The Properties of Microwave Propagation in Discharging Plasma

방전에 의한 프라즈마에서의 마이크로파 전파특성

In this paper microwave power propagated through the cold plasma was analyzed and measured with respect to the external magenetic flux density. The d. c discharge plasma was in the rectangular waveguide in which two electrode was inserted, and also the glass diseharge tube inserted in the ractangular wavegside. The direction of microwave pro-pagation, the axis of the discharge tube and external magnetic flux were perpendicular to each other. It showed that the attenuation and absorption of micro wave power propagated in the plasma was increased as the magnetic flux density, the discharge current and the pressure of the gas were increased.

외부자계가 가해진 냉프라즈마에서의 마이크로파 전파 특성을 측정하였다. 직류방전프라즈마는 두 전극판을 구형도파관에 삽입한것과, 또한 유리시설관을 구형도파관에 삽입한 것에서 이루어졌다. 마이크로파 전파방향, 방전관축, 외부자계는 각각 수직이고, 자속밀도, 방전유기, 기체압등이 증가할때 프라즈마를 전파하는 마이크로파의 감쇠 및 흡수는 증가함을 보았다.