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http://dx.doi.org/10.5050/KSNVN.2005.15.6.667

A Flexure Guided Planar Scanner for Scanning Probe Microscope ; Part 1 : Design and Analysis of Static and Dynamic Properties  

Lee, Dong-Yeon (한국과학기술원 기계공학과)
Lee, Moo-Yeon ((주) 위니아 만도)
Publication Information
Transactions of the Korean Society for Noise and Vibration Engineering / v.15, no.6, 2005 , pp. 667-673 More about this Journal
Abstract
This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program.
Keywords
Nano-positioning Planar Scanner; Flexure Guide; Piezoelectric Actuator; Natural Frequency; Scanning Probe Microscope;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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