• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.734-737
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• 2004

The metal-ferroelectric-semiconductor (MFS) structure is widely studied for nondestructive readout (NDRO) memory devices, but conventional MFS structure has a critical problem. It is difficult to obtain ferroelectric films like PZT on Si substrate without interdiffusion of impurities such as Pb, Ti and other elements. In order to solve these problems, the metal-ferroelectric-insulator-semiconductor (MFIS) structure has been proposed with a buffer layer of high dielectric constant such as MgO, $Y_2O_3$, and $CeO_2$. In this study, the etching characteristics (etch rate, selectivity) of MgO thin films were etched using $Cl_2/Ar$ plasma. The maximum etch rate of 85 nm/min for MgO thin films was obtained at $Cl_2$(30%)/Ar(70%) gas mixing ratio. Also, the etch rate was measured by varying the etching parameters such as ICP rf power, dc-bias voltage, and chamber pressure. Plasma diagnostics was performed by Langmuir probe (LP) and optical emission spectroscopy (OES).

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.4
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• pp.547-554
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• 2002

We are facing the serious environmental pollution difficulties such as acid rain, green house effects, etc. The gaseous matter NOx, SOx, VOCs which are regarded as main factors for these current pollutions are mainly emitted from power plants and vehicles. Therefore several leading countries are regulating the emissions strictly, especially the exhaust emissions from a Diesel engine without an aftertreatment device. The objective of this study is to find out soot and NO removal characteristics focused on the emissions of a Diesel engine by using nonthermal plasma for each engine speeds and loads. Electrostatic precipitator(wire-to-plate type reactor) is used for soot removal. Radicals generated from outer air and put into a mixing chamber in the end of exhaust line are used for NO removal. Concentration of exhaust emissions is analyzed from the gas analyzer(KaneMay) and FTIR to estimate by-products.

• Journal of the Korean Society of Marine Environment & Safety
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• v.12 no.4 s.27
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• pp.261-266
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• 2006

In this study, a scaled model chamber was built to investigate ventilation characteristics of the hood room in LNG carrier. Experimental study was performed in model by visualization equipment with laser apparatus. Four different kinds of measuring area were selected as experimental condition Instant simultaneous velocity vectors at whole field were measured by 2-D PIV system and its software adopting two-frame grey-level cross correlation algorithm. The flow pattern reveals the large scale counter-clockwise forced-vortex rotation at center area.

• Journal of ILASS-Korea
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• v.22 no.3
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• pp.137-145
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• 2017

This paper describes numerical modeling of transcritical and supercritical fluid flows within a liquid propellant rocket engine. In the present paper, turbulence is modeled by standard $k-{\varepsilon}$ model. A conserved scalar approach in conjunction with multi-environment probability density function model is used to account for the turbulent mixing of real-fluids in the transcritical and supercritical region. The two real-fluid equations of state and dense-fluid correction schemes for mixtures are used to construct thermodynamic data library based on the conserved scalar. In this study, calculations are made on two cryogenic nitrogen jets under different chamber pressures. Sensitivity analysis for two different real-fluid equations of sate is particularly emphasized. Based on numerical results, precise structures of cryogenic nitrogen jets are discussed in detail. Numerical results show that the current real-fluid model can predict the essential features of the cryogenic liquid nitrogen jets.

• Transactions on Electrical and Electronic Materials
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• v.9 no.1
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• pp.1-5
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• 2008

ZnS is an attractive material for future optical and electrical devices since it has a direct and wide band gap to provide blue emission at room temperature. In this study, inductively coupled $BCl_3/Ar$ plasma was used to etch ZnS:Mn thin films. The maximum etch rate of 164.2 nm/min for ZnS:Mn was obtained at a $BCl_3(20)/Ar(80)$ gas mixing ratio, an rf power of 700 W, a dc bias voltage of -200V, a total gas flow of 20 sccm, and a chamber pressure of 1Pa. The etch behaviors of ZnS:Mn thin films under various plasma parameters showed that the ZnS:Mn were effectively removed by the chemically assisted physical etching mechanism. The surface reaction of the ZnS:Mn thin films was investigated by X-ray photoelectron spectroscopy. The XPS analysis revealed that Mn had detected on the surface ZnS:Mn etched in $BCl_3/Ar$ plasma.

