Etching Properties of ZnS:Mn Thin Films in an Inductively Coupled Plasma |
Kim, Gwan-Ha
(School of Electrical and Electronics Engineering, Chung-ang University)
Woo, Jong-Chang (School of Electrical and Electronics Engineering, Chung-ang University) Kim, Kyoung-Tae (School of Electrical and Electronics Engineering, Chung-ang University) Kim, Dong-Pyo (School of Electrical and Electronics Engineering, Chung-ang University) Kim, Chang-Il (School of Electrical and Electronics Engineering, Chung-ang University) |
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