• Journal of the Korean Ceramic Society
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• v.45 no.1
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• pp.48-53
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• 2008

In order to reduce signal delay in ULSI, an intermetal material of low dielectric constant is required. Ordered mesoporous silica film is proper to intermetal dielectric due to its low dielectric constant and superior mechanical properties. The ordered mesoporous silica film prepared by TEOS (tetraethoxysilane) / MTES (methyltriethoxysilane) mixed silica precursor and Brij-76 surfactant was surface-modified by HMDS (hexamethyldisilazane) treatment to reduce its dielectric constant. HMDS can substitute $-Si(CH_3)_3$ groups for -OH groups on the surface of silica wall. In order to modify interior silica wall, HMDS was treated by two different processes except the conventional spin coating. One process is that film is dipped and stirred in HMDS/n-hexane solution, and the other process is that film is exposed to evaporated HMDS. Through the investigation with different HMDS treatment, it was concluded that surface modification in evaporated HMDS was more effective to modify interior silica wall of nano-sized pores.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.306-306
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• 2007

The surface was transformed to porous titanium oxide by the anodization of pure titanium. Titanium was anodized in non-aqueous and aqueous electrolytes at different potentials between 5 V and 150 V. Various electrolytes were compose of ethylene glycerol, $H_2SO_4,\;NH_4F\;and\;H_2O$. We obtained titania nanotube arrays on the micro pore of titanium. Micro pores and nano tubes were obtained by anodization at high potentials and low potentials, respectively. Morphologies of nanotubes and micro pore were characterized by FE-SEM. The unique surface structure is very attractive to electrical and medical applications such as gas sensor, biosensor, dental implant and stent.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.78-78
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• 2007

In semiconductor devices, Cu has been used for the formation of multilevel metal interconnects by the damascene technique. Also lower dielectric constant materials is needed for the below 65 nm technology node. However, the low-k materials has porous structure and they can be easily damaged by high down pressure during conventional CMP. Also, Cu surface are vulnerable to have surface scratches by abrasive particles in CMP slurry. In order to overcome these technical difficulties in CMP, electro-chemical mechanical planarization (ECMP) has been introduced. ECMP uses abrasive free electrolyte, soft pad and low down-force. Especially, electrolyte is an important process factor in ECMP. The purpose of this study was to characterize KOH and $KNO_3$ based electrolytes on electro-chemical mechanical. planarization. Also, the effect of additives such as an organic acid and oxidizer on ECMP behavior was investigated. The removal rate and static etch rate were measured to evaluate the effect of electro chemical reaction.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.111-111
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• 2010

최근 전자 소자의 집적기술은 기존의 2차원에서 System on package (SOP) 개념에 기반을 둔 3차원 집적 기술로 발전 되어가고 있다. 소자의 3차원 실장을 실현시키는 과정에서 세라믹의 여러 유용성이 언급되어져 왔지만, 취성이 매우 크다는 등의 단점이 있었다. 이러한 이유로 연성을 가지는 폴리머와 세라믹을 합성한 복합체 기판에 대하여 많은 연구가 되고 있다. 그러나 세라믹 제작을 위해서는 높은 공정온도가 요구되고 있고 이러한 높은 공정상에서의 온도는 3차원 실장에 있어서 문제점이 되고 있다. 이러한 문제점을 극복하기 위하여 상온에서 치밀한 세라믹 후막을 제작할 수 있는 공정인 Aerosol Deposition Method (ADM)방법으로 세라믹-폴리머 후막의 제조를 시도하였다. 일반적으로 ADM은 수백 나노의 출발 파우더를 사용하여 치밀한 세라믹 막을 형성하는데 사용된다. 본 연구에서는 ADM으로 100 nm미만의 나노 세라믹 파우더를 사용하여 다공성의 세라믹 후막을 제조한 후 resin을 함침시키는 방법으로 세라믹-폴리머 후막의 제조를 시도하였다. 그 결과 운송가스, aerosol 농도 등의 공정조건을 변화시켜 다공성의 $Al_2O_3$ 후막을 제조하였고, 이 다공성 후막은 반투명의 특성을 보이며 고충전율로 형성되었다. 이렇게 제조된 나노 다공성 $Al_2O_3$ 후막에 cyanate ester resin을 함침시키는 방법을 사용하여 $Al_2O_3$-cyanate ester 복합체 후막을 제조하였으며, 이의 비유전율 및 품질계수는 각각 1 MHz에서 6.7, 1000으로 우수한 유전특성을 보임이 확인되었다.

• Advances in nano research
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• v.5 no.2
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• pp.141-169
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• 2017

In this paper, a nanobeam connected to a rotating molecular hub is considered. The vibration behavior of rotating functionally graded nanobeam based on Eringen's nonlocal theory and Euler-Bernoulli beam model is investigated. Furthermore, axial preload and porosity effect is studied. It is supposed that the material attributes of the functionally graded porous nanobeam, varies continuously in the thickness direction according to the power law model considering the even distribution of porosities. Porosity at the nanoscopic length scale can affect on the rotating functionally graded nanobeams dynamics. The equations of motion and the associated boundary conditions are derived through the Hamilton's principle and generalized differential quadrature method (GDQM) is utilized to solve the equations. In this paper, the influences of some parameters such as functionally graded power (FG-index), porosity parameter, axial preload, nonlocal parameter and angular velocity on natural frequencies of rotating nanobeams with pure ceramic, pure metal and functionally graded materials are examined and some comparisons about the influence of various parameters on the natural frequencies corresponding to the simply-simply, simplyclamped, clamped-clamped boundary conditions are carried out.

