Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2001.07a
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- Pages.798-801
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- 2001
Development of Microvibration Sensing Appratus using Photo Coupler
포토커플러를 이용한 미세 진동 측정장치
Abstract
we have investigated a characteristic of a vibration displacement detector, which was made with a photocoupler. Output signals of the detector were dominant at 700Hz of the frequency of vibrator, and It was maximum, when the amplitude of input signal had been at 1.1V. The detector will be used in measuring the surface roughness of substrates.