Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.06a
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- Pages.78-79
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- 2008
Fabrications of Pd/poly 3C-SiC schottky diodes for hydrogen gas sensor at high temperatures
고온 가스센서용 Pd-다결정 3C-SiC 쇼트키 다이오드 제작
- Ahn, Jeong-Hak (School of Electrical Eng., University of Ulsan) ;
- Chung, Gwiy-Sang (School of Electrical Eng., University of Ulsan)
- Published : 2008.06.19
Abstract
In this paper, poly 3C-SiC thin films were grown on