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http://dx.doi.org/10.5050/KSNVN.2005.15.11.1295

A Flexure Guided Planar Scanner for Scanning Probe Microscope ; Part 2. Evaluation of Static and Dynamic Properties  

Lee, Moo-Yeon (㈜LG전자 DA연구소)
Gweon, Dae-Gab (한국과학기술원 기계공학과)
Lee, Dong-Yeon (한국과학기술원 기계공학과)
Publication Information
Transactions of the Korean Society for Noise and Vibration Engineering / v.15, no.11, 2005 , pp. 1295-1302 More about this Journal
Abstract
This paper shows experimental evaluation results of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors as like explained in detail in Ref. (5). First, the fabrication methods were explained. Second, as the static Properties of the Planar scanner. we evaluated the maximum travel range & crosstalk. Also, we presented the correcting method for crosstalk using electric circuits finally. as the dynamic properties of the planar scanner, we evaluated the first resonant frequency. Also, we presented the actual AFM(atomic force microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that properties of the proposed planar scanner are well enough to be used in SPM applications like AFM.
Keywords
Nano-Positioning Planar Scanner; Flexure Guide; Piezoelectric Actuator; Natural Frequency; Scanning Probe Microscope; Atomic Force Microscope;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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