• Title/Summary/Keyword: numerical aperture

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Micromachining Characteristics inside Transparent Materials using Femtoseocond Laser Pulses (펨토초 레이저에 의한 투명 유리내부 미세가공특성)

  • Nam Ki-Gon;Cho Sung-Hak;Chang Won-Seok;Na Suck-Joo;Whang Kyung-Hyun;Kim Jae-Gu
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.5 s.182
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    • pp.190-196
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    • 2006
  • Transparent materials are widely used in the fields of optic parts and bio industry. We have experiment to find out the characteristics of the micromachining inside transparent materials using femtosecond laser pulses. With its non-linear effects by very high peak intensity, filament (plasma channel) was formed by the cause of the self-focusing and the self-defocusing. Physical damage could be found when the intensity is high enough to give rise to the thermal stress or evaporation. At the vicinity of the power which makes the visible damage or modification, the structural modification occurs with the slow scanning speed. According to the polarization direction to the scanning direction, the filament quality is quite different. There is a good quality when the polarization direction is parallel to the scanning direction. For fine filament, we could suggest the conditions of the high numerical aperture lens, the short shift of focusing point, the low scanning speed and the low power below 20 mW. As the examples of optics parts, we fabricated the fresnel zone plate with the $225{\mu}m$ diameter and Y-bend optical wave guide with the $5{\mu}m$ width.

Confocal Scanning Microscopy : a High-Resolution Nondestructive Surface Profiler

  • Yoo, Hong-Ki;Lee, Seung-Woo;Kang, Dong-Kyun;Kim, Tae-Joong;Gweon, Dae-Gab;Lee, Suk-Won;Kim, Kwang-Soo
    • International Journal of Precision Engineering and Manufacturing
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    • v.7 no.4
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    • pp.3-7
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    • 2006
  • Confocal scanning microscopy is a measurement technique used to observe micrometer and sub-micrometer features due to its high resolution, nondestructive properties, and 3D surface profiling capabilities. The design, implementation, and performance test of a confocal scanning microscopy system are presented in this paper. A short-wavelength laser (405 nm) and an objective lens with a high numerical aperture (0.95) were used to achieve the desired high resolution, while the x- and y-axis scans were implemented using an acousto-optic deflector and galvanomirror, respectively. An objective lens with a piezo-actuator was used to scan the z-axis. A spatial resolution of less than 138 nm was achieved, along with successful 3D surface reconstructions.

Hydro-thermal Numerical Simulation for an Artificial Recharge Test in a Fractured Rock Aquifer (암반대수층 지하수 인공함양 시험에 대한 열-수리 모델링)

  • Park, Daehee;Koo, Min-Ho;Kim, Yongcheol
    • Journal of Soil and Groundwater Environment
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    • v.20 no.1
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    • pp.65-75
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    • 2015
  • An artificial recharge test aimed at investigating transport characteristics of the injected water plume in a fractured rock aquifer was conducted. The test used an injection well for injecting tap water whose temperature and electrical conductivity were different from the groundwater. Temporal and depth-wise variation of temperature and electrical conductivity was monitored in both the injection well and a nearby observation well. A highly permeable fracture zone acting as the major pathway of groundwater flow was distinctively revealed in the monitoring data. A finite element subsurface flow and transport simulator (FEFLOW) was used to investigate sensitivity of the transport process to associated aquifer parameters. Simulated results showed that aperture thickness of the fracture and the hydraulic gradient of groundwater highly affected spatio-temporal variation of temperature and electrical conductivity of the injected water plume. The study suggests that artificial recharge of colder water in a fractured rock aquifer could create a thermal plume persistent over a long period of time depending on hydro-thermal properties of the aquifer as well as the amount of injected water.

