Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.11a
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- Pages.175-176
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- 2007
Depositions of Pd thin films on poly-crystalline 3C-SiC buffer layers for microsensors
다결정 3C-SiC 완충층위에 마이크로 센서용 Pd 박막 증착
- Ahn, Jeong-Hak (University of Ulsan) ;
- Chung, Jae-Min (University of Ulsan) ;
- Chung, Gwiy-Sang (University of Ulsan)
- Published : 2007.11.01
Abstract
This paper describes on the characteristics of Pd thin films deposited on poly-crystalline 3C-SiC buffer layers for microsensors, in which the poly 3C-SiC was grown on Si,