• 대한기계학회논문집A
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• 제30권10호
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• pp.1261-1268
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• 2006

This paper reports low-cost microreactor $(10{\mu}{\ell})$ biochip for the DNA PCR (polymerase chain reaction). The microbiochip $(20mm{\times}28mm)$ is a hybrid type which is composed of PDMS (polydimethylsiloxane) layer with serpentine micochannel $(360{\mu}m{\times}100{\mu}m)$ chamber and glass substrate integrated with microheater and thermal microsensor. Undesirable bubble is usually created during sample loading to PMDS-based microchip because of hydrophobic chip surface. Created bubbles interrupt stable biochemical reaction. We designed improved microreactor chamber using microfluidic simulation. The designed reactor has a coner-rounded serpentine channel architecture, which enables stable injection into hydrophobic surface using micropipette only. Reactor temperature needed to PCR reaction is controlled within ${\pm}0.5^{\circ}C$ by PID controller of LabVIEW software. It is experimentally confirmed that SRY gene PCR by the fabricated microreactor chip is performed for less than 54 min.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.78-79
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• 2008

In this paper, poly 3C-SiC thin films were grown on $SiO_2$/Si by atmospheric pressure chemical vapor deposition (APCVD) using HMDS, $H_2$, and Ar gas at $1100^{\circ}C$ for 30 min, respectively. And then, palladium films were deposited on poly 3C-SiC by RF magnetron sputter. Thickness, uniformity, and quality of these samples were performed by SEM. Crystallinity and preferred orientationsof palladium were analyzed by XRD. And Pd/poly 3C-SiC schottky diodes were fabricated and characterized by current-voltage measurements. Its electric current density Js and barrier height voltage were measured as $2\times10^{-3}$ A/$cm^2$, 0.58 eV, respectively. And these devices operated about $350^{\circ}C$. From results, Pd/poly 3C-SiC devices are promising for high temperature hydrogen sensor and applications.

• 약학회지
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• 제49권2호
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• pp.115-121
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• 2005

In this study, the performance of a portable NIR system and a FT NIR spectrometer were compared to determine water content of hairless mouse skin. The stratum corneum parts wer e separated from the epidermal tissues by trypsin solution. NIR diffuse reflectance spectra of hairless mouse skin were acquired using a fiber optic probe. In the near infrared, water molecules show two clear absorption bands at 1450 nm from first overtone of O-H stretching and 1940 nm from the combination involving O-H stretching and O-H deformation. It was found that the variations of O-H absorption band according to water content. Partial least squares regression (PLSR) was applied to develop a calibration model. The PLS model showed a good correlation between NIR predicted value and the absolute water content of separated hairless mouse skin, in vitro. For both the portable and the FT NIR spectrometer, These studies showed the possibility of a rapid and nondestructive skin moisture measurement using NIR spectroscopy. The portable NIR spectrometer with a photodiode arrays-microsensor could be more rapidly applied for the determination of water content with comparable accuracy with the performance of a FT spectrometer .

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.175-176
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• 2007

This paper describes on the characteristics of Pd thin films deposited on poly-crystalline 3C-SiC buffer layers for microsensors, in which the poly 3C-SiC was grown on Si, $SiO_2$, and AlN substrates, respectively, by APCVD using HMDS, $H_2$, and Ar gas at $1100^{\circ}C$ for 30 min. In this work, a Pd thin film was deposited on the poly 3C-SiC film by RF magnetron sputter. The thickness, uniformity, and quality of these samples were evaluated by SEM. Crystallinity and orientation of the Pd film were analyzed by XRD. Finally, Pd/poly 3C-SiC schottky diodes were fabricated and characterized by current-voltage measurements. From these results, Pd/poly 3C-SiC devices are promising for high temperature hydrogen sensors and other microsensors.

• 대한기계학회논문집A
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• 제34권12호
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• pp.1785-1791
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• 2010

중합효소 연쇄반응(PCR)을 수행하려면 세포 용해(cell lysis)와 DNA추출(DNA purification)과정이 포함된 시료 전처리 과정을 거쳐야 한다. 종래의 시료 전처리 과정은 계면활성제와 같은 세포용해 버퍼를 이용하거나 열 또는 전기적 방법으로 세포막 파열을 유도하여 세포벽을 깬 후에 잔여물 처리과정을 거쳐 DNA를 추출하게 된다. 본 연구에서는 마이크로 비드와 PDMS 기둥을 이용한 필터가 있는 시료 전처리용 바이오칩을 설계 및 제작하였다. 또한 제작된 바이오칩을 사용하여 $80^{\circ}C$에서 2분간 세포용해를 수행하고 DNA를 추출하였다. 칩에서 전처리과정을 거친 시료내의 DNA농도와 순도를 측정하고 DNA PCR과 겔 전기영동을 통해 시료 전처리용 바이오칩의 성능을 평가하였다.