• Advances in nano research
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• v.7 no.6
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• pp.379-390
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• 2019

Putting emphasis on the effect of existence of porosity in the functionally graded materials (FGMs) on the dynamic responses of waves scattered in FG nanobeams resulted in implementation of a novel porosity-based homogenization method for FGMs and show its applicability in a wave propagation problem in the presence of axial pre-load for the first time. In the employed porosity-dependent method, the coupling between density and Young's moduli is included to consider for the effective moduli of the FG nanobeam by the means of a more reliable homogenization technique. The beam-type element will be modeled via the classical theory of beams, namely Euler-Bernoulli beam theory. Also, the dynamic form of the principle of virtual work will be extended for such nanobeams to derive the motion equations. Applying the nonlocal constitutive equations of Eringen on the obtained motion equations will be resulted in derivation of the nanobeam's governing equations. Depicted results reveal that the dispersion responses of FG nanobeams will be decreased as the porosity volume fraction is increased which must be noticed by the designers of advanced nanosize devices who are interested in employment of wave dispersion approach in continuous systems for specific goals.

• Korean Journal of Metals and Materials
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• v.50 no.11
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• pp.839-845
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• 2012

The effect of an AlN additive on the thermoelectric properties of SiC ceramics was studied. Porous SiC ceramics with 48-54% relative density were fabricated by sintering the pressed ${\alpha}-SiC$ powder compacts with AlN at $2100-2200^{\circ}C$ for 3 h in an Ar atmosphere. In the undoped specimens, the Seebeck coefficients were positive (p-type semiconducting) possibly due to a dominant effect of the acceptor impurities (Al, Fe) contained in the starting powder. With AlN addition, the reverse phase transformation of 6H-SiC to 4H-SiC was observed during the sintering process. The electrical conductivity of the AlN doped specimen was larger than that of the undoped specimen under the same conditions, which might be due to a reverse phase trans-formation. The Seebeck coefficient of the AlN doped specimen was also larger than that of the undoped specimen. The density of specimen and the amount of addition had significant effects on the thermoelectric properties.

• Membrane and Water Treatment
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• v.6 no.4
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• pp.309-321
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• 2015

We report in this study the synthesis of mixed matrix reverse osmosis membranes by interfacial polymerization (IP) of thin film nanocomposite (TFNC) on porous polysulfone supports (PS). This paper investigates the synthesis of ZnO nanoparticles (NPs) using the sol-gel processing technique and evaluates the performance of mixed matrix membranes reached by these aerogel NPs. Aqueous m-phenyl diamine (MPD) and organic trimesoyl chloride (TMC)-NPs mixture solutions were used in the IP process. The reaction of MPD and TMC at the interface of PS substrates resulted in the formation of the thin film composite (TFC). NPs of ZnO with a size of about 25 nm were used for the fabrication of the TFNC membranes. These membranes were characterized and evaluated in comparison with neat TFC ones. Their performances were evaluated based on the water permeability and salt rejection. Experimental results indicated that the NPs improved membrane performance under optimal concentration of NPs. By changing the content of the filler, better hydrophilicity was obtained; the contact angle was decreased from $74^{\circ}$ to $32^{\circ}$. Also, the permeate water flux was increased from 26 to 49 L/m2.h when the content of NPs is 0.1 (wt.%) with the maintaining of lower salt passage of 1%.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.4
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• pp.109-116
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• 2019

The mechanical deformation of a battery separator causes internal short-circuiting of the cathode - anode, which directly affects the explosion/ignition of batteries. To increase the mechanical properties of the separator fabricated by electro-spinning, use of a thermal pressing method is inevitable. Therefore, this research aims to maximize the mechanical strength of a porous separator by finding the proper thermal press temperatures given to Electro-spun Polyacrylonitrile (PAN) nanofibers. The different thermal press temperatures $25^{\circ}C$, $50^{\circ}C$, $75^{\circ}C$, and $100^{\circ}C$ were applied to the electro-spun fiber at 30 MPa pressure for one hour. The higher the temperature, the higher the resultant tensile strength; however, a higher temperature also lowered the strain and porosity. Thus, the membrane thermal pressed at $50^{\circ}C$ showed the best mechanical properties and the second highest porosity. Using the data, $50^{\circ}C$ was judged as the best thermal pressing temperature in terms of performance.

• Korean Journal of Metals and Materials
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• v.47 no.11
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• pp.748-753
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• 2009

The surface morphology and the surface roughness of n-type SiC induced by wet-treatment using 45% KOH and buffered oxide etchant (BOE-1HF : $6H_2O$) were investigated by atomic force microscopy (AFM). While Si-face of SiC could be etched by alkali solutions such as KOH, acidic solutions such as BOE were hardly able to etch SiC. When the rough SiC samples were used, the surface roughness of etched sample was decreased after wet-treatment regardless of etchant, due to the planarization the of surface by widening of scratches formed by mechanical polishing. It was observed that the initial etching was affected by the energetically unstable sites, such as dangling bond and steps. However, when a relatively smooth sample was used, the surface roughness was rapidly increased after treatment at $180^{\circ}C$ for 1 hr and at room temperature for 4 hr by using KOH solution, resulting from the nano-sized structures such as pores and bumps. This indicates that porous SiC surface can be achieved by using purely chemical treatment.