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http://dx.doi.org/10.7735/ksmte.2015.24.1.038

Fabrication of Nanopatterned PDMS Elastic Stamp Mold Using Surface Treatment of Nanotemplate  

Park, Yong Min (Department of Conversion System Engineering, Kangwon National University)
Seo, Sang Hyun (Department of Conversion System Engineering, Kangwon National University)
Seo, Young Ho (Department of Conversion System Engineering, Kangwon National University)
Kim, Byeong Hee (Department of Conversion System Engineering, Kangwon National University)
Publication Information
Journal of the Korean Society of Manufacturing Technology Engineers / v.24, no.1, 2015 , pp. 38-42 More about this Journal
Abstract
Polydimethylsiloxane (PDMS) is a widely used material for replicating micro-structures because of its transparency, deformability, and easy fabrication. At the nanoscale, however, it is hard to fill a nanohole template with uncured PDMS. This paper introduces several simple methods by changing the surface energy of a nanohole template and PDMS elastomer for replicating 100nm-scale structures. In the case of template, pristine anodic aluminum oxide (AAO), hydrophobically treated AAO, and hydrophillically treated AAO are used. For the surface energy change of the PDMS elastomer, a hydrophilic additive and dilution solvent are added in the PDMS prepolymer. During the molding process, a simple casting method is used for all combinations of the treated template and modified PDMS. The nanostructured PDMS surface was investigated with a scanning electron microscope after the molding process for verification.
Keywords
Surface treatment of nanotemplate; Polydimethylsiloxane (PDMS) nanomolding; Surface energy; Nano pillar replication;
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Times Cited By KSCI : 2  (Citation Analysis)
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