• Proceedings of the IEEK Conference
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• 2006.06a
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• pp.183-184
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• 2006

The simulation on the mechanism of terahertz NSOM(near-field scanning optical microscopy) have been investigated. Based on experimental results, we have demonstrated the antenna effects on the coupling between a metal tip and substrate for an emission-type terahertz NSOM. It has been found that the lateral resolution can be estimated by a simplified model using an infinitesimal dipole in the substrate.

• Applied Microscopy
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• v.44 no.4
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• pp.133-137
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• 2014

We suggest a facile transmission electron microscopy (TEM) specimen preparation method for the direct (polymer-free) transfer of layer-area graphene from Cu substrates to a TEM grid. The standard (polymer-based) method and direct transfer method were by TEM, high-resolution TEM, and energy dispersive X-ray spectroscopy (EDS). The folds and crystalline particles were formed in a graphene specimen by the standard method, while the graphene specimen by the direct method with a new etchant solution exhibited clean and full coverage of the graphene surface, which reduced several wet chemical steps and accompanying mechanical stresses and avoided formation of the oxide metal.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.3 s.180
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• pp.156-162
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• 2006

Direct fabrication of nano patterns has been studied employing a nano-stereolithography (NSL) process. The needs of nano patterning techniques have been intensively increased for diverse applications for nano/micro-devices; micro-fluidic channels, micro-molds. and other novel micro-objects. For fabrication of high-aspect-ratio (HAR) patterns, a thick spin coating of SU-8 process is generally used in the conventional photolithography, however, additional processes such as pre- and post-baking processes and expansive precise photomasks are inevitably required. In this work, direct fabrication of HAR patterns with a high spatial resolution is tried employing two-photon polymerization in the NSL process. The precision and aspect ratio of patterns can be controlled using process parameters of laser power, exposure time, and numerical aperture of objective lens. It is also feasible to control the aspect ratio of patterns by truncation amounts of patterns, and a layer-by-layer piling up technique is attempted to achieve HAR patterns. Through the fabrication of several patterns using the NSL process, the possibility of effective patterning technique fer various N/MEMS applications has been demonstrated.

• Journal of the Optical Society of Korea
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• v.18 no.4
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• pp.350-358
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• 2014

The collapse of Langmuir monolayers of arachidic acid (AA) on water at various rates of molecular area compression has been investigated in situ by imaging ellipsometry (IE). The thickness of the collapsed AA molecules, which are inherently inhomogeneous, was determined by IE with a spatial resolution of a few microns. For the analysis, we determined the dielectric function of AA monolayers from 380 to 1690 nm by conventional spectroscopic ellipsometry. Compression rates ranged from 0.23 to $0.94{\AA}^2/min$. A change of multilayer domains was observed in the in situ IE images. Lower compression rates resulted in more uniform collapsed films. Our experimental results correspond with previous theoretical simulations.

• Korean Journal of Metals and Materials
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• v.46 no.2
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• pp.105-110
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• 2008

Process of the hydroxyapatite (HA) formation on bioactive titanium metal prepared by NaOH treatment in a modified-simulated body fluid (mSBF) containing bovine serum albumin (BSA) was investigated by high resolution transmission electron microscope attached with energy dispersive X-ray spectrometer (EDX). The amorphous titanate, which was formed on titanium surface by NaOH treatment, combined with the calcium ions in the liquid to form an amorphous calcium titanite. With increasing of soaking time in the liquid, an amorphous calcium titanite combined with the phosphate ions to form an amorphous calcium phosphate with low Ca/P atomic ratio, and it grows as aggregates of plate (or needle)-like substance on titanium surface. The crystalline apatite layers, which are needle-shaped with the c axis parallel to the long axis, are formed in an amorphous calcium phosphate with further increase in soaking time. The formation of needle-shaped apatite layers can be explained by electrostatic effects and difference of concentration between calcium, phosphate, and albumin ions.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.42-50
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• 2005

This paper presents an ultra precision machining system using a high sensitive force sensing module to measure machining forces and penetration displacement in a tip-based nanopatterning. The force sensing module utilizes a leaf spring mechanism and a capacitive displacement sensor and it has been designed to provide a measuring range from 80 ${\mu}N$ to 8 N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by X-Y scanning motion stage with 5 nm resolution. In nano indentation experiments and patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned samples were measured by AFM. Experimental results demonstrated that the developed system can be used as an effective device in nano indentation and nanopatterning operation.

• Proceedings of the KIEE Conference
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• 2003.04a
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• pp.137-139
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• 2003

In this paper, a design of VCM(Voice Coil Motor) for the measurement system of nano-level force and displacement was proposed and developed. This paper present the VCM shape for improvement of position resolution and guarantee of a large displacement. And then the finite element analysis method(FEM) utilized to produce linear driving thrust and satisfy required thrust of the system. The result shows the applicable possibility of the proposed VCM as a study for nano-level measurement system.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2003.10a
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• pp.154-157
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• 2003

Precision displacement of less than a few nm resolution was measured in real-time using fiber optic EFPI sensor. The novel method for real-time processing of analyzing EFPI output signal was developed and verified. Linearity in the mean values of interferometric light intensity among adjacent fringes was shown, and the sinusoidal approximation algorithm that estimates past and coming fringe values was verified through the linearity. Real-time signal processing program was developed, and the intensity signal of the EFPI sensor was transformed to the phase shift with this program. The resolution below 0.4 ~ 10 nm in the displacement range of $0 ~ 300\mu\textrm{m}$ was obtained by reducing the photodetector noise using low-pass filter and signal averaging. The nano-translation stage with a Piezo-electric actuator and the EFPI sensor system was designed and tested. This stage successfully reached to the desired destination in $15\mu\textrm{m}$ range within 1 nm accuracy.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.3
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• pp.40-45
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• 2008

This paper presents a linear positioning system and its control algorithm design with nano accuracy/resolution. The basic linear stage structure is driven by an ultrasonic motor and its displacement feedback is detected by a LDGI (Laser Diffraction Grating Interferometer), which can achieve nanometer resolution. Due to the friction driving property of the ultrasonic motor, the driving situation differs in various ranges along the travel. Experiments have been carried out in order to observe and realize the phenomena of the three main driving modes: AC mode (for mm motion), Gate mode (for ${\mu}m$ motion), and DC mode (for nm motion). A proposed FCMAC (Fuzzy Cerebella Model Articulation Controller) control algorithm is implemented for manipulating and predicting the velocity variation during the motion of each mode respectively. The PCbased integral positioning system is built up with a NI DAQ Device by a BCB (Borland $C^{++}$ Builder) program to accomplish the purpose of an intelligent nanopositioning control.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.3
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• pp.111-119
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• 2006

The ultra-precision stage is demanded for some industrial fields such as semiconductor lithography, ultra-precision machining, and fabrication of nano structure. A new stage was developed for those applications in order to obtain nano meter resolution. This stage consists of symmetric double parallelogram mechanism using flexure hinges. The mechanical properties such as strength of the flexures and deformations along the applied force were analyzed using FEM. The stage is actuated by a piezoelectric actuator and its movement was measured by a ultra-precision linear encoder. In order to improve positioning performance, a PID controller was designed based on the identified second order transfer function. Experimental results showed that this stage could be positioned within below 5 nm resolution irrespective of hysteresis and creep by the controller.