• 한국전기전자재료학회논문지
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• 제13권6호
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• pp.509-513
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• 2000

The physical and electrical characteristics of MgO and Pt thin-films on it deposited by reactive sputtering and rf magnetron sputtering respectively were analyzed with annealing temperature and time by four point probe SEM and XRD. Under annealing conditions of 100$0^{\circ}C$ and 2 hr, MgO thin-film had the properties of improving Pt adhesion to SiO$_2$and insulation without chemical reaction to Pt thin-film and the sheet resistivity and the resistivity of Pt thin-film deposited on it were 0.1288 Ω/ and 12.88 $\mu$$\Omega$.cm respectively. We made Pt resistance pattern on SiO$_2$/Si substrate by life-off method and fabricated Pt thin-film type microheater for thermal microsensors by Pt-wire Pt-paste and SOG(spin-on-glass). In the temperature range of 25~40$0^{\circ}C$ we estimated TCR(temperature coefficient of resistance) and resistance ratio of thin-film type Pt-RTD(resistance thermometer device). We obtained TCR value of 3927 ppm/$^{\circ}C$ close to the bulk Pt value. Resistance values were varied linearly within the range of the measurement temperature. The thermal characteristics of fabricated thin-films type Pt micorheater were analyzed with Pt-RTD integrated on the same substrate. The heating temperature of Pt microheater could be up to 40$0^{\circ}C$ with 1.5 watts of the heating power.

• 센서학회지
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• 제29권4호
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• pp.266-269
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• 2020

In this study, we investigated the effect of a sulfur passivation (S-passivation) process step on the electrical properties of surface-channel In_0.7Ga_0.3As quantum-well (QW) metal-oxide-semiconductor field-effect transistors (MOSFETs) with S/D regrowth contacts. We fabricated long-channel In_0.7Ga_0.3As QW MOSFETs with and without (NH₄)₂S treatment and then deposited 1/4 nm of Al₂O₃/HfO₂ through atomic layer deposition. The devices with S-passivation exhibited lower values of subthreshold swing (74 mV/decade) and drain-induced barrier lowering (19 mV/V) than the devices without S-passivation. A conductance method was applied, and a low value of interface trap density D_it (2.83×10¹² cm^-2eV^-1) was obtained for the devices with S-passivation. Based on these results, interface traps between InGaAs and high-κ are other defect sources that need to be considered in future studies to improve III-V microsensor sensing platforms.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1968-1970
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• 1996

We investigate a surface-micromachined polysilicon microgyroscope, whose resonant frequencies are electrostatically-tunable after fabrication. The microgyroscope with two oscillation nudes has been designed so that the resonant frequency in the sensing mode is higher than that in the actuating mode. The microgyroscope has been fabricated by a 4-mask surface-micrormachining process, including the deep RIE of a $6{\mu}m$-thick LPCVD polycrystalline silicon layer. The resonant frequency in the sensing mode has been lowered to that in actuating mode through the adjustment of an inter-plate bias voltage; thereby achieving a frequency matching at 5.8kHz under the bias voltage of 2V in a reduced pressure of 0.1torr. For an input angular rate of $50^{\circ}/sec$, an output signal of 20mV has been measured from the tuned microgyroscope under an AC drive voltage of 2V with a DC bias voltage of 3V.

• 센서학회지
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• 제6권4호
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• pp.307-315
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• 1997

본 논문에서는 센서교환이 용이하고 소량의 샘플을 요구하는 ISFET 센서용 전해질 분석기의 샘플챔버(sample chamber)를 설계하였으며, 이를 이용한 2점 교정방식의 4채널 전해질 분석기를 구현하였다. 샘플과 교정용액들의 사용을 최소화하기 위한 샘플의 로딩상태 감지회로를 제안하였으며 이를 실현하였다. 구현된 전해질 분석기는 제어계통과 액류흐름계통으로 구성되어 있으며 전해질 분석기의 효과적인 제어를 위하여 측정루틴, 교정루틴 및 세척루틴의 시스템 소프트웨어를 각각 개발하였다.

• 센서학회지
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• 제5권3호
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• pp.41-48
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• 1996

SOx 가스를 고감도로 감지할 수 있는 SAW 가스 센서를 개발하였다. 이는 SAW device 위에 SOx 가스에 감응하는 재료를 박막으로 증착함으로써 고감도의 마이크로 센서형으로 한 것이다. SOx 감응 재료로서 CdS를 선정하였으며, 이를 SAW device 위에 박막화하기 위해 초음파 분무 노즐을 이용한 분무 열분해의 박막 증착공정을 응용하였다. 초음파 분무 노즐을 통하여 생성된 균일하고 미세한 입자들은 기판위에서 안정한 열분해 환경을 조성함으로써 센서 감응막을 위한 넓은 표면적의 박막을 증착 시켰는데 기판의 온도는 $300^{\circ}C$ 내외에서 최소 50 nm수준의 결정립의 박막을 얻었다. 이렇게 하여 얻은 SAW 가스 센서는 $SO_{2}$ 가스에 감응하였으며 재현성도 보였다. 다른 가스의 존재하에서 $SO_{2}$ 가스에 대한 선택성에 관하여는 계속적인 연구가 필요하다.