Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1996.11a
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- Pages.416-418
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- 1996
Fabrication of Micromirror Array with Vertical Spring Structure
- Shin, Jong-Woo (School of Electrical Engineering, Seoul National University) ;
- Kim, Yong-Kweon (School of Electrical Engineering, Seoul National University) ;
- Choi, Bum-Gyu (Samsung Electronics)
- Published : 1996.11.16
Abstract
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