• 한국금형공학회:학술대회논문집
• /
• 2008.06a
• /
• pp.35-38
• /
• 2008

A pattern master and a Ni stamper for 50nm class of patterns are fabricated through e-beam lithography and Ni electroforming process. A model pattern set is designed, which is based on unit patterns of 50nm, 100nm, 150nm and 200nm in length and 50nm in width. The e-beam process is optimized to fabricate designed patterns with some parameters including dose, accelerating voltage, focal distance and developing time. For Ni electroforming to fabricate Ni stamper, a seed layer, a conducting layer, is deposited first on the pattern master fabricated by an e-beam lithography process. Ni, Ti/Ni and Cr are first tested to find optimal seed layer process. Currently the best result is obtained when adopting Cr deposited to be 100nm thick with continuous tilting motion of the master substrate during the deposition process.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2002.11a
• /
• pp.47-50
• /
• 2002

ZnO nanowires were coated conformally with aluminum oxide ($Al_{2}O_{3}$) material by atomic layer deposition (ALD). The ZnO nanowires were first synthesized on a Si (100) substrate at $1380^{\circ}C$ from ball-milled ZnO powders by a thermal evaporation procedure with an argon carrier gas without any catalysts; the length and diameter of these ZnO nanowires are $20\sim30{\mu}m$ and $50{\sim}200$ nm, respectively. $Al_{2}O_{3}$ films were then deposited on these ZnO nanowires by ALD at a substrate temperature of $300^{\circ}C$ using trimethylaluminum (TMA) and distilled water ($H_{2}O$). Transmission electron microscopy (TEM) images of the deposited ZnO nanowires revealed that 40nm-thick $Al_{2}O_{3}$ cylindrical shells surround the ZnO nanowires.

• Journal of Powder Materials
• /
• v.17 no.3
• /
• pp.230-234
• /
• 2010

Homogenous silica-coated $CoFe_2O_4$ samples with controlled silica thickness were synthesized by the reverse microemulsion method. First, 7 nm size cobalt ferrite nanoparticles were prepared by thermal decomposition methods. Hydrophobic cobalt ferrites were coated with controlled $SiO_2$ using polyoxyethylene(5)nonylphenylether (Igepal) as a surfactant, $NH_4OH$ and tetraethyl orthosilicate (TEOS). The well controlled thickness of the silica shell was found to depend on the reaction time and the amount of surfactant used during production. Thick shell was prepared by increasing reaction time and small amount of surfactant.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.06a
• /
• pp.127-128
• /
• 2008

The electrical characteristics of VARIOT (variable oxide thickness) with various $HfO_2$ thicknesses on thin $SiO_2$ or $Al_2O_3$ layer were investigated. Especially, the charge trapping characteristics of $HfO_2$ layer were intensively studied. The thin $HfO_2$ layer has small charge trapping characteristics while the thick $HfO_2$ layer has large memory window. Therefore, the $HfO_2$ layer is superior material and can be applied to charge storage as well as tunneling barrier of the non-volatile memory applications.

• Journal of the Semiconductor & Display Technology
• /
• v.14 no.3
• /
• pp.7-11
• /
• 2015

In order to protect the patterned mask from contamination during lithography process, pellicle has become a critical component for Extreme Ultraviolet (EUV) lithography technology. According to EUV pellicle requirements, the pellicle should have high EUV transmittance and robust mechanical property. In this study, silicon nitride, which is well-known for its remarkable mechanical property, was used as a pellicle membrane material to achieve high EUV transmittance. Since long silicon wet etching process time aggravates notching effect causing stress concentration on the edge or corner of etched structure, the remaining membrane is prone to fracture at the end of etch process. To overcome this notching effect and attain high transmittance, we began preparing a rather thick (200 nm) $SiN_x$ membrane which can be stably manufactured and was thinned into 43 nm thickness with HF wet etching process. The measured EUV transmittance shows similar values to the simulated result. Therefore, the result shows possibilities of HF thinning processes for $SiN_x$ EUV pellicle fabrication.

• Proceedings of the Korean Magnestics Society Conference
• /
• 2000.09a
• /
• pp.251-265
• /
• 2000

S $m_{2}$F $e_{17}$ $N_{x}$ film magnets using a S $m_{2}$F $e_{17}$ target were prepared at $N_{2}$ gas atmosphere using a Nd-YAG laser ablation technique. The effect of nitrogen pressure, deposition temperature, pulsation time and film thickness on the structure and magnetic properties of S $m_{2}$F $e_{17}$ $N_{x}$ film were studied. Increasing the nitrogen pressure up to 5 atm. was confirmed to lead the formation of complete S $m_{2}$F $e_{17}$ $N_{x}$ compound. Optimized magnetic properties with the nitrogenation temperature ranging over 500-53$0^{\circ}C$ could be obtained by extending the nitrogenation time up to 4 hours. Relatively low coercivities of 400~600 Oe were exhibited from the S $m_{2}$F $e_{17}$ $N_{x}$ films having the thickness of 50~100 nm while 4$\pi$ $M_{s}$ of 10~12 kG could be achieved. In-plane anisotropic characteristic, which was the basic goal in this study, was achieved by controlling the nitrogenation parameters.ameters.ers.ameters.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.02a
• /
• pp.111-111
• /
• 2010