Design of Cover Layer Incident Dual-Layer Near-Field Recording Optics with Hemispherical SIL (반구형 SIL을 이용한 미디어 내부 이층 근접장 광 기록계의 설계)

  • Kim Wan-Chin;Choi Hyun;Song Taesun;Park No-Cheol;Park Young-Pil
    • 정보저장시스템학회:학술대회논문집
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    • 2005.10a
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    • pp.4-11
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    • 2005
  • In this paper, we propose novel optics design for media inside near-field recording (NFR) using hemispherical solid immersion lens (HMS). To obtain strong advantage of data protection and high data capacity simultaneously, HMS based near field optics using aplanatic position of super hemisphere is designed. In this design, to improve small optical tolerance of this aplanatic position, additional aspheric lens surface is added on top of the HMS and it is combined with zoom optics which composed of two single lenses having low numerical aperture (NA). Also, to compensate chromatic aberration which happens seriously in optics using blue laser diode, diffractive optical element is used. Using zoom optics, additional aspheric lens surface, and diffractive optical element together, wavefront aberration and chromatic aberration are effectively reduced in broad range of cover layer thickness and wavelength variation. In addition, In this paper, effect of gap induced aberration is investigated by analyzing different behavior of each TM and TE wave for designed media inside dual-layer NFR optics.

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Active Alignment and Performance Evaluation of Micro Hybrid Lens for Small Form Factor Optical Pickup (초소형 광 픽업용 하이브리드 렌즈의 능동 정렬 및 성능평가)

  • Kang Sung-Mook;Lee Jin-Eui;Cho Eun-Hyoung;Sohn Jin-Seung;Park No-Cheol;Park Young-Pil
    • 정보저장시스템학회:학술대회논문집
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    • 2005.10a
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    • pp.154-159
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    • 2005
  • The next generation of optical storage systems requires higher numerical aperture (NA) objective lenses and shorter wavelength laser in order to improve the unit areal density. A blu-ray technology satisfies a miniaturization and a high capacity which are the requirements of the portable device. In this paper, we analyze the optical performance of hybrid micro lens and do active alignment. The hybrid micro lens is manufactured by using a wafer based fabrication technology. Optical components of hybrid micro lens are evaluated. The measurement of the optical power, the spot size and the wavefront error awe performed to evaluate the hybrid micro lens with NA 0.85. Using the measured data, we estimate if the performance of hybrid micro lens corresponds to the designed performance. After the performance of hybrid micro lens is evaluated, the integrated optical pickup and the hybrid micro lens are assembled by active alignment using UV curing and the optical performance of SFFOP is satisfied with BD specifications.

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Effect of Formation of Segmented Fractures Induced by Fluid Injection on Major Design Parameters (수압파쇄균열의 분할생성 시 주요 설계변수에 대한 영향)

  • Sim, Young-Jong
    • Journal of the Korean GEO-environmental Society
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    • v.10 no.6
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    • pp.125-133
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    • 2009
  • Rock fracturing technique through fluid injection into the wellbore has been widely used to extract geothermal heat and to enhance oil and gas production. Single fracture formation is ideal for the production. However, it is very difficult to form single fracture formation. Instead, the formation of segmented fracture is a common phenomenon. Therefore, design parameters are expected to be different from those of single fracture because of mechanical interaction between segmented fractures. In this paper, design parameters such as length, aperture, and net pressure are evaluated by using model of segmented fracture in which numerical technique is incorporated to consider mechanical interaction between segments. Results show that the existence of fracture segmentation affects design parameters in fracturing treatment in rock by fluid injection.

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An Analysis of the Hybrid Finite Element Method for Scattering and Radiation by Microstrip Patch Antennas and Arrays Residing in a Cavity in a Ground Plane (접지평면상의 공간에 위치한 마이크로스트립 페치 단일 안테나와 배열 안테나에 의한 산란과 복 사에 관한 혼합유한요소법 해석)

  • 안중수;박동희;권희훈
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.19 no.12
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    • pp.2468-2478
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    • 1994
  • A hybrid finite element method is presented for a characterization of scattering an radiation properties of microstrip patch and arrays residing in a cavity recessed in a ground plane. The technique combines the finite element and boundary integral methods to formulate a system for the solution of fields at the aperture and the scattering field and radar cross sections at free space. By virture of the finite element method, the proposed technique is applicable to patch antennas and arrays residing on or embeded in a layered dielectric loss/lossless substrate and is also capable of treating various feed configuration. Several numerical results are presented demonstrating the validity, efficiency and capability of the technique.

