• 반도체디스플레이기술학회지
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• 제18권1호
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• pp.5-9
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• 2019

Optical emission spectroscopy is used to identify chemical species and monitor the changes of process results during the plasma process. However, plasma process monitoring or fault detection by using emission signal variation monitoring is vulnerable to background signal fluctuations. IR heaters are used in semiconductor manufacturing chambers where high temperature uniformity and fast response are required. During the process, the IR lamp output fluctuates to maintain a stable process temperature. This IR signal fluctuation reacts as a background signal fluctuation to the spectrometer. In this research, we evaluate the effect of infrared background signal fluctuation on plasma process monitoring and improve the plasma process monitoring accuracy by using simple infrared background signal subtraction method. The effect of infrared background signal fluctuation on plasma process monitoring was evaluated on $SiO_2$ PECVD process. Comparing the $SiO_2$ film thickness and the measured emission line intensity from the by-product molecules, the effect of infrared background signal on plasma process monitoring and the necessity of background signal subtraction method were confirmed.

• 대한임베디드공학회논문지
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• 제11권1호
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• pp.21-27
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• 2016

An integrated display software platform for small UAV is developed based on parallel processing technique in this paper. When the small UAV with high-performance camera and avionic modules is employed to various surveillance-related missions, it is important to reduce the operator's workload and increase the monitoring efficiency. For this purpose, it is needed to develop an efficient monitoring software enable to manipulate the image and flight data obtained during flight within the given processing time and display them simultaneously. In this paper, we set up requirements and suggest the architecture for the software platform. The integrated software platform is implemented with parallel processing scheme. Based on AR drone, we verified that the various data are concurrently displayed by the suggest software platform.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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• pp.293-296
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• 2007

Gamma curve is one of the most important optical performance characteristics of a liquid crystal display. we present investigations on the relationship between gamma and polarizer. The gamma curve is affected by the angle of the polarizer absorption axis. When the crossed angle between the two polarizers turns larger, gamma values will decrease. The gamma variation caused from each polarizer variation could be improved by monitoring and controlling the axial direction of the polarizers.

• 반도체디스플레이기술학회지
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• 제14권3호
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• pp.37-43
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• 2015

In this paper, a new background subtraction algorithm for video based fence monitoring surveillance systems is proposed. We adopt the sampling based background subtraction technique and focus on the two main issues: handling highly dynamic environment and handling the flickering nature of pulse based IR (infrared) lamp. Natural scenes from fence monitoring system are usually composed of several dynamic entities such as swaying trees, moving water, waves and rain. To deal with such dynamic backgrounds, we utilize the confidence factor for each background value of the input image. For the flickering IR lamp, the original sampling based technique is extended to handle double background models. Experimental results revealed that our method works well in real fence monitoring surveillance systems.

• 반도체디스플레이기술학회지
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• 제17권3호
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• pp.104-107
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• 2018

In this paper, we developed a sensor for monitoring the leakage current through the chassis of the robot. The leakage current sensor needs to be developed because it is a necessary part to prevent electric shock accidents that may occur through the chassis of a robot or an electric vehicle. This leakage monitoring sensor was developed to be mounted directly on the chassis of the robot. This sensor protects the control system from noise by discharging static and high-frequency noise that may occur in the chassis of the robot and monitors the leakage current by measuring the amount of current discharged through the ground. In this paper, a leakage monitoring sensor was developed with a simple structure using resistors, capacitors and OP-AMP, and the performance was evaluated.

• 반도체디스플레이기술학회지
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• 제16권2호
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• pp.75-78
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• 2017

We reports improved monitoring performance of Self plasma-optical emission spectroscopy (SP-OES) by augmenting a by-pass tube to a conventional straight (or single) tube type self plasma reactor. SP-OES has been used as a tool for the monitoring of plasma chemistry indirectly in plasma process system. The benefits of SP-OES are low cost and easy installation, but some semiconductor industries who adopted commercialized SP-OES product experiencing less sensitivity and slow sensor response. OH out-gas chemistry monitoring was performed to have a direct comparison of a conventional single type tube and a by-pass type tube, and fluid dynamic simulation on the improved hardware design was also followed. It is observed faster pumping out of OH from the chamber in the by-pass type SP-OES.

• 반도체디스플레이기술학회지
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• 제20권2호
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• pp.56-60
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• 2021

Recently, technologies for internet of things have been rapidly advanced with development of network. Also interest in smart healthcare that informs about motion information of users has been growing. In this paper, a system that is monitoring the weight on both feet by using aduino and FSR(Force Sensitive Resistor) Sensor is implemented. A 4-channel sensor driver module was implemented to measure a more accurate weight value. It is monitoring the weight on both feet by the using an application for either your PC or mobile device. Mobile applications can contribute to reducing human damage by sending messages along with location in emergency situations, such as injuries caused by falls during outdoor activities.

• 반도체디스플레이기술학회지
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• 제21권1호
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• pp.17-21
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• 2022

In the case of the manufacturing industry that produces high-tech components such as semiconductors and large flat panel displays, the manufacturing space is made into a cleanroom to increase product yield and reliability, and various environmental factors have been managed to maintain the environment. Among them, airborne particle is a representative management item enough to be the standard for actual cleanroom grade, and a sequential particle monitoring system is usually used as one parts of the FMS (Fab or Facility monitoring system). However, this method has a problem in that the measurement efficiency decreases as the length of the sampling tube increases. In this study, in order to solve this problem, a multiple regression model was created. This model can correct the measurement error due to the decrease in efficiency by sampling tube length.

• 반도체디스플레이기술학회지
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• 제23권2호
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• pp.129-134
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• 2024

This study aims to talk about the necessity of solving the PFC gas emission problem raised by the recent development of the semiconductor industry and the remote plasma source method monitoring system used in the semiconductor industry. The 'monitoring system' means that the researchers applied machine learning to the existing monitoring technology and modeled it. In the process of this study, Residual Gas Analyzer monitoring technology and linear regression model were used. Through this model, the researchers identified emissions of at least 12700mg CO2 to 75800mg CO2 with values ranging from ion current 0.6A to 1.7A, and expect that the 'monitoring system' will contribute to the effective calculation of greenhouse gas emissions in the semiconductor industry in the future.

• 대한인간공학회지
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• 제31권2호
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• pp.353-362
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• 2012

Objective: The aim of this study is developing the navigation radar display of navy ship with ecological interface design (EID) framework. Background: Navy ship radar operator must perform navigation support tasks by monitoring the complex and diverse information presented on the radar display. Current radar display is limited in effective navigation aid and response to an unusual state immediately. It is necessary to develop an effective radar display. Method: Ten navy radar operators performed a series of trials in a low-fidelity radar simulation in which they attempted to solve the problems of current navigation situation. Results: The result demonstrated that the ecological interface's performance was better than the existing radar display on performance time and subjective mental workload. Conclusion: This study expand EID study field to navy ship radar display and confirm ecological display is better than existing radar display in performance time, subjective mental work load. Application: The result of this study may help to improve navy ship navigation radar display currently in use.