• Proceedings of the IEEK Conference
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• 1999.06a
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• pp.922-925
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• 1999

The Silylation photo-resist etch process was tested by Enhanced-ICP dry etcher. The comparison of the two process results of micro pattern etching with 0.25${\mu}{\textrm}{m}$ CD by E-ICP and ICP reveals that E-ICP has better quality than ICP The etch rate and the microloading effect was improved in E-ICP Especially, the problem of the lateral etch was improved in E-ICP.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.31 no.7
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• pp.53-62
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• 2003

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.2 no.2
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• pp.63-68
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• 2009

We study on the transient response in non-uniform microstrip lines with optically controlled microwave pulses. The transient response of the microwave pulses in plasma layer has been evaluated by reflection function of dielectric microstrip lines. The variation of characteristic response in plasma layer with localized pulses has been evaluated analytically. Reflection the change of the reflection amplitude has been observed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1832-1835
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• 2003

This paper suggests the selective ultra precision polishing techniques for micro die and mold parts using magnetic-assisted machining. Fabrication of magnetic abrasive particle and their polishing performance are key technology at ultra precision polishing process of micro parts. Conventional magnetic abrasives have disadvantages. which are missing of abrasive particle and inequality between magnetic particle and abrasive particle. So, bonded magnetic abrasive particles are fabricated by several method. For example, plasma melting and direct bonding. Ferrite and carbonyl iron powder are used as magnetic particle where silicon carbide and Al$_2$O$_3$ are abrasive particle. Developed particles are analyzed using measurement device such as SEM. Possibility of magnetic abrasive and polishing performance of this magnetic abrasive particles also have been investigated. After polishing, surface roughness of workpiece is reduced from 2.927 $\mu\textrm{m}$ Rmax to 0.453 $\mu\textrm{m}$ Rmax.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.8 s.173
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• pp.159-164
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• 2005

The Hot Embossing Lithography(HEL) as a method fur the fabrication of the nanostructure with polymer is becoming increasingly important because of its simple process, low cost, high replication fidelity and relatively high throughput. In this paper, we carried out experimental studies and numerical simulations in order to understand the viscous flow of the polymer (PMMA) film during the hot embossing process. To grasp the characteristics of the micro patterning rheology by process parameters (embossing temperature, pressure and time), we have carried out various experiments by using the nickel-coated master fabricated by the deep RIE process and the plasma sputtering. During the hot embossing process, we have observed the characteristics of the viscoelastic behavior of polymer. Also, the viscous flow during the hot embossing process has been simulated by the continuum based FDM(Finite Difference Method) analysis considering the micro effect, such as a surface tension and a contact angle.

• Journal of the Korean Vacuum Society
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• v.12 no.S1
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• pp.21-27
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• 2003

Micro-arc discharge oxidation (MDO) is a cost-effective plasma electrolytic process which can be used to improve the wear and corrosion resistance of Al-alloy parts by forming a alumina coating on the component surface. However, the MDO coated Al-alloy components often exhibit relatively high friction coefficients and low wear resistance fitted with many counterface materials, additionally, the pitting corrosion for the MDO coated AI-alloy components, especially for a thinner alumina coating, often occurs in atmosphere circumstance due to the porous alumina coats. Therefore, a duplex treatment, combining a MDO coated ahumina thin layer with a TiN coating, prepared by magnetron sputtering (MS), has been investigated. The Vicker's microhardness, pin-on-disc, electrochemical measurement, salt spray, XRD and SEM tests were used to characterize and analyze the treated samples. The work demonstrates that the MDO/MS coated samples have a combination of a very low friction coefficient and good wear resistance as well as corrosion since the micro-holes on alumina coating are partly or fully covered by TiN material.

• Journal of the Korean Institute of Telematics and Electronics
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• v.5 no.3
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• pp.31-39
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• 1968

In this paper microwave power propagated through the cold plasma was analyzed and measured with respect to the external magenetic flux density. The d. c discharge plasma was in the rectangular waveguide in which two electrode was inserted, and also the glass diseharge tube inserted in the ractangular wavegside. The direction of microwave pro-pagation, the axis of the discharge tube and external magnetic flux were perpendicular to each other. It showed that the attenuation and absorption of micro wave power propagated in the plasma was increased as the magnetic flux density, the discharge current and the pressure of the gas were increased.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1998.10a
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• pp.265-271
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• 1998

High temperature wear behavior of plasma sprayed zirconia based coating sealing with zirconia sol were investigated for high temperature wear resistance application. The zirconia powders containing 2.5, 5.0, 7.5, 10.0 mol% of MoS$_2$, $Fe_2O_3$ for plasma spray were made by spray drying method. As-sprayed coating was sealed by zirconia-sol to fill up the pore and crack in coating. wear test were performed at temperature ranges from room temperature to 600$\circ$C. The microstructural changes of before and after sealing process were examined by SEM, XRD and EPMA. After sealing process, the porosity was decreased and micro-hardness was increased. The wear properties of coating after sealing process were improved by sealing of pores and cracks. The behavior of wear amount and coefficient of friction were same tendency to before sealing process.

• Textile Coloration and Finishing
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• v.20 no.4
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• pp.43-52
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• 2008

Wool fabric was treated with oxygen low-temperature plasma (LTP) and dichloroisocyanuric acid. The effect of dimensional stability (relaxation shrinkage, hygral expansion, felting shrinkage), tensile strength and elongation, crease recovery, and hand of wool fabric between LTP, DCCA treated wool fabrics and control wool fabric were investigated. SEM photograph showed that a little micro crack was formed on the fiber surface by plasma treatment with hard condition and epicuticle scale was damaged by DCCA treatment. Felting shrinkage, tensile strength and total hand value were much different in each samples.

• Proceedings of the PSK Conference
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• 2003.04a
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• pp.278.2-278.2
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• 2003

A column-switching semi-micro HPLC method with fluorescence detection was developed for the direct analysis of rebamipide in human plasma. Plasma was filtered through a 0.45 $\mu\textrm{m}$ membrane filter and 5 ${\mu}\ell$ of the filtrate was directly injected onto the pre-column. After elution of the plasma proteins to waste, the retained rebamipide and internal standard(ofloxacin) were transferred to a C18 semi-microcolumn (5$\mu\textrm{m}$, 150 ${\times}$2.0mm) where they were separated using acetonitrile-1.4％ acetic acid (40:60, v/v) as mobile phase. (omitted)