OES based PECVD Process Monitoring Accuracy Improvement by IR Background Signal Subtraction from Emission Signal |
Lee, Jin Young
(Korea Institute of Machinery and Materials)
Seo, Seok Jun (Korea Institute of Machinery and Materials) Kim, Dae-Woong (Korea Institute of Machinery and Materials) Hur, Min (Korea Institute of Machinery and Materials) Lee, Jae-Ok (Korea Institute of Machinery and Materials) Kang, Woo Seok (Korea Institute of Machinery and Materials) |
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