Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Terahertz Transmission Imaging with Antenna-Coupled Bolometer Sensor

안테나 결합형 볼로미터 방식 테라헤르츠 센서를 이용한 이차원 주사 방식의 투과형 테라헤르츠 영상 취득에 관한 연구

  • Lee, Kyoung Il (High-tech Materials & Components R&D Division, Korea Electronics Technology Institute) ;
  • Lim, Byung Jik (High-tech Materials & Components R&D Division, Korea Electronics Technology Institute) ;
  • Won, Jongsuk (High-tech Materials & Components R&D Division, Korea Electronics Technology Institute) ;
  • Hong, Sung Min (High-tech Materials & Components R&D Division, Korea Electronics Technology Institute) ;
  • Park, Jae Hyoun (High-tech Materials & Components R&D Division, Korea Electronics Technology Institute) ;
  • Lee, Dae Sung (High-tech Materials & Components R&D Division, Korea Electronics Technology Institute)
  • 이경일 (전자부품연구원 첨단소재부품연구본부) ;
  • 임병직 (전자부품연구원 첨단소재부품연구본부) ;
  • 원종석 (전자부품연구원 첨단소재부품연구본부) ;
  • 홍성민 (전자부품연구원 첨단소재부품연구본부) ;
  • 박재현 (전자부품연구원 첨단소재부품연구본부) ;
  • 이대성 (전자부품연구원 첨단소재부품연구본부)
  • Received : 2018.08.20
  • Accepted : 2018.08.31
  • Published : 2018.09.30
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Abstract

An antenna-coupled bolometer-type terahertz sensor was designed, fabricated, evaluated, and utilized to obtain terahertz transmission images. The sensor consists of a thin film bowtie antenna that resonates accordingly in response to an incident terahertz beam, a heater that converts the applied current in the antenna into heat, and a microbolometer that converts the rise in temperature into a change in resistance. The device is fabricated by a bulk micromachining process on a 4-inch silicon wafer. The fabricated sensor chip has a size of $2{\times}2mm$ and an active area of $0.1{\times}0.1mm^2$. The temperature coefficient of resistance (TCR) of the bolometer film (VOx) is 2.0%, which is acceptable for bolometer applications. The output sensor signal is proportional to the power of the incident terahertz beam. Transmission images were obtained with a 2-axis scanning imaging system that contained the sensor. The small active area of the sensor will enable the development of highly sensitive focal plane array sensors in terahertz imaging cameras in the future.

Keywords

References

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