최근 전자 소자의 집적기술은 기존의 2차원에서 System on package (SOP) 개념에 기반을 둔 3차원 집적 기술로 발전 되어가고 있다. 소자의 3차원 실장을 실현시키는 과정에서 세라믹의 여러 유용성이 언급되어져 왔지만, 취성이 매우 크다는 등의 단점이 있었다. 이러한 이유로 연성을 가지는 폴리머와 세라믹을 합성한 복합체 기판에 대하여 많은 연구가 되고 있다. 그러나 세라믹 제작을 위해서는 높은 공정온도가 요구되고 있고 이러한 높은 공정상에서의 온도는 3차원 실장에 있어서 문제점이 되고 있다. 이러한 문제점을 극복하기 위하여 상온에서 치밀한 세라믹 후막을 제작할 수 있는 공정인 Aerosol Deposition Method (ADM)방법으로 세라믹-폴리머 후막의 제조를 시도하였다. 일반적으로 ADM은 수백 나노의 출발 파우더를 사용하여 치밀한 세라믹 막을 형성하는데 사용된다. 본 연구에서는 ADM으로 100 nm미만의 나노 세라믹 파우더를 사용하여 다공성의 세라믹 후막을 제조한 후 resin을 함침시키는 방법으로 세라믹-폴리머 후막의 제조를 시도하였다. 그 결과 운송가스, aerosol 농도 등의 공정조건을 변화시켜 다공성의 $Al_2O_3$ 후막을 제조하였고, 이 다공성 후막은 반투명의 특성을 보이며 고충전율로 형성되었다. 이렇게 제조된 나노 다공성 $Al_2O_3$ 후막에 cyanate ester resin을 함침시키는 방법을 사용하여 $Al_2O_3$-cyanate ester 복합체 후막을 제조하였으며, 이의 비유전율 및 품질계수는 각각 1 MHz에서 6.7, 1000으로 우수한 유전특성을 보임이 확인되었다.

• Korean Journal of Metals and Materials
• /
• v.48 no.12
• /
• pp.1109-1115
• /
• 2010

ZnO thin films were deposited on Si(100) substrates at low temperatures ($44^{\circ}C{\sim}210^{\circ}C$) by atomic layer deposition using DEZn (diethyl zinc) and water as precursors. The film thickness was measured by ellipsometry calibrated with cross-sectional TEM. The phase formation, microstructure evolution, UV-absorbance, and chemical composition changes were examined by XRD, SEM, AFM, TEM, UV-VIS-NIR, and AES, respectively. A uniform amorphous ZnO layer was formed even at $44^{\circ}C$ while stable crystallized ZnO films were deposited above $90^{\circ}C$. All the samples showed uniform surface roughness below 3 nm. Fully crystallized ZnO layers with a band-gap of 3.37 eV without carbon impurities can be formed at substrate temperatures of less than $90^{\circ}C$.

• Structural Engineering and Mechanics
• /
• v.70 no.6
• /
• pp.683-702
• /
• 2019

The present study aims to analyze the magneto-electro-elastic (MEE) vibration of a functionally graded carbon nanotubes reinforced composites (FG-CNTRC) cylindrical shell. Electro-magnetic loads are applied to the structure and it is located on an elastic foundation which is simulated by visco-Pasternak type. The properties of the nano-composite shell are assumed to be varied by temperature changes. The third-order shear deformation shells theory is used to describe the displacement components and Hamilton's principle is employed to derive the motion differential equations. To obtain the results, Navier's method is used as an analytical solution for simply supported boundary condition and the effect of different parameters such as temperature variations, orientation angle, volume fraction of CNTs, different types of elastic foundation and other prominent parameters on the natural frequencies of the structure are considered and discussed in details. Design more functional structures subjected to multi-physical fields is of applications of this study results.

• Advances in nano research
• /
• v.15 no.4
• /
• pp.367-384
• /
• 2023

Natural frequency behavior of graphene platelets reinforced composite (GPL-RC) joined truncated conical-cylindrical- conical shells resting on Winkler-type elastic foundation is presented in this paper for the first time. The rule of mixture and the modified Halpin-Tsai approach are applied to achieve the mechanical properties of the structure. Four different graphene platelets patterns are considered along the thickness of the structure such as GPLA, GPLO, GPLX, GPLUD. Finite element procedure according to Rayleigh-Ritz formulation has been used to solve 2D-axisymmetric elasticity equations. Application of 2D axisymmetric elasticity theory allows thickness stretching unlike simple shell theories, and this gives more accurate results, especially for thick shells. An efficient parametric investigation is also presented to show the effects of various geometric variables, three different boundary conditions, stiffness of elastic foundation, dispersion pattern and weight fraction of GPLs nanofillers on the natural frequencies of the joined shell. Results show that GPLO and BC3 provide the most rigidity that cause the most natural frequencies among different BCs and GPL patterns. Also, by increasing the weigh fraction of nanofillers, the natural frequencies will increase up to 200%.