• Journal of the Korean Society for Precision Engineering
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• v.17 no.7
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• pp.28-28
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• 2000

• Journal of the Korean Society for Precision Engineering
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• v.17 no.7
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• pp.27-35
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• 2000

재료가공분야에의 레이저의 적용은 1960년대 후반부터 시작되었으며, 고출력 CO$_2$ 와 Nd:YAG 레이저가 많은 산업분야에서 보편화될 정도로 발전하여 왔다. 재료가공에서의 레이저의 적용분야는 금속의 절단, 용접 및 드릴링, 세라익의 스크라이빙, 플라스틱과 복합재의 절단 및 여러 가지 재료의 마킹 등을 포함한다. 이와 같은 모든 응용에서 공통적인 것이 레이저 조사에 의해 재료를 용융, 증발시키는 열적 메카니즘이다.(중략)

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.10 no.5
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• pp.680-687
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• 1999

An extensive study on miniaturized bandpass filter(BPF) appropriate for mobile communication systems is presented in this paper. The miniaturization has been accomplished by incorporating low-loss high-index materials inside a resonating cavity fabricated in silicon substrate using micromachining etching techniques. By use of materials with dielectric constant $\varepsilon_r$=500, filters with volume less than 0.11 $mm^3$ have been designed at the center frequency of 5.8 GHz with 3.3% bandwidth. The electrical performances and design tolerances of these filters for a variety of materials and shapes are discussed and design guidelines are presented herein.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1391-1393
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• 1994

A silicon microbridge flow sensor has been developed. The heat transfer within silicon microbridge is modeled to predict the characteristics of the sensor. The flow sensor shows high sensitivity at small flow rate. This device is simple to fabricate, using standard IC and micromachining technology.

• Proceedings of the KIEE Conference
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• 1998.07g
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• pp.2504-2508
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• 1998

In this paper, we propose the new detecting method for three dimensional piezoresistive silicon accelerometer. Furthermore the accelerometer is formed to have endurance for high temperature by perfect isolation of the piezoresistors using Silicon On Insulator(SOI) wafer. Sensor size are optimized with analytical formulae and extended with FEM simulation for the more detailed results. The accelerometer was fabricated by bulk micromachining techonology. We measured the temperature characteristics and the output characteristics, and the both characteristics were compared with the simulated results

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3298-3300
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• 1999

In this paper, a $10{\times}10$ micro SLM array for phase and amplitude modulation of incident light is designed and fabricated using surface micromachining technology. Hidden spring structure is used in order to maximize the fill-factor and minimize diffraction effect at the support posts. Static and dynamic characteristics of designed micro SLM are simulated with ABAQUS and measured with optical measurement system using He-Ne laser and PSD(position sensitive devise).

• Proceedings of the KIEE Conference
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• 1996.11a
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• pp.416-418
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• 1996

A $50{\times}50{\mu}m^2$ aluminum micromirror array is fabricated using surface micromachining technology. $50{\times}50$ micromirrors are arrayed two dimensionally. The micromirror plate is supported by a vertical spring structure that is placed underneath the mirror plate. When the mirror plates reflect a light, the micromirror array un have large effective reflecting area. Fabrication of vertical spring uses only one mask and shadow evaporation process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.187-188
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• 2011

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.12
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• pp.1159-1165
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• 2013

Powder blasting, which is an efficient micromachining method for glass, silicon, and ceramics, has a critical disadvantage in that the surface finish is poor owing to the brittle fracture of materials. Low-pressure waterjet machining can be applied to smoothen the rough surface inside the blasted structure. In this study, the surface roughness and sectional dimension of micro-channels are observed during the repetitive application of a waterjet to blasted micro-channels. The asperities and subsurface cracks created by blasting are removed by waterjet machining. Along with the surface roughness, it is found that the sectional dimension increases and the edges of the finished micro-channel become slightly round. Finally, a microfluidic chip is machined by the blasting-waterjet process and a transparent microfluidic channel is obtained efficiently.

• Journal of Sensor Science and Technology
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• v.27 no.5
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• pp.311-316
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• 2018

An antenna-coupled bolometer-type terahertz sensor was designed, fabricated, evaluated, and utilized to obtain terahertz transmission images. The sensor consists of a thin film bowtie antenna that resonates accordingly in response to an incident terahertz beam, a heater that converts the applied current in the antenna into heat, and a microbolometer that converts the rise in temperature into a change in resistance. The device is fabricated by a bulk micromachining process on a 4-inch silicon wafer. The fabricated sensor chip has a size of $2{\times}2mm$ and an active area of $0.1{\times}0.1mm^2$. The temperature coefficient of resistance (TCR) of the bolometer film (VOx) is 2.0%, which is acceptable for bolometer applications. The output sensor signal is proportional to the power of the incident terahertz beam. Transmission images were obtained with a 2-axis scanning imaging system that contained the sensor. The small active area of the sensor will enable the development of highly sensitive focal plane array sensors in terahertz imaging cameras in the future.