• 한국전산유체공학회:학술대회논문집
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• 1996.05a
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• pp.99-104
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• 1996

The jet pump is being used in many fields for several purposes because of its simple construction and easy operation. The characteristics of the geometrical variables, pressure gradient and velocity distribution of the jet pump are studied using the CFD technique. The flow calculations through a bended nozzle. a mixing chamber and a venturi are presented and phenomenological aspects are discussed. This study solve 3-D steady incompressible Navier-Stokes equations using the Iterative time marching scheme. The governing equations are differenced with 1st-order accurate backward difference scheme for the time derivatives and 3rd-order accurate QUICK scheme for the convective terms. The Mark-and-cell concept was applied efficiently to solve continuity equation, which is differenced 2nd-order accurate central differenced scheme. The 4th-order artificial damping is added to the continuity equation for numerical stability. A O-type of grid system is generated inside a nozzle and venturi of the jet pump. It has concluded that the results of present study properly agree with physical flow phenomena.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.8
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• pp.1128-1138
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• 2000

Pumping action in ejector systems is generally achieved through the mixing of a high-velocity and high-energy stream with a lower-velocity and lower-energy stream within a duct. The design and performance evaluation of the ejector systems has developed as a combination of scale-model experiments, empiricism and theoretical analyses applicable only to very simplified configurations, because of the generic complexity of the flow phenomena. In order to predict the detailed performance characteristics of such systems, the flow phenomena throughout the operating regimes of the ejector system should be fully understood. This paper presents the computational results for the two-dimensional supersonic ejector system with a second throat. The numerical simulations are based on a fully implicit finite volume scheme of the compressible Reynolds-averaged Navier-Stokes equation in a domain that extends from the stagnation chamber to the diffuser exit. For a wide range of the operating pressure ratio the flow field inside the ejector system is investigated in detail. The results show that the supersonic ejector systems have an optimal throat area for the operating pressure ratio to be minimized.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.234.2-234.2
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• 2014

Organic light emitting diode (OLED) is considered as the next generation flat panel displays due to its advantages of low power consumption, fast response time, broad viewing angle and flexibility. For the flexible application, it is essential to develop thin film encapsulation (TFE) to protect oxidation of organic materials from oxidative species such as oxygen and water vapor [1]. In many TFE research, the inorganic film by atomic layer deposition (ALD) process demonstrated a good barrier property. However, extremely low throughput of ALD process is considered as a major weakness for industrial application. Recently, there has been developed a high throughput ALD, called 'spatial ALD' [2]. In spatial ALD, the precursors and reactant gases are supplied continuously in same chamber, but they are separated physically using a purge gas streams to prevent mixing of the precursors and reactant gases. In this study, the $Al_2O_3$ thin film was deposited by spatial ALD process. We characterized various process variables in the spatial ALD such as temperature, scanning speed, and chemical compositions. Water vapor transmission rate (WVTR) was determined by calcium resistance test and less than $10-^3g/m^2{\cdot}day$ was achieved. The samples were analyzed by x-ray photoelectron spectroscopy (XPS) and field emission scanning electron microscope (FE-SEM).

• Journal of Welding and Joining
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• v.28 no.2
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• pp.47-53
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• 2010

According to the research report for the recent a few years, the dissimilar welding of Cu and STS 304 alloy have been presented that a weldability is very poor. This article present a study on Lap joint by Electron beam welding dissimilar materials. The weld metals was constituted between pure copper and STS 304 steel. The experiment was performed with 125mA welding current, 520mA focusing current. The Vacuum condition of chamber is 5${\times}$10-5torr and welding speed is 300mm/min. Showing the bead shape of weld metal, the thickness of the stainless 304 using as the protect materials is 3mm and the thickness of a copper is 15mm. The analysis about the microstructure were carried out in which it was observed with SEM. The results showed that complex heterogeneous fusion zone microstructure characterized both by rapid cooling and mixing of the molten metal, however the liquation crack was formated in the fusion line.

• Journal of the Korean Society of Propulsion Engineers
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• v.10 no.1
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• pp.23-29
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• 2006

In an annular injection supersonic ejector, the supersonic primary flow is injected along the side wall, therefore a funnel-shaped shock wave is generated by the contraction angle of the mixing chamber. In the present study, we developed a simple funnel shock wave model using 2-D wedge and conical shock wave relations. In result, the secondary flow pressure can be predicted more accurately than using a simple 2-D wedge shock wave model. Through the same analysis, the compression ratio and the adiabatic efficiency according to the entrainment ratio were calculated.