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http://dx.doi.org/10.6109/jkiice.2010.14.4.923

Fabrication of anodic aluminum oxide nanotemplate using sputtered aluminum thin film  

Lee, Jae-Hyeong (군산대학교)
Publication Information
Journal of the Korea Institute of Information and Communication Engineering / v.14, no.4, 2010 , pp. 923-928 More about this Journal
Abstract
Anodic aluminum oxide (AAO) nanotemplates for nano electronic device applications have been attracting increasing interest because of ease of fabrication, low cost process, and possible fabrication in large area. The size and density of the nanostructured materials can be controlled by changing the pore diameter and the pole density of AAO nanotemplate. In this paper, nano porous alumina films AAO nanotemplate was fabricated by second anodization method using sputterd Al films. In addition, effects of electrolyte temperature and anodization voltate on the microstructure of porous alumina films were investigated. As the electrolyte temperature was increased from $8^{\circ}C$ to $20^{\circ}C$, the growth rate of nanoporous alumina films was increased from 86.2 nm/min to 179.5 nm/min. The AAO nanotemplate fabricated with optimal condition had the mean pore diameter of 70 nm and the pore depth of $1\;{\mu}m$.
Keywords
Anodic aluminum oxide (AAO); nanotemplates; nanostructure; nano electron device;
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Times Cited By KSCI : 2  (Citation Analysis)
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1 D. Crouse, Y. H. La, A. E. Miller, M. Crouse, "Self-ordered pore structure of anodized aluminum on silicon and pattern transfer", Appl. Phys. Lett., vol. 76, pp.49, 2000.   DOI   ScienceOn
2 Jung, M., Lee, S., Jhon, Y. M., Mho, S.-I., Cho, J., Woo, D., "Nanohole Arrays with Sub-30 nm Diameter Formed on GaAs Using Nanoporous Alumina Mask," Jpn. J. Appl. Phys., vol. 46, pp.4410-4412, 2007.   DOI
3 K. Nielsch, F. Muller, A. P. Li, U. Gosele, "Fabrication and microstructuring of hexagonally ordered two-dimensional nanopore arrays in anodic alumina", Adv. Mater., vol. 12, pp.582, 2000.   DOI   ScienceOn
4 F. Li, L. Zhang, R.M. Mertzer, "On the growth of highly ordered pores in anodized aluminum oxide" Chem. Maer., vol, 10, pp. 2470, 1998.   DOI   ScienceOn
5 Tatsuya Iwaasaki, Taiko Motoi, Tohru Den, "Strengthened porous alumina membarne tube prepared by means of internal anodic oxidation" Appl. Phys. Lett., vol. 75, pp. 2044, 1999.   DOI   ScienceOn
6 F. Keller, M. S. Hunter, D. L. Robinson, "Structural feature of oxide coating on aluminum", J. Electrochem. Sci., vol. 100, pp. 411, 1953.   DOI
7 Masuda, H. and Fukuda, K., "Ordered Metal Nanohole Arrays Made by a Two-step Replication of Honeycomb Structures of Anidic Alumina,", Science, vol. 268, pp.1466-1468, 1995.   DOI   ScienceOn
8 M. Jung, J.-W. Choi, Y.-K. Kim, B.-K. Oh, "Fabrication of Nanoporous Alumina Mask and its Applications", Korean Chem. Eng. Res., vol. 46, no. 3, pp.465-472, 2008.
9 S.-H. Jeong, S.-H. Jung, K.-H. Lee, "Preparation of Anode Alumina Nanotemplate and its Applications", J. Korean Ind. Eng. Chem., ol 16, No. 4, pp.461-473, 2005.
10 M. Z. An., L. C. Zhao, Z. M. Tu "Graining technology by electrolytic etching on the surface of aluminum alloys", Mater. Chem. Phys., vol. 77, pp.170, 2002.
11 Nakao, M., Oku, S., Tamamura, T., Yasui, K. and Masuda, H., "GaAs and InP Nanohole Arrays Fabricated by Reactive Beam Etching Using Highly Ordered Alumina Membranes," Jpn. J. Appl. Phys., vol. 38, pp.1052-1055, 1999.   DOI
12 Guo, Q., Tanaka, T., Nishio, M., Ogawa, H., Mei, X. and Ruda, H., "Fabrication of ZnTe Nanohole Arrays by Reactive ion Etching Using Anodic Alumina Templates," Jpn. J. Appl. Phys., vol., 41, pp.L118-L120, 2002.   DOI   ScienceOn