Browse > Article
http://dx.doi.org/10.3795/KSME-B.2013.37.12.1159

Surface Smoothing of Blasted Glass Micro-Channels Using Abrasive Waterjet  

Son, Sung-Gyun (Dept. of Mechanical Design Engineering, Korea Polytechnic Univ.)
Han, Sol-Yi (Dept. of Mechanical Design Engineering, Korea Polytechnic Univ.)
Sung, In-Ha (Dept. of Mechanical Engineering, Hannam Univ.)
Kim, Wook-Bae (Dept. of Mechanical Design Engineering, Korea Polytechnic Univ.)
Publication Information
Transactions of the Korean Society of Mechanical Engineers B / v.37, no.12, 2013 , pp. 1159-1165 More about this Journal
Abstract
Powder blasting, which is an efficient micromachining method for glass, silicon, and ceramics, has a critical disadvantage in that the surface finish is poor owing to the brittle fracture of materials. Low-pressure waterjet machining can be applied to smoothen the rough surface inside the blasted structure. In this study, the surface roughness and sectional dimension of micro-channels are observed during the repetitive application of a waterjet to blasted micro-channels. The asperities and subsurface cracks created by blasting are removed by waterjet machining. Along with the surface roughness, it is found that the sectional dimension increases and the edges of the finished micro-channel become slightly round. Finally, a microfluidic chip is machined by the blasting-waterjet process and a transparent microfluidic channel is obtained efficiently.
Keywords
Glass Micromachining; Surface Roughness; Blasting; Waterjet Polishing; Microfludic Device;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Geschke, O., Klank, H. and Tellemann, P., 2004, Microsystem Engineering of Lab-on-a-Chip Devices, WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, pp. 161-168.
2 Zribi, A. and Fortin, J., 2003, Functional Thin Films and Nanostructures, Springer Science+Business Media, New York, pp. 70-72.
3 Iliescu, C. Chen, B. and Miao, J., 2008, "On the Wet Etching of Pyrex Glass," Sens. Actuator A, Vol. 143, pp. 154-161.   DOI   ScienceOn
4 Jeon, S. K., Shin, Y. J., Kim, B. H., Kim H. Y. and Jeon, B. H., 2003, "Micro-Machining of Glasses using Chemical-assisted Ultrasonic Machining," Trans. of the KSME (A), Vol. 27, No. 12, pp. 2085-2091.   과학기술학회마을   DOI   ScienceOn
5 Takeuchi, Y., Sawada, K. and Sata, T., 1996, "Ultraprecision 3D Micromachining of Glass," CIRP Annals, Vol. 45, No. 1, pp. 401-404.   DOI   ScienceOn
6 Sayah, A., Thivolle, P. A., Pararshar, V. K. and Gijs, M. A. M., 2010, "Three-dimensional Mixers with non- Planar Microchannels in a Monolithic Glass Substrate using Oblique Powder Blasting," J. Micromech. Microeng, vol. 20, 085028.   DOI   ScienceOn
7 Jauregui, A. L., Siller, H. R., Rodrigues, C. A. and Elias-Zuniga, A., 2010, "Evaluation of Micromechanical Manufacturing Processes for Microfluidic Devices," Int J Adv Manuf Technol, Vol. 48, pp. 963-972.   DOI
8 Shen, M, Walter, S., Dovat, L. and Gijs, M. A. M., 2011, "Planar Micro-Direct Methanol Fuel Cell Prototyped by Rapid Powder Blasting," Microelectronic Engineering, Vol. 88, pp. 1884-1886.   DOI   ScienceOn
9 Kirby, B. J. and Hasselbrink, E. F., 2004, "Zeta Potential of Microfluidic Substrates: 1. Theory, Experimental Techniques, and Effects on Separation," Electrophoresis, Vol. 25, pp. 187-202.   DOI   ScienceOn
10 Ghobeity, A., Crabtree, H. J., Papini, M. and Spelt, J. K., 2012, "Characterisation and Comparison of Microfluidic Chips formed using Abrasive Jet Micromachining and Wet Etching," J. Micromech. Microeng., Vol. 22, 025014.   DOI   ScienceOn
11 Wensink, H., Schalautmann, S., Goedbloed, M. H. and Elwenspoek, M. C., 2002, "Fine Tuning the Roughness of Powder Blasted Surfaces," J. Micromech. Microeng., Vol. 12, pp. 616-620.   DOI   ScienceOn
12 Wensink, H., Jansen, H. V., Berenschot, J. W. and Elwenspoek, M. C., 2001, "Mask Materials for Powder Blasting," J. Micromech. Microeng., Vol. 10, pp. 175-180.
13 Mineta, T., Takada, T., Makino, E., Kawashima, T. and Shibata, T., 2009, "A Wet Abrasive Blasting Process for Smooth Micromachining of Glass by Ductile-Mode Removal," J. Micromech. Microeng., Vol. 19, 015031.   DOI   ScienceOn
14 Hutchings, I. M., 1992, "Ductile-Brittle Transitions and Wear Maps for the Erosion and Abrasion of Brittle Materials," J. Phys. D: Appl. Phys., Vol. 25, pp. 212-221.   DOI   ScienceOn
15 Wensink, H. and C.Elwenspoek, M., 2002, "A closer look at the Ductile-Brittle Transition in Solid particle Erosion," Wear, Vol. 253, pp. 1035-1043.   DOI   ScienceOn
16 Slikkerveer, P. J., Bouten, P. C. P., Veld, F. H. and Scholten, H., 1998, "Erosion and Damage by Sharp Particles," Wear, Vol. 217, pp. 237-250.   DOI   ScienceOn