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Improvement of Filling Characteristics of Micro-Bumps in the Stencil Printing Process (스텐실 프린팅 공정에서 미세범프의 성형성 향상을 위한 연구)

  • Seo, W.S.;Min, B.W.;Park, K.;Lee, H.J.;Kim, J.B.
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.21 no.1
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    • pp.26-32
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    • 2012
  • In the present study, the stencil printing process using solder paste are numerically analyzed. The key design parameters in the stencil printing process are the printing conditions, stencil design, and solder paste properties. Among these parameters, the effects of printing conditions including the squeegee angle and squeegee pressure are investigated through finite element (FE) analysis. However, the FE analysis for the stencil printing process requires tremendous computational loads and time because this process carries micro-filling through thousands of micro-apertures in stencil. To overcome this difficulty in simulation, the present study proposes a two-step approach to sequentially perform the global domain analysis and the local domain analysis. That is, the pressure development under the squeegee are firstly calculated in the full analysis domain through the global analysis. The filling stage of the solder paste into a micro-aperture is then analyzed in the local analysis domain based on the results of the preceding global analysis.

Deep UV 마이크로 리소그라피를 위한 새로운 4-반사경 광학계에 관한 수차해석

  • 김종태;이상수
    • Korean Journal of Optics and Photonics
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    • v.4 no.1
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    • pp.1-8
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    • 1993
  • A design of four-mirror optical system with reduction magnification 5X for deep UV ($\lambda$=248 nm of KrF excimer laser) submicron lithography is presented. Initially by using the paraxial quantities, the domain of solution for $t=d_1+d_2+d_3$<0 (d;: distance between the mirror $c_i$ and $c_{i+1}$ is found for the system which is free from the four off-axial Seidel first order aberrations that are coma, astigmatism, field curvature, and distortion. The solution with $d_5$=2.95 (normalized with respect to $c_i$= -1) is choosen and the aspherization is carried out to the spherical mirror surfaces ($c_3$ and $c_4$ in order to reduce the axial and residual off-axial higher order aberrations. The numerical aperture of the final system is as large as 0.4, which gives Rayleigh resolution of 0.38 $\mu\textrm{m}$.

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Development of Large-area Two-photon Stereolithography Process for the Fabrication of Large Three-dimensional Microstructures (대면적 3 차원 마이크로 형상제작을 위한 스테이지 스캐닝 시스템을 이용한 이광자 흡수 광조형 공정 개발)

  • Lim, Tae-Woo;Son, Yong;Yi, Shin-Wook;Kong, Hong-Jin;Park, Sang-Hu;Yang, Dong-Yol
    • Journal of the Korean Society for Precision Engineering
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    • v.25 no.1
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    • pp.122-129
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    • 2008
  • Two-photon stereolithography is recognized as a promising process for the fabrication of three-dimensional (3D) microstructures with 100 nm resolution. Generally, beam-scanning system has been used in the conventional process of two-photon stereolithography, which is limited to the fabrication of micro-prototypes in small area of several tens micrometers. For the applications to 3D high-functional micro-devices, the fabrication area of the process is required to be enlarged. In this paper, large-area two-photon stereolithography (L-TPS) employing stage scanning system has been developed. Continuous scanning method is suggested to improve the fabrication speed and parameter study is conducted. An objective lens of high numerical aperture (N.A.) and high strength material were employed in this system. Through this work, 3D microstructures of $600*600*100\;{\mu}m$ were fabricated.