• Applied Chemistry for Engineering
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• v.16 no.4
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• pp.461-473
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• 2005

Nanotechnology has attracted great attention as one of essential fields in modern science. In particular, the fabrication of nanostructures with nanometer dimension in size is the starting point and essential part of nanotechnology research. Anodic aluminum oxide (AAO) nanotemplate technique has many merits including ease of fabrication, low cost process, and nanotemplate fabrication in large area. Moreover, AAO nanotemplate technique can realize self-ordered hexagonal pore structure with extremely high aspect ratio which is difficult to achieve with conventional lithographic techniques. Simple control of pore dimensions such as diameter, length, and density by varying anodizing condition would be advantageous, too. AAO nanotemplate has been the topic of intensive investigations for the past decade due to above strong points, and the application to various fields of nanotechnology is expected. In this review paper, the fabrication and application of AAO nanotemplate are introduced.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.37.1-37.1
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• 2011

Miniaturization of lenses has been widely researched by various scientific and engineering techniques. As a result, micro scaled lens structure could be easily achieved from various fabrication techniques; nevertheless it is still challenging to make nano scaled lenses. This paper reports a novel fabrication method of silicon nanotemplate for nanolens array. The inverse structure of nanolens array was fabricated on silicon substrate by reactive ion etching (RIE) process. This technique has a flexibility to produce different tip shapes using different pattern masks. Once the silicon nano-tip array structure is well-defined using an optimized recipe, it is followed by polymer molding to duplicate nanolens array from the template. Finally, the nanostructures formed on silicon nanotemplate and polymer replica were investigated using FE-SEM and AFM measurements. The nano scaled lens can be manufactured from the same template, also using other replication techniques such as imprinting, injection molding and so on.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.14 no.4
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• pp.923-928
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• 2010

Anodic aluminum oxide (AAO) nanotemplates for nano electronic device applications have been attracting increasing interest because of ease of fabrication, low cost process, and possible fabrication in large area. The size and density of the nanostructured materials can be controlled by changing the pore diameter and the pole density of AAO nanotemplate. In this paper, nano porous alumina films AAO nanotemplate was fabricated by second anodization method using sputterd Al films. In addition, effects of electrolyte temperature and anodization voltate on the microstructure of porous alumina films were investigated. As the electrolyte temperature was increased from $8^{\circ}C$ to $20^{\circ}C$, the growth rate of nanoporous alumina films was increased from 86.2 nm/min to 179.5 nm/min. The AAO nanotemplate fabricated with optimal condition had the mean pore diameter of 70 nm and the pore depth of $1\;{\mu}m$.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.1495-1496
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• 2011

Anodic aluminum oxide (AAO) nanotemplates for nano electronic device applications have been attracting increasing interest because of ease of fabrication, low cost process, and possible fabrication in large area. The size and density of the nanostructured materials can be controlled by changing the pore diameter and the pole density of AAO nanotemplate. In this paper, AAO nanotemplate was fabricated by second anodization method. In addition, effects of electrolyte and anodization voltate on the microstructure of porous alumina films were investigated. Vertically well aligned pores had the average pore sizes of 15-70 nm and the length of approximately 40 ${\mu}m$.

• Bulletin of the Korean Chemical Society
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• v.30 no.5
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• pp.1131-1134
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• 2009

Preparation of graded materials displaying gradients of desired properties is one of the important issues and less-developed areas in materials chemistry. For the first time we demonstrate facile control of porosity and length in the pores of AAO template in lateral directions by controlled dipping method. To demonstrate the versatility of the proposed method, laterally graded silica nanotubes are also prepared by using the laterally graded AAO templates. The method demonstrated here will open numerous possibilities for obtaining a variety of graded materials with lateral gradients of catalytic, electrochemical, mechanical and optical properties on the nanoscale.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.146-147
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• 2006

본 논문에서 탄소나노튜브의 성장 제어를 위해 양극산화 알루미늄 템플레이트를 사용하였다. Si 기판위에 TiN과 Ni 층을 순서대로 증착하였으며 알루미늄을 그 위에 증착하였다. 또한 양극산화 과정은 수산법을 이용하였고 탄소나노튜브의 성장은 마이크로웨이브 플라즈마 화학기상증착법을 이용하여 성장하였다. 양극산화 알루미늄 층 과 탄소나노튜브의 관찰을 위해서 FE-SEM 을 사용하였으며 성장된 탄소나노튜브의 직경은 40 nm 이고 길이는 약 $1\;{\mu}m$ 내외로 확인되었다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.933-934
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• 2009

• Journal of the Microelectronics and Packaging Society
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• v.10 no.1
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• pp.7-11
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• 2003

The semiconductor chips or electronic components generate heat, which causes malfunction of the parts when it was not cooled properly. Bulky heat sink and cooling fan are used to get rid of the heat. However, with this bulky system, it is hard to integrate the electronics system in a small scale. The cooling efficiency of the system depends on the surface area of the heat sink, thermal conductivity of the material and the method of integration. In order to develop a novel cooling system, a micro-heatsink with a large surface area while retaining small volume was fabricated by electroless deposition of gold/copper inside a Track-etched membrane. The structure of the micro-heatsink was investigated using SEM or optical microscope. It was also found that the micro-heatsink is more efficient than a flat copper plate.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.24 no.1
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• pp.38-42
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• 2015

Polydimethylsiloxane (PDMS) is a widely used material for replicating micro-structures because of its transparency, deformability, and easy fabrication. At the nanoscale, however, it is hard to fill a nanohole template with uncured PDMS. This paper introduces several simple methods by changing the surface energy of a nanohole template and PDMS elastomer for replicating 100nm-scale structures. In the case of template, pristine anodic aluminum oxide (AAO), hydrophobically treated AAO, and hydrophillically treated AAO are used. For the surface energy change of the PDMS elastomer, a hydrophilic additive and dilution solvent are added in the PDMS prepolymer. During the molding process, a simple casting method is used for all combinations of the treated template and modified PDMS. The nanostructured PDMS surface was investigated with a scanning electron microscope after the molding process for verification.

• Journal of the Korean Electrochemical Society
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• v.14 no.4
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• pp.219-224
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• 2011

Using an electrolyte additive, we examined, for the first time, a novel self-ordering regime of 160~200 V in high-field anodization which had been used for a fast fabrication of self-ordered anodic alumina nanotemplate. FE-SEM analyses conducted after the high-field anodization, pulse detachment and chemical widening of pores showed the relationship of 2.2 nm/V in this voltage range, which was identical to the previously reported one in the literature. The growth rate of the alumina film was about 60 um/hr, which was 30 times faster than that of phosphoric acid mild anodization. This study provides a new process for the fast fabrication of nanotemplates with interpore distances larger than 300 nm.