• Title/Summary/Keyword: microvibration

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Active Vibration Control System Design for Nano-scale Stage (초정밀 스테이지용 능동 진동제어시스템 설계)

  • Lee, Joo-Hoon;Lee, Se-Han;Hwang, Don-Ha;Kim, Yong-Joo;Choi, Young-Kiu
    • Proceedings of the KIEE Conference
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    • 2004.07d
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    • pp.2495-2497
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    • 2004
  • A system, featuring the hybrid isolator for control in the vertical direction, of active microvibration control was proposed. The main components of this system are a stage vibration isolation table with built-in acceleration sensors for detecting microvibration, hybrid isolators and a digital controller with high precision signal converters. The vibration control algorithm is focused on settling-time critical application and feedback/feedforward combination.

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Design of Hybrid Electromagnetic Actuator against Microvibration (미진동 저감을 위한 복합형 전자기식 액추에이터 설계)

  • Moon, S.J.;Choi, S.M.;Jeong, J.A.;Kim, C.H.
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2009.10a
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    • pp.299-304
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    • 2009
  • A hybrid electromagnetic actuator with an air spring is designed so as to achieve the desired isolation reduce the vibration efficiency on the floor vibration. The performance specification of the hybrid electromagnetic actuator is determined based on the vibration criterion for vibration-sensitive equipment. In basic design stage of the electromagnetic actuator, the simple reluctance method is adapted to analyze magnetic circuits. The result is verified by finite element analysis using ANSYS Emag. Finally, some design parameters are optimized under several constraint conditions. Through this study, the design procedure for a specific electromagnetic actuator is set up using a simple reluctance method.

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A Study on the Development of a Hybrid Electromagnetic Actuator Against Microvibration (미진동 저감을 위한 복합형 전자기식 작동기의 개발에 대한 연구)

  • Moon, S.J.;Park, S.H.;Jeong, J.A.;Huh, Y.C.;Kim, C.H.;Choi, S.M.
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.21 no.5
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    • pp.475-483
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    • 2011
  • A hybrid electromagnetic actuator with an air mount is designed so as to achieve the desired isolation reduce the vibration efficiency on the floor vibration. The performance specification of the hybrid electromagnetic actuator is determined based on the vibration criterion for vibration-sensitive equipment. In the design stage of the electromagnetic actuator, the simple reluctance method is adapted to analyze magnetic circuits. The result is verified by finite element analysis using ANSYS Emag. Finally, in order to confirm the design performance, a dynamic characteristic test is carried out for the prototype of a hybrid electromagnetic actuator.

Development of Microvibration Sensing Appratus using Photo Coupler (포토커플러를 이용한 미세 진동 측정장치)

  • 김호수;구경완;이명섭;김유배;이승권
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.798-801
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    • 2001
  • we have investigated a characteristic of a vibration displacement detector, which was made with a photocoupler. Output signals of the detector were dominant at 700Hz of the frequency of vibrator, and It was maximum, when the amplitude of input signal had been at 1.1V. The detector will be used in measuring the surface roughness of substrates.

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Optical Design of Satellite Camera for Lens Shifting Image Stabilization (렌즈 시프팅 영상 안정화 기법 적용을 위한 위성카메라의 광학설계)

  • Tak, Jun-Mo;Hwang, Jai-Hyuk
    • Journal of Aerospace System Engineering
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    • v.10 no.4
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    • pp.17-25
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    • 2016
  • In this study, an optical system for a lens-shifting method that compensates for microvibration of a high-agility small satellite has been designed. The lens-shifting method is an image-stabilization technique that can be applied to compensate for the optical path disturbed by microvibration. The target optical system is designed by using Code-V, a commercial optical-design code. The specifications for real satellite cameras have established the requirements for optical design. The Ray aberration curve, spot diagram, and MTF curve were carried out to verify if the designed optical system meets the requirements or not. The designed Schmidt-Cassegrain optical system with field flattener and a vibration-reduction lens has been verified to meet the optical requirements, 33% of MTF at Nyquist frequency, GSD of 2.87 m, and vibration coefficient of 0.95~1.0.

Characteristics Analysis of a Pseudoelastic SMA Mesh Washer Gear for Jitter Attenuation of Stepper-actuated Gimbal-type Antennas (스텝모터 구동형 짐벌 안테나의 미소진동저감을 위한 초탄성 형상기억합금 메쉬 와셔 기어의 기본특성 분석)

  • Park, Yeon-Hyeok;You, Chang-Mok;Oh, Hyun-Ung
    • Journal of Aerospace System Engineering
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    • v.12 no.2
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    • pp.46-58
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    • 2018
  • A two-axis gimbal-type X-band antenna is widely used to transmit bulk image data from high-resolution observation satellites. However, undesirable microvibrations induced by driving the antenna should be attenuated, because they are a main cause of image-quality degradation of the observation satellite. In this study, a pseudoelastic memory alloy (SMA) gear was proposed to attenuate the microvibrations by driving the antenna in an azimuth angle. In addition, the proposed gear can overcome the limitations of the conventional titanium blade gear, which is not still enough and is vulnerable to plastic deformations under excessive torque. To investigate the basic characteristics of the proposed SMA mesh washer gear, a static load test was performed on the thickness of the SMA mesh washer and the rotation of the gear. Moreover, The microvibration measurement test demonstrated that the SMA mesh washer gear proposed in this study is effective for microvibration attenuation.

Experimental Model Analysis of Double Floor (실험적 모드해석법에 의한 이중바닥구조의 동특성 해석)

  • 변근주;노병철;이헌주;이호범
    • Proceedings of the Korea Concrete Institute Conference
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    • 1993.10a
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    • pp.207-212
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    • 1993
  • When constructing highly precise production plants, for example, super LSI plants or semiconductor plants, it is important to take the necessary control countermeasures into consideration to obtain the working microvibration environment, which is directly related to product precision. Working environment of a clean room means vibration-free and there are only ultra-miro vibration which human cannot sense. In order to provide an place having a vibration-free working environment with only ultra-micro vibration it is necessary to posses a great number of vibration isolation technlogies, wide-ranging and abundant survey and teat data, and a high level of knowledge enabling comprehensive judgments to be made. In this study, experimental modal analysis is used to analyze the dynamic characteristics of double floor for vibration-proofing near apparatus which generate vibration. It is concluded that the double floor system with rubber pad inserted between floor panel and pedestal is good for vibration proof.

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Performance Evaluation of RWA Vibration Isolator Using Notch Filter Control (노치 필터 제어기법을 이용한 반작용 휠 미소진동 절연장치의 절연성능 평가)

  • Park, Geeyong;Suh, Jong-Eun;Lee, Dae-Oen;Han, Jae-Hung
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.26 no.4
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    • pp.391-397
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    • 2016
  • Vibration disturbances induced by the reaction wheels can severely degrade the performance of high precision payloads on board satellites with high pointing stability requirements. The unwanted disturbances produced by the reaction wheels are composed of fundamental harmonic disturbances due to the flywheel imbalance and sub/higher harmonic disturbances due to bearing irregularities, motor imperfections and so on. Because the wheel speed is constantly changed during the operation of a reaction wheel, the vibration disturbance induced by the reaction wheels can magnify the satellite vibration when the rotating frequency of wheel meets the natural frequency of satellite structure. In order to provide an effective isolation of the reaction wheel disturbances, isolation performance of a hybrid vibration isolator is investigated. In this paper, hybrid vibration isolator that combines passive and active components is developed and its hybrid isolation performance using notch filter control is evaluated in single-axis. The hybrid isolation performance using notch filter control show additional performance improvement compared to the results using only passive components.