의 식물추출성분의 안정성과 효과)

  • 김경동;이용두;박성순;윤성화;이석현
    • Journal of the Society of Cosmetic Scientists of Korea
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    • v.26 no.1
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    • pp.41-58
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    • 2000
  • Recently the harmfulness of W radiation is in creasing due to encironmental pollution. Environmental population may also play a role in global decrease of ozone layer, A major consequence of ozone depletion is increase in solar ultra violet radiation received at the earth's surface excessive exposure to W radiation cause a lot of problems in our skin. Plant extract that possess antioxidative activities has been reported to retard the oxidation process in product to which they have been added. Plant are alived under solar light. So it is expect the plants have so many protection mechanisms and UV absorbent ingredients against ultra violet radiation such as UVB, UVA. Plant extract which were flavonoids, alkaloids and others could be transformed into UV absorber by chemical modification. Therefore with the aim of finding alternative natural absorber that can safely be used in cosmetic, we have screened various extract for their UV absorbent effect. Thus, the cosmetic safety against human skin, antimicrobial effects and others could be improved by using the silicon.

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A Study on the Electrolytic Process for Palladium Separation from Recovered Crude Metal of Electronic Waste (전자폐기물에서 회수된 조금속으로부터 팔라듐 분리를 위한 전해공정에 관한 연구)

  • Park, Sung Cheol;Han, Chul Woong;Kim, Yong Hwan;Jung, Yeon Jae;Lee, Man Seung;Son, Seong Ho
    • Resources Recycling
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    • v.30 no.6
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    • pp.76-82
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    • 2021
  • The separation of palladium from crude metal, which is obtained from electronic waste using pyrometallurgy was achieved through electrolysis. This was done to recover high-purity copper. The oxidation potentials of these metals are a fundamental part of the analysis of electrolytic separation of palladium and impurity metals. To achieve this, copper, iron, and nickel were dissolved in the electrolyte, and palladium and aluminum were found to be recoverable from anode slime. During the electrolysis for palladium separation, palladium was present in the anode slime and was obtained with a recovery of 97.46 % indicating almost no loss. 4N-grade copper was recovered from the electrodeposition layer at the cathode.

Characteristics of Sr2Ni1.8Mo0.2O6-δ Anode for Utilization in Methane Fuel Conditions in Solid Oxide Fuel Cells

  • Kim, Jun Ho;Yun, Jeong Woo
    • Journal of Electrochemical Science and Technology
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    • v.10 no.3
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    • pp.335-343
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    • 2019
  • In this study, $Sr_2Ni_{1.8}Mo_{0.2}O_{6-{\delta}}$ (SNM) with a double perovskite structure was investigated as an alternative anode for use in the $CH_4$ fuel in solid oxide fuel cells. SNM demonstrates a double perovskite phase over $600^{\circ}C$ and marginal crystallization at higher temperatures. The Ni nanoparticles were exsolved from the SNM anode during the fabrication process. As the SNM anode demonstrates poor electrochemical and electro-catalytic properties in the $H_2$ and $CH_4$ fuels, it was modified by applying a samarium-doped ceria (SDC) coating on its surface to improve the cell performance. As a result of this SDC modification, the cell performance improved from $39.4mW/cm^2$ to $117.7mW/cm^2$ in $H_2$ and from $15.9mW/cm^2$ to $66.6mW/cm^2$ in $CH_4$ at $850^{\circ}C$. The mixed ionic and electronic conductive property of the SDC provided electrochemical oxidation sites that are beyond the triple boundary phase sites in the SNM anode. In addition, the carbon deposition on the SDC thin layer was minimized due to the SDC's excellent oxygen ion conductivity.

Evaluation of Oxygen Reduction and Surface Chemical State of Ti-48Al-2Cr-2Nb Powder by Ca Vapor (칼슘 증기에 의한 Ti-48Al-2Cr-2Nb 분말의 산소 저감 및 표면 화학적 상태 분석)

  • Kim, Taeheon;Kwon, Hanjung;Lim, Jae-Won
    • Journal of Powder Materials
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    • v.28 no.1
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    • pp.31-37
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    • 2021
  • This study explores reducing the oxygen content of a commercial Ti-48Al-2Cr-2Nb powder to less than 400 ppm by deoxidation in the solid state (DOSS) using Ca vapor, and investigates the effect of Ca vapor on the surface chemical state. As the deoxidation temperature increases, the oxygen concentration of the Ti-48Al-2Cr-2Nb powder decreases, achieving a low value of 745 ppm at 1100℃. When the deoxidation time is increased to 2 h, the oxygen concentration decreases to 320ppm at 1100℃, and the oxygen reduction rate is approximately 78% compared to that of the raw material. The deoxidized Ti-48Al-2Cr-2nb powder maintains a spherical shape, but the surface shape changes slightly owing to the reaction of Ca and Al. The oxidation state of Ti and Al on the surface of the Ti-48Al-2Cr-2Nb powder corresponds to a mixture of TiO2 and Al2O3. As a result, the peaks of metallic Ti and Ti suboxide intensify as TiO2 and Al2O3 in the surface oxide layer are reduced by Ca vapor deposition.

Effect of dietary pumpkin (Cucurbita moschata) seed meal on layer performance and egg quality characteristics

  • Vlaicu, Petru Alexandru;Panaite, Tatiana Dumitra
    • Animal Bioscience
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    • v.35 no.2
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    • pp.236-246
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    • 2022
  • Objective: The objective of this study was to investigate the effect of dietary pumpkin (Cucurbita moschata) seed meal (PSM) on laying hens' performance, quality, fatty acids, cholesterol, antioxidant compounds and shelf life of eggs. Methods: Eighty Tetra SL laying hens, 50-week-old, were randomly divided into two equal groups, having 10 replicates with 4 birds in each. The control (CON) treatment was fed with basal diet, while experimental treatment was fed a diet with 9% PSM, for a 6 week period. Results: Dietary PSM significantly decreased average daily feed intake (p<0.05), with no significant effect on other performance parameters. The PSM, enriched the eggs with polyunsaturated fatty acids, especially α linolenic acid (0.33 vs 0.21 g/100 g) and linoleic acid (20.65 vs 18.37 g/100 g), whereas it reduced the amount of arachidonic acid with 3.91% and n-6/n-3 ratio in PSM eggs compared with CON. The inclusion of 9% PSM significantly (p<0.05) diminished the cholesterol concentration in yolk with 11.31% and in egg with 10.38%, in respect to the CON samples. The significantly (p<0.05) higher concentration of polyphenols and antioxidant compounds, determined in PSM eggs, proved to be effective on shelf life of eggs preserved at refrigerator (5℃) and room temperature (21℃) for 28 days, by delaying the lipid oxidation and protein denaturation. This effect was reflected in significantly (p<0.05) higher Haugh unit in eggs stored 28 days at 21℃ and lower albumen pH values for the overall storage time, both at 5℃ and 21℃, proving the antioxidant effect of pumpkin. Conclusion: Dietary PSM supplementation was significantly effective on average daily feed intake and egg quality by increasing some fatty acids while lowering the cholesterol concentration. Also, PSM proved to be effective improving shelf life of eggs for 28 days storage time.