Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2009.06a
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- Pages.529-530
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- 2009
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- 2005-8446(pISSN)
Vibration reduction control of 2-D nano scanner with displacement amplifier mechanism driven by PZT for scanning probe microscopy (SPM)
Command compensation filter를 이용한 scanning probe microscopy용 PZT구동 2축 나노 스캐너의 진동제어
- Published : 2009.06.03