Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Design and Fabrication of Micro SLM for Phase and Amplitude Modulation

위상 및 방향 변조를 위한 초소형 광 변조기의 설계와 제작

  • Chung, Seok-Whan (School of Electrical Engineering, Seoul National University) ;
  • Kim, Yong-Kweon (School of Electrical Engineering, Seoul National University)
  • Published : 1999.07.19
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Abstract

In this paper, a $10{\times}10$ micro SLM array for phase and amplitude modulation of incident light is designed and fabricated using surface micromachining technology. Hidden spring structure is used in order to maximize the fill-factor and minimize diffraction effect at the support posts. Static and dynamic characteristics of designed micro SLM are simulated with ABAQUS and measured with optical measurement system using He-Ne laser and PSD(position sensitive devise).

Keywords