• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.529-530
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.835-836
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• 2008

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.6 s.99
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• pp.667-673
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• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.11 s.104
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• pp.1295-1302
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• 2005

This paper shows experimental evaluation results of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors as like explained in detail in Ref. (5). First, the fabrication methods were explained. Second, as the static Properties of the Planar scanner. we evaluated the maximum travel range & crosstalk. Also, we presented the correcting method for crosstalk using electric circuits finally. as the dynamic properties of the planar scanner, we evaluated the first resonant frequency. Also, we presented the actual AFM(atomic force microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that properties of the proposed planar scanner are well enough to be used in SPM applications like AFM.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.879-882
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• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(Finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program. Moreover, we presented the actual AFM(Atomic Force Microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that the properties of the proposed planar scanner is well enough to be used in SPM applications like AFM.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.849-850
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• 2011

• Proceedings of the KWS Conference
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• 2009.11a
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• pp.29-29
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• 2009

On this research, laser welding technology for manufacturing automobile body is studied. Laser welding technology is one of the important technologies used in the manufacturing of lighter, safer automotive bodies at a high level of productivity; the leading automotive manufacturers have replaced spot welding with laser welding in the process of car body assembly. Korean auto manufacturers are developing and applying the laser welding technology using a high output power Nd:YAG laser and a 6-axes industrial robot. On the other hand, the robot-based remote laser welding system was equipped with a long focal laser scanner system in robotic end effect. Laser system, robot system, and scanner system are used for realizing the high speed laser welding system. The remote laser welding system and industrial robotic system are used to consist of robot-based remote laser welding system. The robot-based remote laser welding system is flexible and able to improve laser welding speed compared with traditional welding as spot welding and laser welding. The robot-based remote laser systems used in this study were Trumpf's 4kW Nd:YAG laser (HL4006D) and IPG's 1.6kW Fiber laser (YLR-1600), while the robot systems were of ABB's IRB6400R (payload:120kg) and Hyundai Heavy Industry's HX130-02 (payload:130kg). In addition, a study of quality evaluation and monitoring technology for the remote laser welding was conducted. The welding joints of steel plate and steel plate coated with zinc were butt and lapped joints. The quality testing of the laser welding was conducted by observing the shape of the beads on the plate and the cross-section of the welded parts, analyzing the results of mechanical tension test, and monitoring the plasma intensity and temperature by using UV and IR detectors. Over the past years, Trumf's 4kW Nd:YAG laser and ABB's IRB6400R robot system was used. Nowadays, the new laser source, robot and laser scanner system are used to increase the processing speed and to improve the efficiency of processes. This paper proposes the robot-based remote laser welding system as a means of resolving the limited welding speed and accuracy of conventional laser welding systems.

• Laser Solutions
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• v.13 no.4
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• pp.14-20
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• 2010

Robot path generation and laser welding technology for manufacturing automotive body are studied. Laser welding and industrial robot systems are used with the robot based laser welding system. The laser system used in this study is 1.6kW Fiber laser, while the robot system is 6 axes Industrial robot (payload: 130kg). The robot based laser welding system is equipped with laser scanner system for remote laser welding. The laser source, robot and laser scanner system are used to increase the processing speed and to improve the process efficiency. The welding joints of steel plate are butt and lapped joints. The quality test of the laser welding are through the observation the shape of bead on plate and cross-section of welding part. The 3 dimensional laser welding for non-linear pipe welding line is performed. This paper introduces the robot based laser welding system to resolve the limited welding speed and accuracy of the conventional spot welding system.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.6 s.183
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• pp.96-103
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• 2006

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In the long range (about several tens of ${\mu}m$), measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100{\mu}m\times100{\mu}m$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. As a result, XY scanner can have good performance. Using this AFM system, 3um pitch specimen was measured. The uncertainty of total system has been evaluated. X and Y direction performance is different. X-direction measuring performance is better. So to evaluate only ID pitch length, X-direction scanning is preferable. Its expanded uncertainty(k=2) is $\sqrt{(3.96)^2+(4.10\times10^{-5}{\times}p)^2}$ measured length in nm.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.70-70
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• 2009

Si 도핑한 $Ge_2Sb_2Te_5$ 박막은 비정질상에서의 열적 안정성증가, fcc에서 hex상으로의 상전이 억제, 활성화 에너지 증가 등의 특성을 보인다. 본 연구에서는 Si 도핑에 의한 $Ge_2Sb_2Te_5$ 박막의 전기적 그리고 구조적인 특성에 관한 실험을 진행하였다. 실험에 사용된 Si 도핑 $Ge_2Sb_2Te_5$ 박막은 Si 기판 위에 radio frequency power supply를 사용해 Si과 $Ge_2Sb_2Te_5$ 타겟을 co-sputtering하여 증착하였다. Si의 sputtering 파워를 달리하여 실리콘의 농도를 다르게 증착 하였고 X-ray photoelectron spectroscopy (XPS)를 사용하여 박막의 Si 농도를 측정하였다. 증착된 박막은 질소 분위기 하에서 $5\;^{\circ}C$/min으로 열처리 하여 여러 온도와 Si 농도에서의 박막의 특성을 측정하였다. 열처리 전, 후의 박막은 X-ray diffraction (XRD) 분석을 통하여 각각의 온도에서의 구조적 특성을 분석하였다. 열처리 온도에 따르는 필름의 전기적 특성 파악을 위해서 four-point probe를 이용하여 박막의 면저항을 측정하였고 그 값은 3 회 이상 측정하여 평균값을 사용하였다. Nano-pulse scanner를 사용하여 다양한 파워범위와 펄스폭 범위에서의 박막의 상변화에 따른 반사도 차이를 측정하여 각 조성에서의 비정질-결정질상 변화속도를 분석하였다.